7/6/2012	6:48:33 AM	Main Vac valve closed
7/6/2012	6:48:46 AM	Main Vac valve opened
7/6/2012	6:50:19 AM	Recipe started at 6:50 AM
7/6/2012	6:50:19 AM	Helium valve closed
7/6/2012	6:50:19 AM	H2 valve closed
7/6/2012	6:50:19 AM	BCl3 valve closed
7/6/2012	6:50:19 AM	PH3 valve closed
7/6/2012	6:50:19 AM	SiCl4 pre valve closed
7/6/2012	6:50:19 AM	SiCl4 post valve closed
7/6/2012	6:50:19 AM	Main Vac valve closed
7/6/2012	6:50:19 AM	Bypass valve closed
7/6/2012	6:50:19 AM	Bubbler valve closed
7/6/2012	6:50:19 AM	Helium MFC set to  0.000000
7/6/2012	6:50:19 AM	H2 MFC set to  0.000000
7/6/2012	6:50:19 AM	BCl3 MFC set to  0.000000
7/6/2012	6:50:19 AM	PH3 MFC set to  0.000000
7/6/2012	6:50:19 AM	SiCl4 MFC set to  0.000000
7/6/2012	6:50:19 AM	Bypass solenoid MFC set to  0.000000
7/6/2012	6:50:19 AM	Tube furnace set to 0
7/6/2012	6:50:22 AM	Helium valve closed
7/6/2012	6:50:22 AM	BCl3 valve closed
7/6/2012	6:50:22 AM	PH3 valve closed
7/6/2012	6:50:22 AM	SiCl4 pre valve closed
7/6/2012	6:50:22 AM	SiCl4 post valve closed
7/6/2012	6:50:22 AM	Main Vac valve closed
7/6/2012	6:50:22 AM	Bypass valve closed
7/6/2012	6:50:22 AM	Bubbler valve closed
7/6/2012	6:50:22 AM	H2 valve opened
7/6/2012	6:50:22 AM	Helium MFC set to  0.000000
7/6/2012	6:50:22 AM	H2 MFC set to  500.000000
7/6/2012	6:50:22 AM	BCl3 MFC set to  0.000000
7/6/2012	6:50:22 AM	PH3 MFC set to  0.000000
7/6/2012	6:50:22 AM	SiCl4 MFC set to  0.000000
7/6/2012	6:50:22 AM	Bypass solenoid MFC set to  0.000000
7/6/2012	6:50:22 AM	Tube furnace set to 0
7/6/2012	6:51:39 AM	Helium valve closed
7/6/2012	6:51:39 AM	BCl3 valve closed
7/6/2012	6:51:39 AM	PH3 valve closed
7/6/2012	6:51:39 AM	SiCl4 pre valve closed
7/6/2012	6:51:39 AM	SiCl4 post valve closed
7/6/2012	6:51:39 AM	Main Vac valve closed
7/6/2012	6:51:39 AM	Bypass valve closed
7/6/2012	6:51:39 AM	H2 valve opened
7/6/2012	6:51:39 AM	Bubbler valve opened
7/6/2012	6:51:39 AM	Helium MFC set to  0.000000
7/6/2012	6:51:39 AM	H2 MFC set to  500.000000
7/6/2012	6:51:39 AM	BCl3 MFC set to  0.000000
7/6/2012	6:51:39 AM	PH3 MFC set to  0.000000
7/6/2012	6:51:39 AM	SiCl4 MFC set to  0.000000
7/6/2012	6:51:39 AM	Bypass solenoid MFC set to  0.000000
7/6/2012	6:51:39 AM	Tube furnace set to 0
7/6/2012	6:51:40 AM	Helium valve closed
7/6/2012	6:51:40 AM	BCl3 valve closed
7/6/2012	6:51:40 AM	PH3 valve closed
7/6/2012	6:51:40 AM	SiCl4 pre valve closed
7/6/2012	6:51:40 AM	SiCl4 post valve closed
7/6/2012	6:51:40 AM	Main Vac valve closed
7/6/2012	6:51:40 AM	Bypass valve closed
7/6/2012	6:51:40 AM	H2 valve opened
7/6/2012	6:51:40 AM	Bubbler valve opened
7/6/2012	6:51:40 AM	Helium MFC set to  0.000000
7/6/2012	6:51:40 AM	H2 MFC set to  500.000000
7/6/2012	6:51:40 AM	BCl3 MFC set to  0.000000
7/6/2012	6:51:40 AM	PH3 MFC set to  0.000000
7/6/2012	6:51:40 AM	SiCl4 MFC set to  0.000000
7/6/2012	6:51:40 AM	Bypass solenoid MFC set to  0.000000
7/6/2012	6:51:40 AM	Tube furnace set to 1000
7/6/2012	7:21:40 AM	Helium valve closed
7/6/2012	7:21:40 AM	PH3 valve closed
7/6/2012	7:21:40 AM	Main Vac valve closed
7/6/2012	7:21:40 AM	Bypass valve closed
7/6/2012	7:21:40 AM	H2 valve opened
7/6/2012	7:21:40 AM	BCl3 valve opened
7/6/2012	7:21:40 AM	SiCl4 pre valve opened
7/6/2012	7:21:40 AM	SiCl4 post valve opened
7/6/2012	7:21:40 AM	Bubbler valve opened
7/6/2012	7:21:40 AM	Helium MFC set to  0.000000
7/6/2012	7:21:40 AM	H2 MFC set to  500.000000
7/6/2012	7:21:40 AM	BCl3 MFC set to  1.000000
7/6/2012	7:21:40 AM	PH3 MFC set to  0.000000
7/6/2012	7:21:40 AM	SiCl4 MFC set to  50.000000
7/6/2012	7:21:40 AM	Bypass solenoid MFC set to  0.000000
7/6/2012	7:21:41 AM	Tube furnace set to 1000
7/6/2012	7:29:41 AM	Helium valve closed
7/6/2012	7:29:41 AM	BCl3 valve closed
7/6/2012	7:29:41 AM	PH3 valve closed
7/6/2012	7:29:41 AM	SiCl4 pre valve closed
7/6/2012	7:29:41 AM	SiCl4 post valve closed
7/6/2012	7:29:41 AM	Main Vac valve closed
7/6/2012	7:29:41 AM	Bypass valve closed
7/6/2012	7:29:41 AM	H2 valve opened
7/6/2012	7:29:41 AM	Bubbler valve opened
7/6/2012	7:29:41 AM	Helium MFC set to  0.000000
7/6/2012	7:29:41 AM	H2 MFC set to  500.000000
7/6/2012	7:29:41 AM	BCl3 MFC set to  0.000000
7/6/2012	7:29:41 AM	PH3 MFC set to  0.000000
7/6/2012	7:29:41 AM	SiCl4 MFC set to  0.000000
7/6/2012	7:29:41 AM	Bypass solenoid MFC set to  0.000000
7/6/2012	7:29:41 AM	Tube furnace set to 750
7/6/2012	7:34:41 AM	H2 valve closed
7/6/2012	7:34:41 AM	BCl3 valve closed
7/6/2012	7:34:41 AM	PH3 valve closed
7/6/2012	7:34:41 AM	SiCl4 pre valve closed
7/6/2012	7:34:41 AM	SiCl4 post valve closed
7/6/2012	7:34:41 AM	Main Vac valve closed
7/6/2012	7:34:41 AM	Bypass valve closed
7/6/2012	7:34:41 AM	Helium valve opened
7/6/2012	7:34:41 AM	Bubbler valve opened
7/6/2012	7:34:41 AM	Helium MFC set to  500.000000
7/6/2012	7:34:41 AM	H2 MFC set to  0.000000
7/6/2012	7:34:41 AM	BCl3 MFC set to  0.000000
7/6/2012	7:34:41 AM	PH3 MFC set to  0.000000
7/6/2012	7:34:41 AM	SiCl4 MFC set to  0.000000
7/6/2012	7:34:41 AM	Bypass solenoid MFC set to  0.000000
7/6/2012	7:34:41 AM	Tube furnace set to 0
7/6/2012	7:44:00 AM	Helium valve closed
7/6/2012	7:44:00 AM	H2 valve closed
7/6/2012	7:44:00 AM	BCl3 valve closed
7/6/2012	7:44:00 AM	PH3 valve closed
7/6/2012	7:44:00 AM	SiCl4 pre valve closed
7/6/2012	7:44:00 AM	SiCl4 post valve closed
7/6/2012	7:44:00 AM	Main Vac valve closed
7/6/2012	7:44:00 AM	Bypass valve closed
7/6/2012	7:44:00 AM	Bubbler valve closed
7/6/2012	7:44:00 AM	Helium MFC set to  0.000000
7/6/2012	7:44:00 AM	H2 MFC set to  0.000000
7/6/2012	7:44:00 AM	BCl3 MFC set to  0.000000
7/6/2012	7:44:00 AM	PH3 MFC set to  0.000000
7/6/2012	7:44:00 AM	SiCl4 MFC set to  0.000000
7/6/2012	7:44:00 AM	Bypass solenoid MFC set to  0.000000
7/6/2012	7:44:01 AM	Tube furnace set to 0
7/6/2012	7:44:02 AM	Run finished at 7:44 AM
7/6/2012	7:46:30 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/6/2012	7:46:31 AM	Recipe started at 7:46 AM
7/6/2012	7:46:31 AM	Helium valve closed
7/6/2012	7:46:31 AM	H2 valve closed
7/6/2012	7:46:31 AM	BCl3 valve closed
7/6/2012	7:46:31 AM	PH3 valve closed
7/6/2012	7:46:31 AM	SiCl4 pre valve closed
7/6/2012	7:46:31 AM	SiCl4 post valve closed
7/6/2012	7:46:31 AM	Main Vac valve closed
7/6/2012	7:46:31 AM	Bubbler valve closed
7/6/2012	7:46:31 AM	Bypass valve opened
7/6/2012	7:46:31 AM	Helium MFC set to  0.000000
7/6/2012	7:46:31 AM	H2 MFC set to  0.000000
7/6/2012	7:46:31 AM	BCl3 MFC set to  0.000000
7/6/2012	7:46:31 AM	PH3 MFC set to  0.000000
7/6/2012	7:46:31 AM	SiCl4 MFC set to  0.000000
7/6/2012	7:46:31 AM	Bypass solenoid MFC set to  0.000000
7/6/2012	7:46:31 AM	Tube furnace set to 0
7/6/2012	7:47:34 AM	Helium valve closed
7/6/2012	7:47:34 AM	H2 valve closed
7/6/2012	7:47:34 AM	BCl3 valve closed
7/6/2012	7:47:34 AM	PH3 valve closed
7/6/2012	7:47:34 AM	SiCl4 pre valve closed
7/6/2012	7:47:34 AM	SiCl4 post valve closed
7/6/2012	7:47:34 AM	Main Vac valve closed
7/6/2012	7:47:34 AM	Bubbler valve closed
7/6/2012	7:47:34 AM	Bypass valve opened
7/6/2012	7:47:34 AM	Helium MFC set to  0.000000
7/6/2012	7:47:34 AM	H2 MFC set to  0.000000
7/6/2012	7:47:34 AM	BCl3 MFC set to  0.000000
7/6/2012	7:47:34 AM	PH3 MFC set to  0.000000
7/6/2012	7:47:34 AM	SiCl4 MFC set to  0.000000
7/6/2012	7:47:34 AM	Bypass solenoid MFC set to  0.000000
7/6/2012	7:47:34 AM	Tube furnace set to 0
7/6/2012	7:48:04 AM	Helium valve closed
7/6/2012	7:48:04 AM	H2 valve closed
7/6/2012	7:48:04 AM	BCl3 valve closed
7/6/2012	7:48:04 AM	PH3 valve closed
7/6/2012	7:48:04 AM	SiCl4 pre valve closed
7/6/2012	7:48:04 AM	SiCl4 post valve closed
7/6/2012	7:48:04 AM	Bypass valve closed
7/6/2012	7:48:04 AM	Bubbler valve closed
7/6/2012	7:48:04 AM	Main Vac valve opened
7/6/2012	7:48:04 AM	Helium MFC set to  0.000000
7/6/2012	7:48:04 AM	H2 MFC set to  0.000000
7/6/2012	7:48:04 AM	BCl3 MFC set to  0.000000
7/6/2012	7:48:04 AM	PH3 MFC set to  0.000000
7/6/2012	7:48:04 AM	SiCl4 MFC set to  0.000000
7/6/2012	7:48:04 AM	Bypass solenoid MFC set to  0.000000
7/6/2012	7:48:04 AM	Tube furnace set to 0
7/6/2012	7:48:05 AM	Run finished at 7:48 AM
7/6/2012	7:48:05 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/6/2012	7:48:24 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
7/6/2012	7:48:37 AM	Recipe started at 7:48 AM
7/6/2012	7:48:37 AM	Helium valve closed
7/6/2012	7:48:37 AM	H2 valve closed
7/6/2012	7:48:37 AM	BCl3 valve closed
7/6/2012	7:48:37 AM	PH3 valve closed
7/6/2012	7:48:37 AM	SiCl4 pre valve closed
7/6/2012	7:48:37 AM	SiCl4 post valve closed
7/6/2012	7:48:37 AM	Main Vac valve closed
7/6/2012	7:48:37 AM	Bubbler valve closed
7/6/2012	7:48:37 AM	Bypass valve opened
7/6/2012	7:48:37 AM	Helium MFC set to  0.000000
7/6/2012	7:48:37 AM	H2 MFC set to  0.000000
7/6/2012	7:48:37 AM	BCl3 MFC set to  0.000000
7/6/2012	7:48:37 AM	PH3 MFC set to  0.000000
7/6/2012	7:48:37 AM	SiCl4 MFC set to  0.000000
7/6/2012	7:48:37 AM	Bypass solenoid MFC set to  0.000000
7/6/2012	7:48:37 AM	Tube furnace set to 0
7/6/2012	7:48:37 AM	Helium valve closed
7/6/2012	7:48:37 AM	H2 valve closed
7/6/2012	7:48:37 AM	BCl3 valve closed
7/6/2012	7:48:37 AM	PH3 valve closed
7/6/2012	7:48:37 AM	SiCl4 pre valve closed
7/6/2012	7:48:37 AM	SiCl4 post valve closed
7/6/2012	7:48:37 AM	Main Vac valve closed
7/6/2012	7:48:37 AM	Bubbler valve closed
7/6/2012	7:48:37 AM	Bypass valve opened
7/6/2012	7:48:37 AM	Helium MFC set to  0.000000
7/6/2012	7:48:37 AM	H2 MFC set to  0.000000
7/6/2012	7:48:37 AM	BCl3 MFC set to  0.000000
7/6/2012	7:48:37 AM	PH3 MFC set to  0.000000
7/6/2012	7:48:37 AM	SiCl4 MFC set to  0.000000
7/6/2012	7:48:37 AM	Bypass solenoid MFC set to  0.000000
7/6/2012	7:48:38 AM	Tube furnace set to 0
7/6/2012	7:49:07 AM	Helium valve closed
7/6/2012	7:49:07 AM	H2 valve closed
7/6/2012	7:49:07 AM	BCl3 valve closed
7/6/2012	7:49:07 AM	PH3 valve closed
7/6/2012	7:49:07 AM	SiCl4 pre valve closed
7/6/2012	7:49:07 AM	SiCl4 post valve closed
7/6/2012	7:49:07 AM	Bypass valve closed
7/6/2012	7:49:07 AM	Bubbler valve closed
7/6/2012	7:49:07 AM	Main Vac valve opened
7/6/2012	7:49:07 AM	Helium MFC set to  0.000000
7/6/2012	7:49:07 AM	H2 MFC set to  0.000000
7/6/2012	7:49:07 AM	BCl3 MFC set to  0.000000
7/6/2012	7:49:07 AM	PH3 MFC set to  0.000000
7/6/2012	7:49:07 AM	SiCl4 MFC set to  0.000000
7/6/2012	7:49:07 AM	Bypass solenoid MFC set to  0.000000
7/6/2012	7:49:07 AM	Tube furnace set to 0
7/6/2012	7:49:19 AM	H2 valve closed
7/6/2012	7:49:19 AM	BCl3 valve closed
7/6/2012	7:49:19 AM	PH3 valve closed
7/6/2012	7:49:19 AM	SiCl4 pre valve closed
7/6/2012	7:49:19 AM	SiCl4 post valve closed
7/6/2012	7:49:19 AM	Bypass valve closed
7/6/2012	7:49:19 AM	Bubbler valve closed
7/6/2012	7:49:19 AM	Helium valve opened
7/6/2012	7:49:19 AM	Main Vac valve opened
7/6/2012	7:49:19 AM	Helium MFC set to  20.000000
7/6/2012	7:49:19 AM	H2 MFC set to  0.000000
7/6/2012	7:49:19 AM	BCl3 MFC set to  0.000000
7/6/2012	7:49:19 AM	PH3 MFC set to  0.000000
7/6/2012	7:49:19 AM	SiCl4 MFC set to  0.000000
7/6/2012	7:49:19 AM	Bypass solenoid MFC set to  0.000000
7/6/2012	7:49:19 AM	Tube furnace set to 0
7/6/2012	7:49:49 AM	Helium valve closed
7/6/2012	7:49:49 AM	H2 valve closed
7/6/2012	7:49:49 AM	BCl3 valve closed
7/6/2012	7:49:49 AM	PH3 valve closed
7/6/2012	7:49:49 AM	SiCl4 pre valve closed
7/6/2012	7:49:49 AM	SiCl4 post valve closed
7/6/2012	7:49:49 AM	Bypass valve closed
7/6/2012	7:49:49 AM	Bubbler valve closed
7/6/2012	7:49:49 AM	Main Vac valve opened
7/6/2012	7:49:49 AM	Helium MFC set to  0.000000
7/6/2012	7:49:49 AM	H2 MFC set to  0.000000
7/6/2012	7:49:49 AM	BCl3 MFC set to  0.000000
7/6/2012	7:49:49 AM	PH3 MFC set to  0.000000
7/6/2012	7:49:49 AM	SiCl4 MFC set to  0.000000
7/6/2012	7:49:49 AM	Bypass solenoid MFC set to  0.000000
7/6/2012	7:49:49 AM	Tube furnace set to 0
7/6/2012	7:50:19 AM	H2 valve closed
7/6/2012	7:50:19 AM	BCl3 valve closed
7/6/2012	7:50:19 AM	PH3 valve closed
7/6/2012	7:50:19 AM	SiCl4 pre valve closed
7/6/2012	7:50:19 AM	SiCl4 post valve closed
7/6/2012	7:50:19 AM	Bypass valve closed
7/6/2012	7:50:19 AM	Bubbler valve closed
7/6/2012	7:50:19 AM	Helium valve opened
7/6/2012	7:50:19 AM	Main Vac valve opened
7/6/2012	7:50:19 AM	Helium MFC set to  20.000000
7/6/2012	7:50:19 AM	H2 MFC set to  0.000000
7/6/2012	7:50:19 AM	BCl3 MFC set to  0.000000
7/6/2012	7:50:19 AM	PH3 MFC set to  0.000000
7/6/2012	7:50:19 AM	SiCl4 MFC set to  0.000000
7/6/2012	7:50:19 AM	Bypass solenoid MFC set to  0.000000
7/6/2012	7:50:19 AM	Tube furnace set to 0
7/6/2012	7:50:49 AM	Helium valve closed
7/6/2012	7:50:49 AM	H2 valve closed
7/6/2012	7:50:49 AM	BCl3 valve closed
7/6/2012	7:50:49 AM	PH3 valve closed
7/6/2012	7:50:49 AM	SiCl4 pre valve closed
7/6/2012	7:50:49 AM	SiCl4 post valve closed
7/6/2012	7:50:49 AM	Bypass valve closed
7/6/2012	7:50:49 AM	Bubbler valve closed
7/6/2012	7:50:49 AM	Main Vac valve opened
7/6/2012	7:50:49 AM	Helium MFC set to  0.000000
7/6/2012	7:50:49 AM	H2 MFC set to  0.000000
7/6/2012	7:50:49 AM	BCl3 MFC set to  0.000000
7/6/2012	7:50:49 AM	PH3 MFC set to  0.000000
7/6/2012	7:50:49 AM	SiCl4 MFC set to  0.000000
7/6/2012	7:50:49 AM	Bypass solenoid MFC set to  0.000000
7/6/2012	7:50:49 AM	Tube furnace set to 0
7/6/2012	7:51:19 AM	H2 valve closed
7/6/2012	7:51:19 AM	BCl3 valve closed
7/6/2012	7:51:20 AM	PH3 valve closed
7/6/2012	7:51:20 AM	SiCl4 pre valve closed
7/6/2012	7:51:20 AM	SiCl4 post valve closed
7/6/2012	7:51:20 AM	Bypass valve closed
7/6/2012	7:51:20 AM	Bubbler valve closed
7/6/2012	7:51:20 AM	Helium valve opened
7/6/2012	7:51:20 AM	Main Vac valve opened
7/6/2012	7:51:20 AM	Helium MFC set to  20.000000
7/6/2012	7:51:20 AM	H2 MFC set to  0.000000
7/6/2012	7:51:20 AM	BCl3 MFC set to  0.000000
7/6/2012	7:51:20 AM	PH3 MFC set to  0.000000
7/6/2012	7:51:20 AM	SiCl4 MFC set to  0.000000
7/6/2012	7:51:20 AM	Bypass solenoid MFC set to  0.000000
7/6/2012	7:51:20 AM	Tube furnace set to 0
7/6/2012	7:51:50 AM	Helium valve closed
7/6/2012	7:51:50 AM	H2 valve closed
7/6/2012	7:51:50 AM	BCl3 valve closed
7/6/2012	7:51:50 AM	PH3 valve closed
7/6/2012	7:51:50 AM	SiCl4 pre valve closed
7/6/2012	7:51:50 AM	SiCl4 post valve closed
7/6/2012	7:51:50 AM	Bypass valve closed
7/6/2012	7:51:50 AM	Bubbler valve closed
7/6/2012	7:51:50 AM	Main Vac valve opened
7/6/2012	7:51:50 AM	Helium MFC set to  0.000000
7/6/2012	7:51:50 AM	H2 MFC set to  0.000000
7/6/2012	7:51:50 AM	BCl3 MFC set to  0.000000
7/6/2012	7:51:50 AM	PH3 MFC set to  0.000000
7/6/2012	7:51:50 AM	SiCl4 MFC set to  0.000000
7/6/2012	7:51:50 AM	Bypass solenoid MFC set to  0.000000
7/6/2012	7:51:50 AM	Tube furnace set to 0
7/6/2012	7:52:20 AM	H2 valve closed
7/6/2012	7:52:20 AM	BCl3 valve closed
7/6/2012	7:52:20 AM	PH3 valve closed
7/6/2012	7:52:20 AM	SiCl4 pre valve closed
7/6/2012	7:52:20 AM	SiCl4 post valve closed
7/6/2012	7:52:20 AM	Bypass valve closed
7/6/2012	7:52:20 AM	Bubbler valve closed
7/6/2012	7:52:20 AM	Helium valve opened
7/6/2012	7:52:20 AM	Main Vac valve opened
7/6/2012	7:52:20 AM	Helium MFC set to  20.000000
7/6/2012	7:52:20 AM	H2 MFC set to  0.000000
7/6/2012	7:52:20 AM	BCl3 MFC set to  0.000000
7/6/2012	7:52:20 AM	PH3 MFC set to  0.000000
7/6/2012	7:52:20 AM	SiCl4 MFC set to  0.000000
7/6/2012	7:52:20 AM	Bypass solenoid MFC set to  0.000000
7/6/2012	7:52:20 AM	Tube furnace set to 0
7/6/2012	7:52:50 AM	Helium valve closed
7/6/2012	7:52:50 AM	H2 valve closed
7/6/2012	7:52:50 AM	BCl3 valve closed
7/6/2012	7:52:50 AM	PH3 valve closed
7/6/2012	7:52:50 AM	SiCl4 pre valve closed
7/6/2012	7:52:50 AM	SiCl4 post valve closed
7/6/2012	7:52:50 AM	Bypass valve closed
7/6/2012	7:52:50 AM	Bubbler valve closed
7/6/2012	7:52:50 AM	Main Vac valve opened
7/6/2012	7:52:50 AM	Helium MFC set to  0.000000
7/6/2012	7:52:50 AM	H2 MFC set to  0.000000
7/6/2012	7:52:50 AM	BCl3 MFC set to  0.000000
7/6/2012	7:52:50 AM	PH3 MFC set to  0.000000
7/6/2012	7:52:50 AM	SiCl4 MFC set to  0.000000
7/6/2012	7:52:50 AM	Bypass solenoid MFC set to  0.000000
7/6/2012	7:52:50 AM	Tube furnace set to 0
7/6/2012	7:53:20 AM	H2 valve closed
7/6/2012	7:53:20 AM	BCl3 valve closed
7/6/2012	7:53:20 AM	PH3 valve closed
7/6/2012	7:53:20 AM	SiCl4 pre valve closed
7/6/2012	7:53:20 AM	SiCl4 post valve closed
7/6/2012	7:53:20 AM	Bypass valve closed
7/6/2012	7:53:20 AM	Bubbler valve closed
7/6/2012	7:53:20 AM	Helium valve opened
7/6/2012	7:53:20 AM	Main Vac valve opened
7/6/2012	7:53:20 AM	Helium MFC set to  20.000000
7/6/2012	7:53:20 AM	H2 MFC set to  0.000000
7/6/2012	7:53:20 AM	BCl3 MFC set to  0.000000
7/6/2012	7:53:20 AM	PH3 MFC set to  0.000000
7/6/2012	7:53:20 AM	SiCl4 MFC set to  0.000000
7/6/2012	7:53:21 AM	Bypass solenoid MFC set to  0.000000
7/6/2012	7:53:21 AM	Tube furnace set to 0
7/6/2012	7:53:51 AM	Helium valve closed
7/6/2012	7:53:51 AM	H2 valve closed
7/6/2012	7:53:51 AM	BCl3 valve closed
7/6/2012	7:53:51 AM	PH3 valve closed
7/6/2012	7:53:51 AM	SiCl4 pre valve closed
7/6/2012	7:53:51 AM	SiCl4 post valve closed
7/6/2012	7:53:51 AM	Bypass valve closed
7/6/2012	7:53:51 AM	Bubbler valve closed
7/6/2012	7:53:51 AM	Main Vac valve opened
7/6/2012	7:53:51 AM	Helium MFC set to  0.000000
7/6/2012	7:53:51 AM	H2 MFC set to  0.000000
7/6/2012	7:53:51 AM	BCl3 MFC set to  0.000000
7/6/2012	7:53:51 AM	PH3 MFC set to  0.000000
7/6/2012	7:53:51 AM	SiCl4 MFC set to  0.000000
7/6/2012	7:53:51 AM	Bypass solenoid MFC set to  0.000000
7/6/2012	7:53:51 AM	Tube furnace set to 0
7/6/2012	7:54:21 AM	H2 valve closed
7/6/2012	7:54:21 AM	BCl3 valve closed
7/6/2012	7:54:21 AM	PH3 valve closed
7/6/2012	7:54:21 AM	SiCl4 pre valve closed
7/6/2012	7:54:21 AM	SiCl4 post valve closed
7/6/2012	7:54:21 AM	Bypass valve closed
7/6/2012	7:54:21 AM	Bubbler valve closed
7/6/2012	7:54:21 AM	Helium valve opened
7/6/2012	7:54:21 AM	Main Vac valve opened
7/6/2012	7:54:21 AM	Helium MFC set to  20.000000
7/6/2012	7:54:21 AM	H2 MFC set to  0.000000
7/6/2012	7:54:21 AM	BCl3 MFC set to  0.000000
7/6/2012	7:54:21 AM	PH3 MFC set to  0.000000
7/6/2012	7:54:21 AM	SiCl4 MFC set to  0.000000
7/6/2012	7:54:21 AM	Bypass solenoid MFC set to  0.000000
7/6/2012	7:54:21 AM	Tube furnace set to 0
7/6/2012	7:54:51 AM	Helium valve closed
7/6/2012	7:54:51 AM	H2 valve closed
7/6/2012	7:54:51 AM	BCl3 valve closed
7/6/2012	7:54:51 AM	PH3 valve closed
7/6/2012	7:54:51 AM	SiCl4 pre valve closed
7/6/2012	7:54:51 AM	SiCl4 post valve closed
7/6/2012	7:54:51 AM	Bypass valve closed
7/6/2012	7:54:51 AM	Bubbler valve closed
7/6/2012	7:54:51 AM	Main Vac valve opened
7/6/2012	7:54:51 AM	Helium MFC set to  0.000000
7/6/2012	7:54:51 AM	H2 MFC set to  0.000000
7/6/2012	7:54:51 AM	BCl3 MFC set to  0.000000
7/6/2012	7:54:51 AM	PH3 MFC set to  0.000000
7/6/2012	7:54:51 AM	SiCl4 MFC set to  0.000000
7/6/2012	7:54:51 AM	Bypass solenoid MFC set to  0.000000
7/6/2012	7:54:51 AM	Tube furnace set to 0
7/6/2012	7:55:21 AM	H2 valve closed
7/6/2012	7:55:21 AM	BCl3 valve closed
7/6/2012	7:55:21 AM	PH3 valve closed
7/6/2012	7:55:21 AM	SiCl4 pre valve closed
7/6/2012	7:55:21 AM	SiCl4 post valve closed
7/6/2012	7:55:21 AM	Bypass valve closed
7/6/2012	7:55:21 AM	Bubbler valve closed
7/6/2012	7:55:21 AM	Helium valve opened
7/6/2012	7:55:21 AM	Main Vac valve opened
7/6/2012	7:55:21 AM	Helium MFC set to  20.000000
7/6/2012	7:55:21 AM	H2 MFC set to  0.000000
7/6/2012	7:55:21 AM	BCl3 MFC set to  0.000000
7/6/2012	7:55:21 AM	PH3 MFC set to  0.000000
7/6/2012	7:55:21 AM	SiCl4 MFC set to  0.000000
7/6/2012	7:55:21 AM	Bypass solenoid MFC set to  0.000000
7/6/2012	7:55:22 AM	Tube furnace set to 0
7/6/2012	7:55:52 AM	Helium valve closed
7/6/2012	7:55:52 AM	H2 valve closed
7/6/2012	7:55:52 AM	BCl3 valve closed
7/6/2012	7:55:52 AM	PH3 valve closed
7/6/2012	7:55:52 AM	SiCl4 pre valve closed
7/6/2012	7:55:52 AM	SiCl4 post valve closed
7/6/2012	7:55:52 AM	Bypass valve closed
7/6/2012	7:55:52 AM	Bubbler valve closed
7/6/2012	7:55:52 AM	Main Vac valve opened
7/6/2012	7:55:52 AM	Helium MFC set to  0.000000
7/6/2012	7:55:52 AM	H2 MFC set to  0.000000
7/6/2012	7:55:52 AM	BCl3 MFC set to  0.000000
7/6/2012	7:55:52 AM	PH3 MFC set to  0.000000
7/6/2012	7:55:52 AM	SiCl4 MFC set to  0.000000
7/6/2012	7:55:52 AM	Bypass solenoid MFC set to  0.000000
7/6/2012	7:55:52 AM	Tube furnace set to 0
7/6/2012	7:56:22 AM	H2 valve closed
7/6/2012	7:56:22 AM	BCl3 valve closed
7/6/2012	7:56:22 AM	PH3 valve closed
7/6/2012	7:56:22 AM	SiCl4 pre valve closed
7/6/2012	7:56:22 AM	SiCl4 post valve closed
7/6/2012	7:56:22 AM	Bypass valve closed
7/6/2012	7:56:22 AM	Bubbler valve closed
7/6/2012	7:56:22 AM	Helium valve opened
7/6/2012	7:56:22 AM	Main Vac valve opened
7/6/2012	7:56:22 AM	Helium MFC set to  20.000000
7/6/2012	7:56:22 AM	H2 MFC set to  0.000000
7/6/2012	7:56:22 AM	BCl3 MFC set to  0.000000
7/6/2012	7:56:22 AM	PH3 MFC set to  0.000000
7/6/2012	7:56:22 AM	SiCl4 MFC set to  0.000000
7/6/2012	7:56:22 AM	Bypass solenoid MFC set to  0.000000
7/6/2012	7:56:22 AM	Tube furnace set to 0
7/6/2012	7:56:52 AM	Helium valve closed
7/6/2012	7:56:52 AM	H2 valve closed
7/6/2012	7:56:52 AM	BCl3 valve closed
7/6/2012	7:56:52 AM	PH3 valve closed
7/6/2012	7:56:52 AM	SiCl4 pre valve closed
7/6/2012	7:56:52 AM	SiCl4 post valve closed
7/6/2012	7:56:52 AM	Bypass valve closed
7/6/2012	7:56:52 AM	Bubbler valve closed
7/6/2012	7:56:52 AM	Main Vac valve opened
7/6/2012	7:56:52 AM	Helium MFC set to  0.000000
7/6/2012	7:56:52 AM	H2 MFC set to  0.000000
7/6/2012	7:56:52 AM	BCl3 MFC set to  0.000000
7/6/2012	7:56:52 AM	PH3 MFC set to  0.000000
7/6/2012	7:56:52 AM	SiCl4 MFC set to  0.000000
7/6/2012	7:56:52 AM	Bypass solenoid MFC set to  0.000000
7/6/2012	7:56:52 AM	Tube furnace set to 0
7/6/2012	7:57:22 AM	H2 valve closed
7/6/2012	7:57:22 AM	BCl3 valve closed
7/6/2012	7:57:22 AM	PH3 valve closed
7/6/2012	7:57:22 AM	SiCl4 pre valve closed
7/6/2012	7:57:22 AM	SiCl4 post valve closed
7/6/2012	7:57:22 AM	Bypass valve closed
7/6/2012	7:57:22 AM	Bubbler valve closed
7/6/2012	7:57:22 AM	Helium valve opened
7/6/2012	7:57:22 AM	Main Vac valve opened
7/6/2012	7:57:22 AM	Helium MFC set to  20.000000
7/6/2012	7:57:22 AM	H2 MFC set to  0.000000
7/6/2012	7:57:22 AM	BCl3 MFC set to  0.000000
7/6/2012	7:57:22 AM	PH3 MFC set to  0.000000
7/6/2012	7:57:22 AM	SiCl4 MFC set to  0.000000
7/6/2012	7:57:22 AM	Bypass solenoid MFC set to  0.000000
7/6/2012	7:57:23 AM	Tube furnace set to 0
7/6/2012	7:57:53 AM	Helium valve closed
7/6/2012	7:57:53 AM	H2 valve closed
7/6/2012	7:57:53 AM	BCl3 valve closed
7/6/2012	7:57:53 AM	PH3 valve closed
7/6/2012	7:57:53 AM	SiCl4 pre valve closed
7/6/2012	7:57:53 AM	SiCl4 post valve closed
7/6/2012	7:57:53 AM	Bypass valve closed
7/6/2012	7:57:53 AM	Bubbler valve closed
7/6/2012	7:57:53 AM	Main Vac valve opened
7/6/2012	7:57:53 AM	Helium MFC set to  0.000000
7/6/2012	7:57:53 AM	H2 MFC set to  0.000000
7/6/2012	7:57:53 AM	BCl3 MFC set to  0.000000
7/6/2012	7:57:53 AM	PH3 MFC set to  0.000000
7/6/2012	7:57:53 AM	SiCl4 MFC set to  0.000000
7/6/2012	7:57:53 AM	Bypass solenoid MFC set to  0.000000
7/6/2012	7:57:53 AM	Tube furnace set to 0
7/6/2012	7:58:23 AM	H2 valve closed
7/6/2012	7:58:23 AM	BCl3 valve closed
7/6/2012	7:58:23 AM	PH3 valve closed
7/6/2012	7:58:23 AM	SiCl4 pre valve closed
7/6/2012	7:58:23 AM	SiCl4 post valve closed
7/6/2012	7:58:23 AM	Bypass valve closed
7/6/2012	7:58:23 AM	Bubbler valve closed
7/6/2012	7:58:23 AM	Helium valve opened
7/6/2012	7:58:23 AM	Main Vac valve opened
7/6/2012	7:58:23 AM	Helium MFC set to  20.000000
7/6/2012	7:58:23 AM	H2 MFC set to  0.000000
7/6/2012	7:58:23 AM	BCl3 MFC set to  0.000000
7/6/2012	7:58:23 AM	PH3 MFC set to  0.000000
7/6/2012	7:58:23 AM	SiCl4 MFC set to  0.000000
7/6/2012	7:58:23 AM	Bypass solenoid MFC set to  0.000000
7/6/2012	7:58:23 AM	Tube furnace set to 0
7/6/2012	7:58:53 AM	Helium valve closed
7/6/2012	7:58:53 AM	H2 valve closed
7/6/2012	7:58:53 AM	BCl3 valve closed
7/6/2012	7:58:53 AM	PH3 valve closed
7/6/2012	7:58:53 AM	SiCl4 pre valve closed
7/6/2012	7:58:53 AM	SiCl4 post valve closed
7/6/2012	7:58:53 AM	Bypass valve closed
7/6/2012	7:58:53 AM	Bubbler valve closed
7/6/2012	7:58:53 AM	Main Vac valve opened
7/6/2012	7:58:53 AM	Helium MFC set to  0.000000
7/6/2012	7:58:53 AM	H2 MFC set to  0.000000
7/6/2012	7:58:53 AM	BCl3 MFC set to  0.000000
7/6/2012	7:58:53 AM	PH3 MFC set to  0.000000
7/6/2012	7:58:53 AM	SiCl4 MFC set to  0.000000
7/6/2012	7:58:53 AM	Bypass solenoid MFC set to  0.000000
7/6/2012	7:58:53 AM	Tube furnace set to 0
7/6/2012	7:58:54 AM	Run finished at 7:58 AM
7/6/2012	7:58:54 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
7/6/2012	8:00:27 AM	Main Vac valve closed
7/6/2012	8:00:40 AM	Main Vac valve opened
7/6/2012	8:01:52 AM	Main Vac valve closed
7/6/2012	8:02:05 AM	Main Vac valve opened
7/6/2012	8:03:05 AM	Recipe started at 8:03 AM
7/6/2012	8:03:05 AM	Helium valve closed
7/6/2012	8:03:05 AM	H2 valve closed
7/6/2012	8:03:05 AM	BCl3 valve closed
7/6/2012	8:03:05 AM	PH3 valve closed
7/6/2012	8:03:05 AM	SiCl4 pre valve closed
7/6/2012	8:03:05 AM	SiCl4 post valve closed
7/6/2012	8:03:05 AM	Main Vac valve closed
7/6/2012	8:03:05 AM	Bypass valve closed
7/6/2012	8:03:05 AM	Bubbler valve closed
7/6/2012	8:03:05 AM	Helium MFC set to  0.000000
7/6/2012	8:03:05 AM	H2 MFC set to  0.000000
7/6/2012	8:03:05 AM	BCl3 MFC set to  0.000000
7/6/2012	8:03:05 AM	PH3 MFC set to  0.000000
7/6/2012	8:03:05 AM	SiCl4 MFC set to  0.000000
7/6/2012	8:03:05 AM	Bypass solenoid MFC set to  0.000000
7/6/2012	8:03:05 AM	Tube furnace set to 0
7/6/2012	8:03:08 AM	Helium valve closed
7/6/2012	8:03:08 AM	BCl3 valve closed
7/6/2012	8:03:08 AM	PH3 valve closed
7/6/2012	8:03:08 AM	SiCl4 pre valve closed
7/6/2012	8:03:08 AM	SiCl4 post valve closed
7/6/2012	8:03:08 AM	Main Vac valve closed
7/6/2012	8:03:08 AM	Bypass valve closed
7/6/2012	8:03:08 AM	Bubbler valve closed
7/6/2012	8:03:08 AM	H2 valve opened
7/6/2012	8:03:08 AM	Helium MFC set to  0.000000
7/6/2012	8:03:08 AM	H2 MFC set to  500.000000
7/6/2012	8:03:08 AM	BCl3 MFC set to  0.000000
7/6/2012	8:03:08 AM	PH3 MFC set to  0.000000
7/6/2012	8:03:08 AM	SiCl4 MFC set to  0.000000
7/6/2012	8:03:08 AM	Bypass solenoid MFC set to  0.000000
7/6/2012	8:03:08 AM	Tube furnace set to 0
7/6/2012	8:04:23 AM	Helium valve closed
7/6/2012	8:04:23 AM	BCl3 valve closed
7/6/2012	8:04:23 AM	PH3 valve closed
7/6/2012	8:04:23 AM	SiCl4 pre valve closed
7/6/2012	8:04:23 AM	SiCl4 post valve closed
7/6/2012	8:04:23 AM	Main Vac valve closed
7/6/2012	8:04:23 AM	Bypass valve closed
7/6/2012	8:04:23 AM	H2 valve opened
7/6/2012	8:04:23 AM	Bubbler valve opened
7/6/2012	8:04:23 AM	Helium MFC set to  0.000000
7/6/2012	8:04:23 AM	H2 MFC set to  500.000000
7/6/2012	8:04:23 AM	BCl3 MFC set to  0.000000
7/6/2012	8:04:23 AM	PH3 MFC set to  0.000000
7/6/2012	8:04:23 AM	SiCl4 MFC set to  0.000000
7/6/2012	8:04:23 AM	Bypass solenoid MFC set to  0.000000
7/6/2012	8:04:23 AM	Tube furnace set to 0
7/6/2012	8:04:24 AM	Helium valve closed
7/6/2012	8:04:24 AM	BCl3 valve closed
7/6/2012	8:04:24 AM	PH3 valve closed
7/6/2012	8:04:24 AM	SiCl4 pre valve closed
7/6/2012	8:04:24 AM	SiCl4 post valve closed
7/6/2012	8:04:24 AM	Main Vac valve closed
7/6/2012	8:04:24 AM	Bypass valve closed
7/6/2012	8:04:24 AM	H2 valve opened
7/6/2012	8:04:24 AM	Bubbler valve opened
7/6/2012	8:04:24 AM	Helium MFC set to  0.000000
7/6/2012	8:04:24 AM	H2 MFC set to  500.000000
7/6/2012	8:04:24 AM	BCl3 MFC set to  0.000000
7/6/2012	8:04:24 AM	PH3 MFC set to  0.000000
7/6/2012	8:04:24 AM	SiCl4 MFC set to  0.000000
7/6/2012	8:04:24 AM	Bypass solenoid MFC set to  0.000000
7/6/2012	8:04:25 AM	Tube furnace set to 1000
7/6/2012	8:34:25 AM	Helium valve closed
7/6/2012	8:34:25 AM	PH3 valve closed
7/6/2012	8:34:25 AM	Main Vac valve closed
7/6/2012	8:34:25 AM	Bypass valve closed
7/6/2012	8:34:25 AM	H2 valve opened
7/6/2012	8:34:25 AM	BCl3 valve opened
7/6/2012	8:34:25 AM	SiCl4 pre valve opened
7/6/2012	8:34:25 AM	SiCl4 post valve opened
7/6/2012	8:34:25 AM	Bubbler valve opened
7/6/2012	8:34:25 AM	Helium MFC set to  0.000000
7/6/2012	8:34:25 AM	H2 MFC set to  500.000000
7/6/2012	8:34:25 AM	BCl3 MFC set to  1.000000
7/6/2012	8:34:25 AM	PH3 MFC set to  0.000000
7/6/2012	8:34:25 AM	SiCl4 MFC set to  50.000000
7/6/2012	8:34:25 AM	Bypass solenoid MFC set to  0.000000
7/6/2012	8:34:25 AM	Tube furnace set to 1000
7/6/2012	8:41:25 AM	Helium valve closed
7/6/2012	8:41:25 AM	BCl3 valve closed
7/6/2012	8:41:25 AM	PH3 valve closed
7/6/2012	8:41:25 AM	SiCl4 pre valve closed
7/6/2012	8:41:25 AM	SiCl4 post valve closed
7/6/2012	8:41:25 AM	Main Vac valve closed
7/6/2012	8:41:25 AM	Bypass valve closed
7/6/2012	8:41:25 AM	H2 valve opened
7/6/2012	8:41:25 AM	Bubbler valve opened
7/6/2012	8:41:25 AM	Helium MFC set to  0.000000
7/6/2012	8:41:25 AM	H2 MFC set to  500.000000
7/6/2012	8:41:25 AM	BCl3 MFC set to  0.000000
7/6/2012	8:41:25 AM	PH3 MFC set to  0.000000
7/6/2012	8:41:25 AM	SiCl4 MFC set to  0.000000
7/6/2012	8:41:25 AM	Bypass solenoid MFC set to  0.000000
7/6/2012	8:41:25 AM	Tube furnace set to 750
7/6/2012	8:46:25 AM	H2 valve closed
7/6/2012	8:46:25 AM	BCl3 valve closed
7/6/2012	8:46:25 AM	PH3 valve closed
7/6/2012	8:46:25 AM	SiCl4 pre valve closed
7/6/2012	8:46:25 AM	SiCl4 post valve closed
7/6/2012	8:46:25 AM	Main Vac valve closed
7/6/2012	8:46:25 AM	Bypass valve closed
7/6/2012	8:46:25 AM	Helium valve opened
7/6/2012	8:46:25 AM	Bubbler valve opened
7/6/2012	8:46:25 AM	Helium MFC set to  500.000000
7/6/2012	8:46:25 AM	H2 MFC set to  0.000000
7/6/2012	8:46:25 AM	BCl3 MFC set to  0.000000
7/6/2012	8:46:25 AM	PH3 MFC set to  0.000000
7/6/2012	8:46:25 AM	SiCl4 MFC set to  0.000000
7/6/2012	8:46:25 AM	Bypass solenoid MFC set to  0.000000
7/6/2012	8:46:25 AM	Tube furnace set to 0
7/6/2012	9:06:25 AM	Helium valve closed
7/6/2012	9:06:25 AM	H2 valve closed
7/6/2012	9:06:25 AM	BCl3 valve closed
7/6/2012	9:06:25 AM	PH3 valve closed
7/6/2012	9:06:25 AM	SiCl4 pre valve closed
7/6/2012	9:06:25 AM	SiCl4 post valve closed
7/6/2012	9:06:25 AM	Main Vac valve closed
7/6/2012	9:06:25 AM	Bypass valve closed
7/6/2012	9:06:25 AM	Bubbler valve closed
7/6/2012	9:06:25 AM	Helium MFC set to  0.000000
7/6/2012	9:06:25 AM	H2 MFC set to  0.000000
7/6/2012	9:06:25 AM	BCl3 MFC set to  0.000000
7/6/2012	9:06:25 AM	PH3 MFC set to  0.000000
7/6/2012	9:06:25 AM	SiCl4 MFC set to  0.000000
7/6/2012	9:06:25 AM	Bypass solenoid MFC set to  0.000000
7/6/2012	9:06:25 AM	Tube furnace set to 0
7/6/2012	9:06:26 AM	Run finished at 9:06 AM
7/6/2012	9:08:15 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/6/2012	9:08:16 AM	Recipe started at 9:08 AM
7/6/2012	9:08:16 AM	Helium valve closed
7/6/2012	9:08:16 AM	H2 valve closed
7/6/2012	9:08:16 AM	BCl3 valve closed
7/6/2012	9:08:16 AM	PH3 valve closed
7/6/2012	9:08:16 AM	SiCl4 pre valve closed
7/6/2012	9:08:16 AM	SiCl4 post valve closed
7/6/2012	9:08:16 AM	Main Vac valve closed
7/6/2012	9:08:16 AM	Bubbler valve closed
7/6/2012	9:08:16 AM	Bypass valve opened
7/6/2012	9:08:16 AM	Helium MFC set to  0.000000
7/6/2012	9:08:16 AM	H2 MFC set to  0.000000
7/6/2012	9:08:16 AM	BCl3 MFC set to  0.000000
7/6/2012	9:08:16 AM	PH3 MFC set to  0.000000
7/6/2012	9:08:16 AM	SiCl4 MFC set to  0.000000
7/6/2012	9:08:16 AM	Bypass solenoid MFC set to  0.000000
7/6/2012	9:08:16 AM	Tube furnace set to 0
7/6/2012	9:08:28 AM	Run aborted at 9:08 AM
7/6/2012	9:08:28 AM	Helium valve closed
7/6/2012	9:08:28 AM	H2 valve closed
7/6/2012	9:08:28 AM	BCl3 valve closed
7/6/2012	9:08:28 AM	PH3 valve closed
7/6/2012	9:08:29 AM	SiCl4 pre valve closed
7/6/2012	9:08:29 AM	SiCl4 post valve closed
7/6/2012	9:08:29 AM	Bypass valve closed
7/6/2012	9:08:29 AM	Main Vac valve closed
7/6/2012	9:08:29 AM	Bubbler valve closed
7/6/2012	9:08:29 AM	Helium MFC set to  0.000000
7/6/2012	9:08:29 AM	H2 MFC set to  0.000000
7/6/2012	9:08:29 AM	BCl3 MFC set to  0.000000
7/6/2012	9:08:29 AM	PH3 MFC set to  0.000000
7/6/2012	9:08:29 AM	SiCl4 MFC set to  0.000000
7/6/2012	9:08:29 AM	Tube furnace set to 0
7/6/2012	9:08:29 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/6/2012	9:08:35 AM	Recipe started at 9:08 AM
7/6/2012	9:08:35 AM	Helium valve closed
7/6/2012	9:08:35 AM	H2 valve closed
7/6/2012	9:08:36 AM	BCl3 valve closed
7/6/2012	9:08:36 AM	PH3 valve closed
7/6/2012	9:08:36 AM	SiCl4 pre valve closed
7/6/2012	9:08:36 AM	SiCl4 post valve closed
7/6/2012	9:08:36 AM	Main Vac valve closed
7/6/2012	9:08:36 AM	Bypass valve closed
7/6/2012	9:08:36 AM	Bubbler valve closed
7/6/2012	9:08:36 AM	Helium MFC set to  0.000000
7/6/2012	9:08:36 AM	H2 MFC set to  0.000000
7/6/2012	9:08:36 AM	BCl3 MFC set to  0.000000
7/6/2012	9:08:36 AM	PH3 MFC set to  0.000000
7/6/2012	9:08:36 AM	SiCl4 MFC set to  0.000000
7/6/2012	9:08:36 AM	Bypass solenoid MFC set to  0.000000
7/6/2012	9:08:36 AM	Tube furnace set to 0
7/6/2012	9:08:39 AM	Helium valve closed
7/6/2012	9:08:39 AM	BCl3 valve closed
7/6/2012	9:08:39 AM	PH3 valve closed
7/6/2012	9:08:39 AM	SiCl4 pre valve closed
7/6/2012	9:08:39 AM	SiCl4 post valve closed
7/6/2012	9:08:39 AM	Main Vac valve closed
7/6/2012	9:08:39 AM	Bypass valve closed
7/6/2012	9:08:39 AM	Bubbler valve closed
7/6/2012	9:08:39 AM	H2 valve opened
7/6/2012	9:08:39 AM	Helium MFC set to  0.000000
7/6/2012	9:08:39 AM	H2 MFC set to  500.000000
7/6/2012	9:08:39 AM	BCl3 MFC set to  0.000000
7/6/2012	9:08:39 AM	PH3 MFC set to  0.000000
7/6/2012	9:08:39 AM	SiCl4 MFC set to  0.000000
7/6/2012	9:08:39 AM	Bypass solenoid MFC set to  0.000000
7/6/2012	9:08:39 AM	Tube furnace set to 0
7/6/2012	9:09:45 AM	Helium valve closed
7/6/2012	9:09:45 AM	BCl3 valve closed
7/6/2012	9:09:45 AM	PH3 valve closed
7/6/2012	9:09:45 AM	SiCl4 pre valve closed
7/6/2012	9:09:45 AM	SiCl4 post valve closed
7/6/2012	9:09:45 AM	Main Vac valve closed
7/6/2012	9:09:45 AM	Bypass valve closed
7/6/2012	9:09:45 AM	H2 valve opened
7/6/2012	9:09:45 AM	Bubbler valve opened
7/6/2012	9:09:45 AM	Helium MFC set to  0.000000
7/6/2012	9:09:45 AM	H2 MFC set to  500.000000
7/6/2012	9:09:45 AM	BCl3 MFC set to  0.000000
7/6/2012	9:09:45 AM	PH3 MFC set to  0.000000
7/6/2012	9:09:45 AM	SiCl4 MFC set to  0.000000
7/6/2012	9:09:45 AM	Bypass solenoid MFC set to  0.000000
7/6/2012	9:09:45 AM	Tube furnace set to 0
7/6/2012	9:09:46 AM	Helium valve closed
7/6/2012	9:09:46 AM	BCl3 valve closed
7/6/2012	9:09:46 AM	PH3 valve closed
7/6/2012	9:09:46 AM	SiCl4 pre valve closed
7/6/2012	9:09:46 AM	SiCl4 post valve closed
7/6/2012	9:09:46 AM	Main Vac valve closed
7/6/2012	9:09:46 AM	Bypass valve closed
7/6/2012	9:09:46 AM	H2 valve opened
7/6/2012	9:09:46 AM	Bubbler valve opened
7/6/2012	9:09:46 AM	Helium MFC set to  0.000000
7/6/2012	9:09:46 AM	H2 MFC set to  500.000000
7/6/2012	9:09:46 AM	BCl3 MFC set to  0.000000
7/6/2012	9:09:47 AM	PH3 MFC set to  0.000000
7/6/2012	9:09:47 AM	SiCl4 MFC set to  0.000000
7/6/2012	9:09:47 AM	Bypass solenoid MFC set to  0.000000
7/6/2012	9:09:47 AM	Tube furnace set to 1000
7/6/2012	9:39:47 AM	Helium valve closed
7/6/2012	9:39:47 AM	PH3 valve closed
7/6/2012	9:39:47 AM	Main Vac valve closed
7/6/2012	9:39:47 AM	Bypass valve closed
7/6/2012	9:39:47 AM	H2 valve opened
7/6/2012	9:39:47 AM	BCl3 valve opened
7/6/2012	9:39:47 AM	SiCl4 pre valve opened
7/6/2012	9:39:47 AM	SiCl4 post valve opened
7/6/2012	9:39:47 AM	Bubbler valve opened
7/6/2012	9:39:47 AM	Helium MFC set to  0.000000
7/6/2012	9:39:47 AM	H2 MFC set to  500.000000
7/6/2012	9:39:47 AM	BCl3 MFC set to  1.000000
7/6/2012	9:39:47 AM	PH3 MFC set to  0.000000
7/6/2012	9:39:47 AM	SiCl4 MFC set to  50.000000
7/6/2012	9:39:47 AM	Bypass solenoid MFC set to  0.000000
7/6/2012	9:39:47 AM	Tube furnace set to 1000
7/6/2012	9:46:47 AM	Helium valve closed
7/6/2012	9:46:47 AM	BCl3 valve closed
7/6/2012	9:46:47 AM	PH3 valve closed
7/6/2012	9:46:47 AM	SiCl4 pre valve closed
7/6/2012	9:46:47 AM	SiCl4 post valve closed
7/6/2012	9:46:47 AM	Main Vac valve closed
7/6/2012	9:46:47 AM	Bypass valve closed
7/6/2012	9:46:47 AM	H2 valve opened
7/6/2012	9:46:47 AM	Bubbler valve opened
7/6/2012	9:46:47 AM	Helium MFC set to  0.000000
7/6/2012	9:46:47 AM	H2 MFC set to  500.000000
7/6/2012	9:46:47 AM	BCl3 MFC set to  0.000000
7/6/2012	9:46:47 AM	PH3 MFC set to  0.000000
7/6/2012	9:46:47 AM	SiCl4 MFC set to  0.000000
7/6/2012	9:46:47 AM	Bypass solenoid MFC set to  0.000000
7/6/2012	9:46:47 AM	Tube furnace set to 750
7/6/2012	9:51:47 AM	H2 valve closed
7/6/2012	9:51:47 AM	BCl3 valve closed
7/6/2012	9:51:47 AM	PH3 valve closed
7/6/2012	9:51:47 AM	SiCl4 pre valve closed
7/6/2012	9:51:47 AM	SiCl4 post valve closed
7/6/2012	9:51:47 AM	Main Vac valve closed
7/6/2012	9:51:47 AM	Bypass valve closed
7/6/2012	9:51:47 AM	Helium valve opened
7/6/2012	9:51:47 AM	Bubbler valve opened
7/6/2012	9:51:47 AM	Helium MFC set to  500.000000
7/6/2012	9:51:47 AM	H2 MFC set to  0.000000
7/6/2012	9:51:47 AM	BCl3 MFC set to  0.000000
7/6/2012	9:51:47 AM	PH3 MFC set to  0.000000
7/6/2012	9:51:47 AM	SiCl4 MFC set to  0.000000
7/6/2012	9:51:47 AM	Bypass solenoid MFC set to  0.000000
7/6/2012	9:51:47 AM	Tube furnace set to 0
7/6/2012	9:58:47 AM	Helium valve closed
7/6/2012	9:58:47 AM	H2 valve closed
7/6/2012	9:58:47 AM	BCl3 valve closed
7/6/2012	9:58:47 AM	PH3 valve closed
7/6/2012	9:58:47 AM	SiCl4 pre valve closed
7/6/2012	9:58:47 AM	SiCl4 post valve closed
7/6/2012	9:58:47 AM	Main Vac valve closed
7/6/2012	9:58:47 AM	Bypass valve closed
7/6/2012	9:58:47 AM	Bubbler valve closed
7/6/2012	9:58:47 AM	Helium MFC set to  0.000000
7/6/2012	9:58:47 AM	H2 MFC set to  0.000000
7/6/2012	9:58:47 AM	BCl3 MFC set to  0.000000
7/6/2012	9:58:47 AM	PH3 MFC set to  0.000000
7/6/2012	9:58:47 AM	SiCl4 MFC set to  0.000000
7/6/2012	9:58:47 AM	Bypass solenoid MFC set to  0.000000
7/6/2012	9:58:47 AM	Tube furnace set to 0
7/6/2012	9:58:48 AM	Run finished at 9:58 AM
7/6/2012	10:01:48 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/6/2012	10:01:49 AM	Recipe started at 10:01 AM
7/6/2012	10:01:49 AM	Helium valve closed
7/6/2012	10:01:49 AM	H2 valve closed
7/6/2012	10:01:49 AM	BCl3 valve closed
7/6/2012	10:01:49 AM	PH3 valve closed
7/6/2012	10:01:49 AM	SiCl4 pre valve closed
7/6/2012	10:01:49 AM	SiCl4 post valve closed
7/6/2012	10:01:49 AM	Main Vac valve closed
7/6/2012	10:01:49 AM	Bubbler valve closed
7/6/2012	10:01:49 AM	Bypass valve opened
7/6/2012	10:01:49 AM	Helium MFC set to  0.000000
7/6/2012	10:01:49 AM	H2 MFC set to  0.000000
7/6/2012	10:01:49 AM	BCl3 MFC set to  0.000000
7/6/2012	10:01:49 AM	PH3 MFC set to  0.000000
7/6/2012	10:01:49 AM	SiCl4 MFC set to  0.000000
7/6/2012	10:01:49 AM	Bypass solenoid MFC set to  0.000000
7/6/2012	10:01:50 AM	Tube furnace set to 0
7/6/2012	10:02:53 AM	Helium valve closed
7/6/2012	10:02:53 AM	H2 valve closed
7/6/2012	10:02:53 AM	BCl3 valve closed
7/6/2012	10:02:53 AM	PH3 valve closed
7/6/2012	10:02:53 AM	SiCl4 pre valve closed
7/6/2012	10:02:53 AM	SiCl4 post valve closed
7/6/2012	10:02:53 AM	Main Vac valve closed
7/6/2012	10:02:53 AM	Bubbler valve closed
7/6/2012	10:02:53 AM	Bypass valve opened
7/6/2012	10:02:53 AM	Helium MFC set to  0.000000
7/6/2012	10:02:53 AM	H2 MFC set to  0.000000
7/6/2012	10:02:53 AM	BCl3 MFC set to  0.000000
7/6/2012	10:02:53 AM	PH3 MFC set to  0.000000
7/6/2012	10:02:53 AM	SiCl4 MFC set to  0.000000
7/6/2012	10:02:53 AM	Bypass solenoid MFC set to  0.000000
7/6/2012	10:02:53 AM	Tube furnace set to 0
7/6/2012	10:03:53 AM	Helium valve closed
7/6/2012	10:03:53 AM	H2 valve closed
7/6/2012	10:03:53 AM	BCl3 valve closed
7/6/2012	10:03:53 AM	PH3 valve closed
7/6/2012	10:03:53 AM	SiCl4 pre valve closed
7/6/2012	10:03:53 AM	SiCl4 post valve closed
7/6/2012	10:03:53 AM	Bypass valve closed
7/6/2012	10:03:53 AM	Bubbler valve closed
7/6/2012	10:03:53 AM	Main Vac valve opened
7/6/2012	10:03:53 AM	Helium MFC set to  0.000000
7/6/2012	10:03:53 AM	H2 MFC set to  0.000000
7/6/2012	10:03:53 AM	BCl3 MFC set to  0.000000
7/6/2012	10:03:53 AM	PH3 MFC set to  0.000000
7/6/2012	10:03:53 AM	SiCl4 MFC set to  0.000000
7/6/2012	10:03:53 AM	Bypass solenoid MFC set to  0.000000
7/6/2012	10:03:53 AM	Tube furnace set to 0
7/6/2012	10:03:54 AM	Run finished at 10:03 AM
7/6/2012	10:03:54 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/6/2012	10:33:11 AM	Main Vac valve closed
7/6/2012	10:33:25 AM	Main Vac valve opened
7/6/2012	10:33:52 AM	Recipe started at 10:33 AM
7/6/2012	10:33:52 AM	Helium valve closed
7/6/2012	10:33:52 AM	H2 valve closed
7/6/2012	10:33:52 AM	BCl3 valve closed
7/6/2012	10:33:52 AM	PH3 valve closed
7/6/2012	10:33:52 AM	SiCl4 pre valve closed
7/6/2012	10:33:52 AM	SiCl4 post valve closed
7/6/2012	10:33:52 AM	Main Vac valve closed
7/6/2012	10:33:52 AM	Bypass valve closed
7/6/2012	10:33:52 AM	Bubbler valve closed
7/6/2012	10:33:52 AM	Helium MFC set to  0.000000
7/6/2012	10:33:52 AM	H2 MFC set to  0.000000
7/6/2012	10:33:52 AM	BCl3 MFC set to  0.000000
7/6/2012	10:33:52 AM	PH3 MFC set to  0.000000
7/6/2012	10:33:52 AM	SiCl4 MFC set to  0.000000
7/6/2012	10:33:52 AM	Bypass solenoid MFC set to  0.000000
7/6/2012	10:33:52 AM	Tube furnace set to 0
7/6/2012	10:33:55 AM	Helium valve closed
7/6/2012	10:33:55 AM	BCl3 valve closed
7/6/2012	10:33:55 AM	PH3 valve closed
7/6/2012	10:33:55 AM	SiCl4 pre valve closed
7/6/2012	10:33:55 AM	SiCl4 post valve closed
7/6/2012	10:33:55 AM	Main Vac valve closed
7/6/2012	10:33:55 AM	Bypass valve closed
7/6/2012	10:33:55 AM	Bubbler valve closed
7/6/2012	10:33:55 AM	H2 valve opened
7/6/2012	10:33:55 AM	Helium MFC set to  0.000000
7/6/2012	10:33:55 AM	H2 MFC set to  500.000000
7/6/2012	10:33:55 AM	BCl3 MFC set to  0.000000
7/6/2012	10:33:55 AM	PH3 MFC set to  0.000000
7/6/2012	10:33:55 AM	SiCl4 MFC set to  0.000000
7/6/2012	10:33:55 AM	Bypass solenoid MFC set to  0.000000
7/6/2012	10:33:55 AM	Tube furnace set to 0
7/6/2012	10:35:10 AM	Helium valve closed
7/6/2012	10:35:10 AM	BCl3 valve closed
7/6/2012	10:35:10 AM	PH3 valve closed
7/6/2012	10:35:10 AM	SiCl4 pre valve closed
7/6/2012	10:35:10 AM	SiCl4 post valve closed
7/6/2012	10:35:10 AM	Main Vac valve closed
7/6/2012	10:35:10 AM	Bypass valve closed
7/6/2012	10:35:10 AM	H2 valve opened
7/6/2012	10:35:10 AM	Bubbler valve opened
7/6/2012	10:35:10 AM	Helium MFC set to  0.000000
7/6/2012	10:35:10 AM	H2 MFC set to  500.000000
7/6/2012	10:35:11 AM	BCl3 MFC set to  0.000000
7/6/2012	10:35:11 AM	PH3 MFC set to  0.000000
7/6/2012	10:35:11 AM	SiCl4 MFC set to  0.000000
7/6/2012	10:35:11 AM	Bypass solenoid MFC set to  0.000000
7/6/2012	10:35:11 AM	Tube furnace set to 0
7/6/2012	10:35:12 AM	Helium valve closed
7/6/2012	10:35:12 AM	BCl3 valve closed
7/6/2012	10:35:12 AM	PH3 valve closed
7/6/2012	10:35:12 AM	SiCl4 pre valve closed
7/6/2012	10:35:12 AM	SiCl4 post valve closed
7/6/2012	10:35:12 AM	Main Vac valve closed
7/6/2012	10:35:12 AM	Bypass valve closed
7/6/2012	10:35:12 AM	H2 valve opened
7/6/2012	10:35:12 AM	Bubbler valve opened
7/6/2012	10:35:12 AM	Helium MFC set to  0.000000
7/6/2012	10:35:12 AM	H2 MFC set to  500.000000
7/6/2012	10:35:12 AM	BCl3 MFC set to  0.000000
7/6/2012	10:35:12 AM	PH3 MFC set to  0.000000
7/6/2012	10:35:12 AM	SiCl4 MFC set to  0.000000
7/6/2012	10:35:12 AM	Bypass solenoid MFC set to  0.000000
7/6/2012	10:35:12 AM	Tube furnace set to 1000
7/6/2012	11:05:12 AM	Helium valve closed
7/6/2012	11:05:12 AM	PH3 valve closed
7/6/2012	11:05:12 AM	Main Vac valve closed
7/6/2012	11:05:12 AM	Bypass valve closed
7/6/2012	11:05:12 AM	H2 valve opened
7/6/2012	11:05:12 AM	BCl3 valve opened
7/6/2012	11:05:12 AM	SiCl4 pre valve opened
7/6/2012	11:05:12 AM	SiCl4 post valve opened
7/6/2012	11:05:12 AM	Bubbler valve opened
7/6/2012	11:05:12 AM	Helium MFC set to  0.000000
7/6/2012	11:05:12 AM	H2 MFC set to  500.000000
7/6/2012	11:05:12 AM	BCl3 MFC set to  1.000000
7/6/2012	11:05:12 AM	PH3 MFC set to  0.000000
7/6/2012	11:05:12 AM	SiCl4 MFC set to  50.000000
7/6/2012	11:05:12 AM	Bypass solenoid MFC set to  0.000000
7/6/2012	11:05:12 AM	Tube furnace set to 1000
7/6/2012	11:12:12 AM	Helium valve closed
7/6/2012	11:12:12 AM	BCl3 valve closed
7/6/2012	11:12:12 AM	PH3 valve closed
7/6/2012	11:12:12 AM	SiCl4 pre valve closed
7/6/2012	11:12:12 AM	SiCl4 post valve closed
7/6/2012	11:12:12 AM	Main Vac valve closed
7/6/2012	11:12:12 AM	Bypass valve closed
7/6/2012	11:12:12 AM	H2 valve opened
7/6/2012	11:12:12 AM	Bubbler valve opened
7/6/2012	11:12:12 AM	Helium MFC set to  0.000000
7/6/2012	11:12:12 AM	H2 MFC set to  500.000000
7/6/2012	11:12:12 AM	BCl3 MFC set to  0.000000
7/6/2012	11:12:12 AM	PH3 MFC set to  0.000000
7/6/2012	11:12:12 AM	SiCl4 MFC set to  0.000000
7/6/2012	11:12:12 AM	Bypass solenoid MFC set to  0.000000
7/6/2012	11:12:12 AM	Tube furnace set to 750
7/6/2012	11:17:12 AM	H2 valve closed
7/6/2012	11:17:12 AM	BCl3 valve closed
7/6/2012	11:17:12 AM	PH3 valve closed
7/6/2012	11:17:12 AM	SiCl4 pre valve closed
7/6/2012	11:17:12 AM	SiCl4 post valve closed
7/6/2012	11:17:12 AM	Main Vac valve closed
7/6/2012	11:17:12 AM	Bypass valve closed
7/6/2012	11:17:12 AM	Helium valve opened
7/6/2012	11:17:12 AM	Bubbler valve opened
7/6/2012	11:17:12 AM	Helium MFC set to  500.000000
7/6/2012	11:17:12 AM	H2 MFC set to  0.000000
7/6/2012	11:17:12 AM	BCl3 MFC set to  0.000000
7/6/2012	11:17:12 AM	PH3 MFC set to  0.000000
7/6/2012	11:17:12 AM	SiCl4 MFC set to  0.000000
7/6/2012	11:17:12 AM	Bypass solenoid MFC set to  0.000000
7/6/2012	11:17:13 AM	Tube furnace set to 0
7/6/2012	11:27:19 AM	Helium valve closed
7/6/2012	11:27:19 AM	H2 valve closed
7/6/2012	11:27:19 AM	BCl3 valve closed
7/6/2012	11:27:19 AM	PH3 valve closed
7/6/2012	11:27:19 AM	SiCl4 pre valve closed
7/6/2012	11:27:19 AM	SiCl4 post valve closed
7/6/2012	11:27:19 AM	Main Vac valve closed
7/6/2012	11:27:19 AM	Bypass valve closed
7/6/2012	11:27:19 AM	Bubbler valve closed
7/6/2012	11:27:19 AM	Helium MFC set to  0.000000
7/6/2012	11:27:19 AM	H2 MFC set to  0.000000
7/6/2012	11:27:19 AM	BCl3 MFC set to  0.000000
7/6/2012	11:27:19 AM	PH3 MFC set to  0.000000
7/6/2012	11:27:19 AM	SiCl4 MFC set to  0.000000
7/6/2012	11:27:19 AM	Bypass solenoid MFC set to  0.000000
7/6/2012	11:27:19 AM	Tube furnace set to 0
7/6/2012	11:27:20 AM	Run finished at 11:27 AM
7/6/2012	11:29:15 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/6/2012	11:29:16 AM	Recipe started at 11:29 AM
7/6/2012	11:29:16 AM	Helium valve closed
7/6/2012	11:29:16 AM	H2 valve closed
7/6/2012	11:29:16 AM	BCl3 valve closed
7/6/2012	11:29:16 AM	PH3 valve closed
7/6/2012	11:29:16 AM	SiCl4 pre valve closed
7/6/2012	11:29:16 AM	SiCl4 post valve closed
7/6/2012	11:29:16 AM	Main Vac valve closed
7/6/2012	11:29:16 AM	Bubbler valve closed
7/6/2012	11:29:16 AM	Bypass valve opened
7/6/2012	11:29:16 AM	Helium MFC set to  0.000000
7/6/2012	11:29:16 AM	H2 MFC set to  0.000000
7/6/2012	11:29:16 AM	BCl3 MFC set to  0.000000
7/6/2012	11:29:16 AM	PH3 MFC set to  0.000000
7/6/2012	11:29:16 AM	SiCl4 MFC set to  0.000000
7/6/2012	11:29:16 AM	Bypass solenoid MFC set to  0.000000
7/6/2012	11:29:17 AM	Tube furnace set to 0
7/6/2012	11:30:20 AM	Helium valve closed
7/6/2012	11:30:20 AM	H2 valve closed
7/6/2012	11:30:20 AM	BCl3 valve closed
7/6/2012	11:30:20 AM	PH3 valve closed
7/6/2012	11:30:20 AM	SiCl4 pre valve closed
7/6/2012	11:30:20 AM	SiCl4 post valve closed
7/6/2012	11:30:20 AM	Main Vac valve closed
7/6/2012	11:30:20 AM	Bubbler valve closed
7/6/2012	11:30:20 AM	Bypass valve opened
7/6/2012	11:30:20 AM	Helium MFC set to  0.000000
7/6/2012	11:30:20 AM	H2 MFC set to  0.000000
7/6/2012	11:30:20 AM	BCl3 MFC set to  0.000000
7/6/2012	11:30:20 AM	PH3 MFC set to  0.000000
7/6/2012	11:30:20 AM	SiCl4 MFC set to  0.000000
7/6/2012	11:30:20 AM	Bypass solenoid MFC set to  0.000000
7/6/2012	11:30:20 AM	Tube furnace set to 0
7/6/2012	11:31:20 AM	Helium valve closed
7/6/2012	11:31:20 AM	H2 valve closed
7/6/2012	11:31:20 AM	BCl3 valve closed
7/6/2012	11:31:20 AM	PH3 valve closed
7/6/2012	11:31:20 AM	SiCl4 pre valve closed
7/6/2012	11:31:20 AM	SiCl4 post valve closed
7/6/2012	11:31:20 AM	Bypass valve closed
7/6/2012	11:31:20 AM	Bubbler valve closed
7/6/2012	11:31:20 AM	Main Vac valve opened
7/6/2012	11:31:20 AM	Helium MFC set to  0.000000
7/6/2012	11:31:20 AM	H2 MFC set to  0.000000
7/6/2012	11:31:20 AM	BCl3 MFC set to  0.000000
7/6/2012	11:31:20 AM	PH3 MFC set to  0.000000
7/6/2012	11:31:20 AM	SiCl4 MFC set to  0.000000
7/6/2012	11:31:20 AM	Bypass solenoid MFC set to  0.000000
7/6/2012	11:31:20 AM	Tube furnace set to 0
7/6/2012	11:31:21 AM	Run finished at 11:31 AM
7/6/2012	11:31:21 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/6/2012	12:57:51 PM	Main Vac valve closed
7/6/2012	12:58:03 PM	Main Vac valve opened
7/6/2012	12:58:21 PM	Recipe started at 12:58 PM
7/6/2012	12:58:21 PM	Helium valve closed
7/6/2012	12:58:21 PM	H2 valve closed
7/6/2012	12:58:21 PM	BCl3 valve closed
7/6/2012	12:58:21 PM	PH3 valve closed
7/6/2012	12:58:22 PM	SiCl4 pre valve closed
7/6/2012	12:58:22 PM	SiCl4 post valve closed
7/6/2012	12:58:22 PM	Main Vac valve closed
7/6/2012	12:58:22 PM	Bypass valve closed
7/6/2012	12:58:22 PM	Bubbler valve closed
7/6/2012	12:58:22 PM	Helium MFC set to  0.000000
7/6/2012	12:58:22 PM	H2 MFC set to  0.000000
7/6/2012	12:58:22 PM	BCl3 MFC set to  0.000000
7/6/2012	12:58:22 PM	PH3 MFC set to  0.000000
7/6/2012	12:58:22 PM	SiCl4 MFC set to  0.000000
7/6/2012	12:58:22 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	12:58:22 PM	Tube furnace set to 0
7/6/2012	12:58:25 PM	Helium valve closed
7/6/2012	12:58:25 PM	BCl3 valve closed
7/6/2012	12:58:25 PM	PH3 valve closed
7/6/2012	12:58:25 PM	SiCl4 pre valve closed
7/6/2012	12:58:25 PM	SiCl4 post valve closed
7/6/2012	12:58:25 PM	Main Vac valve closed
7/6/2012	12:58:25 PM	Bypass valve closed
7/6/2012	12:58:25 PM	Bubbler valve closed
7/6/2012	12:58:25 PM	H2 valve opened
7/6/2012	12:58:25 PM	Helium MFC set to  0.000000
7/6/2012	12:58:25 PM	H2 MFC set to  500.000000
7/6/2012	12:58:25 PM	BCl3 MFC set to  0.000000
7/6/2012	12:58:25 PM	PH3 MFC set to  0.000000
7/6/2012	12:58:25 PM	SiCl4 MFC set to  0.000000
7/6/2012	12:58:25 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	12:58:25 PM	Tube furnace set to 0
7/6/2012	12:59:41 PM	Helium valve closed
7/6/2012	12:59:41 PM	BCl3 valve closed
7/6/2012	12:59:41 PM	PH3 valve closed
7/6/2012	12:59:41 PM	SiCl4 pre valve closed
7/6/2012	12:59:41 PM	SiCl4 post valve closed
7/6/2012	12:59:41 PM	Main Vac valve closed
7/6/2012	12:59:41 PM	Bypass valve closed
7/6/2012	12:59:41 PM	H2 valve opened
7/6/2012	12:59:41 PM	Bubbler valve opened
7/6/2012	12:59:41 PM	Helium MFC set to  0.000000
7/6/2012	12:59:41 PM	H2 MFC set to  500.000000
7/6/2012	12:59:41 PM	BCl3 MFC set to  0.000000
7/6/2012	12:59:41 PM	PH3 MFC set to  0.000000
7/6/2012	12:59:41 PM	SiCl4 MFC set to  0.000000
7/6/2012	12:59:41 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	12:59:41 PM	Tube furnace set to 0
7/6/2012	12:59:42 PM	Helium valve closed
7/6/2012	12:59:42 PM	BCl3 valve closed
7/6/2012	12:59:42 PM	PH3 valve closed
7/6/2012	12:59:42 PM	SiCl4 pre valve closed
7/6/2012	12:59:42 PM	SiCl4 post valve closed
7/6/2012	12:59:42 PM	Main Vac valve closed
7/6/2012	12:59:42 PM	Bypass valve closed
7/6/2012	12:59:42 PM	H2 valve opened
7/6/2012	12:59:43 PM	Bubbler valve opened
7/6/2012	12:59:43 PM	Helium MFC set to  0.000000
7/6/2012	12:59:43 PM	H2 MFC set to  500.000000
7/6/2012	12:59:43 PM	BCl3 MFC set to  0.000000
7/6/2012	12:59:43 PM	PH3 MFC set to  0.000000
7/6/2012	12:59:43 PM	SiCl4 MFC set to  0.000000
7/6/2012	12:59:43 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	12:59:43 PM	Tube furnace set to 1000
7/6/2012	1:29:43 PM	Helium valve closed
7/6/2012	1:29:43 PM	PH3 valve closed
7/6/2012	1:29:43 PM	Main Vac valve closed
7/6/2012	1:29:43 PM	Bypass valve closed
7/6/2012	1:29:43 PM	H2 valve opened
7/6/2012	1:29:43 PM	BCl3 valve opened
7/6/2012	1:29:43 PM	SiCl4 pre valve opened
7/6/2012	1:29:43 PM	SiCl4 post valve opened
7/6/2012	1:29:43 PM	Bubbler valve opened
7/6/2012	1:29:43 PM	Helium MFC set to  0.000000
7/6/2012	1:29:43 PM	H2 MFC set to  500.000000
7/6/2012	1:29:43 PM	BCl3 MFC set to  1.000000
7/6/2012	1:29:43 PM	PH3 MFC set to  0.000000
7/6/2012	1:29:43 PM	SiCl4 MFC set to  50.000000
7/6/2012	1:29:43 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	1:29:43 PM	Tube furnace set to 1000
7/6/2012	1:36:43 PM	Helium valve closed
7/6/2012	1:36:43 PM	BCl3 valve closed
7/6/2012	1:36:43 PM	PH3 valve closed
7/6/2012	1:36:43 PM	SiCl4 pre valve closed
7/6/2012	1:36:43 PM	SiCl4 post valve closed
7/6/2012	1:36:43 PM	Main Vac valve closed
7/6/2012	1:36:43 PM	Bypass valve closed
7/6/2012	1:36:43 PM	H2 valve opened
7/6/2012	1:36:43 PM	Bubbler valve opened
7/6/2012	1:36:43 PM	Helium MFC set to  0.000000
7/6/2012	1:36:43 PM	H2 MFC set to  500.000000
7/6/2012	1:36:43 PM	BCl3 MFC set to  0.000000
7/6/2012	1:36:43 PM	PH3 MFC set to  0.000000
7/6/2012	1:36:43 PM	SiCl4 MFC set to  0.000000
7/6/2012	1:36:43 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	1:36:43 PM	Tube furnace set to 750
7/6/2012	1:41:43 PM	H2 valve closed
7/6/2012	1:41:43 PM	BCl3 valve closed
7/6/2012	1:41:43 PM	PH3 valve closed
7/6/2012	1:41:43 PM	SiCl4 pre valve closed
7/6/2012	1:41:43 PM	SiCl4 post valve closed
7/6/2012	1:41:43 PM	Main Vac valve closed
7/6/2012	1:41:43 PM	Bypass valve closed
7/6/2012	1:41:43 PM	Helium valve opened
7/6/2012	1:41:43 PM	Bubbler valve opened
7/6/2012	1:41:43 PM	Helium MFC set to  500.000000
7/6/2012	1:41:43 PM	H2 MFC set to  0.000000
7/6/2012	1:41:43 PM	BCl3 MFC set to  0.000000
7/6/2012	1:41:43 PM	PH3 MFC set to  0.000000
7/6/2012	1:41:43 PM	SiCl4 MFC set to  0.000000
7/6/2012	1:41:43 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	1:41:43 PM	Tube furnace set to 0
7/6/2012	1:52:25 PM	Helium valve closed
7/6/2012	1:52:25 PM	H2 valve closed
7/6/2012	1:52:25 PM	BCl3 valve closed
7/6/2012	1:52:25 PM	PH3 valve closed
7/6/2012	1:52:25 PM	SiCl4 pre valve closed
7/6/2012	1:52:25 PM	SiCl4 post valve closed
7/6/2012	1:52:25 PM	Main Vac valve closed
7/6/2012	1:52:25 PM	Bypass valve closed
7/6/2012	1:52:25 PM	Bubbler valve closed
7/6/2012	1:52:25 PM	Helium MFC set to  0.000000
7/6/2012	1:52:25 PM	H2 MFC set to  0.000000
7/6/2012	1:52:25 PM	BCl3 MFC set to  0.000000
7/6/2012	1:52:25 PM	PH3 MFC set to  0.000000
7/6/2012	1:52:25 PM	SiCl4 MFC set to  0.000000
7/6/2012	1:52:25 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	1:52:25 PM	Tube furnace set to 0
7/6/2012	1:52:26 PM	Run finished at 1:52 PM
7/6/2012	1:55:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/6/2012	1:55:29 PM	Recipe started at 1:55 PM
7/6/2012	1:55:29 PM	Helium valve closed
7/6/2012	1:55:29 PM	H2 valve closed
7/6/2012	1:55:29 PM	BCl3 valve closed
7/6/2012	1:55:29 PM	PH3 valve closed
7/6/2012	1:55:29 PM	SiCl4 pre valve closed
7/6/2012	1:55:30 PM	SiCl4 post valve closed
7/6/2012	1:55:30 PM	Main Vac valve closed
7/6/2012	1:55:30 PM	Bubbler valve closed
7/6/2012	1:55:30 PM	Bypass valve opened
7/6/2012	1:55:30 PM	Helium MFC set to  0.000000
7/6/2012	1:55:30 PM	H2 MFC set to  0.000000
7/6/2012	1:55:30 PM	BCl3 MFC set to  0.000000
7/6/2012	1:55:30 PM	PH3 MFC set to  0.000000
7/6/2012	1:55:30 PM	SiCl4 MFC set to  0.000000
7/6/2012	1:55:30 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	1:55:30 PM	Tube furnace set to 0
7/6/2012	1:56:34 PM	Helium valve closed
7/6/2012	1:56:34 PM	H2 valve closed
7/6/2012	1:56:34 PM	BCl3 valve closed
7/6/2012	1:56:34 PM	PH3 valve closed
7/6/2012	1:56:34 PM	SiCl4 pre valve closed
7/6/2012	1:56:34 PM	SiCl4 post valve closed
7/6/2012	1:56:34 PM	Main Vac valve closed
7/6/2012	1:56:34 PM	Bubbler valve closed
7/6/2012	1:56:34 PM	Bypass valve opened
7/6/2012	1:56:34 PM	Helium MFC set to  0.000000
7/6/2012	1:56:34 PM	H2 MFC set to  0.000000
7/6/2012	1:56:34 PM	BCl3 MFC set to  0.000000
7/6/2012	1:56:34 PM	PH3 MFC set to  0.000000
7/6/2012	1:56:34 PM	SiCl4 MFC set to  0.000000
7/6/2012	1:56:34 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	1:56:34 PM	Tube furnace set to 0
7/6/2012	1:57:34 PM	Helium valve closed
7/6/2012	1:57:34 PM	H2 valve closed
7/6/2012	1:57:34 PM	BCl3 valve closed
7/6/2012	1:57:34 PM	PH3 valve closed
7/6/2012	1:57:34 PM	SiCl4 pre valve closed
7/6/2012	1:57:34 PM	SiCl4 post valve closed
7/6/2012	1:57:34 PM	Bypass valve closed
7/6/2012	1:57:34 PM	Bubbler valve closed
7/6/2012	1:57:34 PM	Main Vac valve opened
7/6/2012	1:57:34 PM	Helium MFC set to  0.000000
7/6/2012	1:57:34 PM	H2 MFC set to  0.000000
7/6/2012	1:57:35 PM	BCl3 MFC set to  0.000000
7/6/2012	1:57:35 PM	PH3 MFC set to  0.000000
7/6/2012	1:57:35 PM	SiCl4 MFC set to  0.000000
7/6/2012	1:57:35 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	1:57:35 PM	Tube furnace set to 0
7/6/2012	1:57:36 PM	Run finished at 1:57 PM
7/6/2012	1:57:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/6/2012	2:06:02 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
7/6/2012	2:06:15 PM	Recipe started at 2:06 PM
7/6/2012	2:06:15 PM	Helium valve closed
7/6/2012	2:06:15 PM	H2 valve closed
7/6/2012	2:06:15 PM	BCl3 valve closed
7/6/2012	2:06:15 PM	PH3 valve closed
7/6/2012	2:06:15 PM	SiCl4 pre valve closed
7/6/2012	2:06:15 PM	SiCl4 post valve closed
7/6/2012	2:06:15 PM	Main Vac valve closed
7/6/2012	2:06:15 PM	Bubbler valve closed
7/6/2012	2:06:15 PM	Bypass valve opened
7/6/2012	2:06:15 PM	Helium MFC set to  0.000000
7/6/2012	2:06:15 PM	H2 MFC set to  0.000000
7/6/2012	2:06:15 PM	BCl3 MFC set to  0.000000
7/6/2012	2:06:15 PM	PH3 MFC set to  0.000000
7/6/2012	2:06:15 PM	SiCl4 MFC set to  0.000000
7/6/2012	2:06:15 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	2:06:15 PM	Tube furnace set to 0
7/6/2012	2:06:16 PM	Helium valve closed
7/6/2012	2:06:16 PM	H2 valve closed
7/6/2012	2:06:16 PM	BCl3 valve closed
7/6/2012	2:06:16 PM	PH3 valve closed
7/6/2012	2:06:16 PM	SiCl4 pre valve closed
7/6/2012	2:06:16 PM	SiCl4 post valve closed
7/6/2012	2:06:16 PM	Main Vac valve closed
7/6/2012	2:06:16 PM	Bubbler valve closed
7/6/2012	2:06:16 PM	Bypass valve opened
7/6/2012	2:06:16 PM	Helium MFC set to  0.000000
7/6/2012	2:06:16 PM	H2 MFC set to  0.000000
7/6/2012	2:06:16 PM	BCl3 MFC set to  0.000000
7/6/2012	2:06:16 PM	PH3 MFC set to  0.000000
7/6/2012	2:06:16 PM	SiCl4 MFC set to  0.000000
7/6/2012	2:06:16 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	2:06:16 PM	Tube furnace set to 0
7/6/2012	2:06:25 PM	Helium valve closed
7/6/2012	2:06:25 PM	H2 valve closed
7/6/2012	2:06:25 PM	BCl3 valve closed
7/6/2012	2:06:25 PM	PH3 valve closed
7/6/2012	2:06:25 PM	SiCl4 pre valve closed
7/6/2012	2:06:25 PM	SiCl4 post valve closed
7/6/2012	2:06:25 PM	Bypass valve closed
7/6/2012	2:06:25 PM	Bubbler valve closed
7/6/2012	2:06:25 PM	Main Vac valve opened
7/6/2012	2:06:25 PM	Helium MFC set to  0.000000
7/6/2012	2:06:25 PM	H2 MFC set to  0.000000
7/6/2012	2:06:25 PM	BCl3 MFC set to  0.000000
7/6/2012	2:06:25 PM	PH3 MFC set to  0.000000
7/6/2012	2:06:25 PM	SiCl4 MFC set to  0.000000
7/6/2012	2:06:25 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	2:06:25 PM	Tube furnace set to 0
7/6/2012	2:06:31 PM	H2 valve closed
7/6/2012	2:06:31 PM	BCl3 valve closed
7/6/2012	2:06:31 PM	PH3 valve closed
7/6/2012	2:06:31 PM	SiCl4 pre valve closed
7/6/2012	2:06:31 PM	SiCl4 post valve closed
7/6/2012	2:06:31 PM	Bypass valve closed
7/6/2012	2:06:31 PM	Bubbler valve closed
7/6/2012	2:06:31 PM	Helium valve opened
7/6/2012	2:06:31 PM	Main Vac valve opened
7/6/2012	2:06:31 PM	Helium MFC set to  20.000000
7/6/2012	2:06:31 PM	H2 MFC set to  0.000000
7/6/2012	2:06:31 PM	BCl3 MFC set to  0.000000
7/6/2012	2:06:31 PM	PH3 MFC set to  0.000000
7/6/2012	2:06:31 PM	SiCl4 MFC set to  0.000000
7/6/2012	2:06:31 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	2:06:31 PM	Tube furnace set to 0
7/6/2012	2:07:01 PM	Helium valve closed
7/6/2012	2:07:01 PM	H2 valve closed
7/6/2012	2:07:01 PM	BCl3 valve closed
7/6/2012	2:07:01 PM	PH3 valve closed
7/6/2012	2:07:01 PM	SiCl4 pre valve closed
7/6/2012	2:07:01 PM	SiCl4 post valve closed
7/6/2012	2:07:01 PM	Bypass valve closed
7/6/2012	2:07:01 PM	Bubbler valve closed
7/6/2012	2:07:01 PM	Main Vac valve opened
7/6/2012	2:07:01 PM	Helium MFC set to  0.000000
7/6/2012	2:07:01 PM	H2 MFC set to  0.000000
7/6/2012	2:07:01 PM	BCl3 MFC set to  0.000000
7/6/2012	2:07:01 PM	PH3 MFC set to  0.000000
7/6/2012	2:07:01 PM	SiCl4 MFC set to  0.000000
7/6/2012	2:07:01 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	2:07:01 PM	Tube furnace set to 0
7/6/2012	2:07:31 PM	H2 valve closed
7/6/2012	2:07:31 PM	BCl3 valve closed
7/6/2012	2:07:31 PM	PH3 valve closed
7/6/2012	2:07:31 PM	SiCl4 pre valve closed
7/6/2012	2:07:31 PM	SiCl4 post valve closed
7/6/2012	2:07:31 PM	Bypass valve closed
7/6/2012	2:07:31 PM	Bubbler valve closed
7/6/2012	2:07:31 PM	Helium valve opened
7/6/2012	2:07:31 PM	Main Vac valve opened
7/6/2012	2:07:31 PM	Helium MFC set to  20.000000
7/6/2012	2:07:31 PM	H2 MFC set to  0.000000
7/6/2012	2:07:31 PM	BCl3 MFC set to  0.000000
7/6/2012	2:07:31 PM	PH3 MFC set to  0.000000
7/6/2012	2:07:31 PM	SiCl4 MFC set to  0.000000
7/6/2012	2:07:31 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	2:07:31 PM	Tube furnace set to 0
7/6/2012	2:08:01 PM	Helium valve closed
7/6/2012	2:08:01 PM	H2 valve closed
7/6/2012	2:08:01 PM	BCl3 valve closed
7/6/2012	2:08:01 PM	PH3 valve closed
7/6/2012	2:08:01 PM	SiCl4 pre valve closed
7/6/2012	2:08:01 PM	SiCl4 post valve closed
7/6/2012	2:08:01 PM	Bypass valve closed
7/6/2012	2:08:01 PM	Bubbler valve closed
7/6/2012	2:08:01 PM	Main Vac valve opened
7/6/2012	2:08:01 PM	Helium MFC set to  0.000000
7/6/2012	2:08:01 PM	H2 MFC set to  0.000000
7/6/2012	2:08:01 PM	BCl3 MFC set to  0.000000
7/6/2012	2:08:01 PM	PH3 MFC set to  0.000000
7/6/2012	2:08:01 PM	SiCl4 MFC set to  0.000000
7/6/2012	2:08:01 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	2:08:01 PM	Tube furnace set to 0
7/6/2012	2:08:32 PM	H2 valve closed
7/6/2012	2:08:32 PM	BCl3 valve closed
7/6/2012	2:08:32 PM	PH3 valve closed
7/6/2012	2:08:32 PM	SiCl4 pre valve closed
7/6/2012	2:08:32 PM	SiCl4 post valve closed
7/6/2012	2:08:32 PM	Bypass valve closed
7/6/2012	2:08:32 PM	Bubbler valve closed
7/6/2012	2:08:32 PM	Helium valve opened
7/6/2012	2:08:32 PM	Main Vac valve opened
7/6/2012	2:08:32 PM	Helium MFC set to  20.000000
7/6/2012	2:08:32 PM	H2 MFC set to  0.000000
7/6/2012	2:08:32 PM	BCl3 MFC set to  0.000000
7/6/2012	2:08:32 PM	PH3 MFC set to  0.000000
7/6/2012	2:08:32 PM	SiCl4 MFC set to  0.000000
7/6/2012	2:08:32 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	2:08:32 PM	Tube furnace set to 0
7/6/2012	2:09:02 PM	Helium valve closed
7/6/2012	2:09:02 PM	H2 valve closed
7/6/2012	2:09:02 PM	BCl3 valve closed
7/6/2012	2:09:02 PM	PH3 valve closed
7/6/2012	2:09:02 PM	SiCl4 pre valve closed
7/6/2012	2:09:02 PM	SiCl4 post valve closed
7/6/2012	2:09:02 PM	Bypass valve closed
7/6/2012	2:09:02 PM	Bubbler valve closed
7/6/2012	2:09:02 PM	Main Vac valve opened
7/6/2012	2:09:02 PM	Helium MFC set to  0.000000
7/6/2012	2:09:02 PM	H2 MFC set to  0.000000
7/6/2012	2:09:02 PM	BCl3 MFC set to  0.000000
7/6/2012	2:09:02 PM	PH3 MFC set to  0.000000
7/6/2012	2:09:02 PM	SiCl4 MFC set to  0.000000
7/6/2012	2:09:02 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	2:09:02 PM	Tube furnace set to 0
7/6/2012	2:09:32 PM	H2 valve closed
7/6/2012	2:09:32 PM	BCl3 valve closed
7/6/2012	2:09:32 PM	PH3 valve closed
7/6/2012	2:09:32 PM	SiCl4 pre valve closed
7/6/2012	2:09:32 PM	SiCl4 post valve closed
7/6/2012	2:09:32 PM	Bypass valve closed
7/6/2012	2:09:32 PM	Bubbler valve closed
7/6/2012	2:09:32 PM	Helium valve opened
7/6/2012	2:09:32 PM	Main Vac valve opened
7/6/2012	2:09:32 PM	Helium MFC set to  20.000000
7/6/2012	2:09:32 PM	H2 MFC set to  0.000000
7/6/2012	2:09:32 PM	BCl3 MFC set to  0.000000
7/6/2012	2:09:32 PM	PH3 MFC set to  0.000000
7/6/2012	2:09:32 PM	SiCl4 MFC set to  0.000000
7/6/2012	2:09:32 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	2:09:32 PM	Tube furnace set to 0
7/6/2012	2:10:02 PM	Helium valve closed
7/6/2012	2:10:02 PM	H2 valve closed
7/6/2012	2:10:02 PM	BCl3 valve closed
7/6/2012	2:10:02 PM	PH3 valve closed
7/6/2012	2:10:02 PM	SiCl4 pre valve closed
7/6/2012	2:10:02 PM	SiCl4 post valve closed
7/6/2012	2:10:02 PM	Bypass valve closed
7/6/2012	2:10:02 PM	Bubbler valve closed
7/6/2012	2:10:02 PM	Main Vac valve opened
7/6/2012	2:10:02 PM	Helium MFC set to  0.000000
7/6/2012	2:10:02 PM	H2 MFC set to  0.000000
7/6/2012	2:10:02 PM	BCl3 MFC set to  0.000000
7/6/2012	2:10:02 PM	PH3 MFC set to  0.000000
7/6/2012	2:10:02 PM	SiCl4 MFC set to  0.000000
7/6/2012	2:10:02 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	2:10:02 PM	Tube furnace set to 0
7/6/2012	2:10:33 PM	H2 valve closed
7/6/2012	2:10:33 PM	BCl3 valve closed
7/6/2012	2:10:33 PM	PH3 valve closed
7/6/2012	2:10:33 PM	SiCl4 pre valve closed
7/6/2012	2:10:33 PM	SiCl4 post valve closed
7/6/2012	2:10:33 PM	Bypass valve closed
7/6/2012	2:10:33 PM	Bubbler valve closed
7/6/2012	2:10:33 PM	Helium valve opened
7/6/2012	2:10:33 PM	Main Vac valve opened
7/6/2012	2:10:33 PM	Helium MFC set to  20.000000
7/6/2012	2:10:33 PM	H2 MFC set to  0.000000
7/6/2012	2:10:33 PM	BCl3 MFC set to  0.000000
7/6/2012	2:10:33 PM	PH3 MFC set to  0.000000
7/6/2012	2:10:33 PM	SiCl4 MFC set to  0.000000
7/6/2012	2:10:33 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	2:10:33 PM	Tube furnace set to 0
7/6/2012	2:11:03 PM	Helium valve closed
7/6/2012	2:11:03 PM	H2 valve closed
7/6/2012	2:11:03 PM	BCl3 valve closed
7/6/2012	2:11:03 PM	PH3 valve closed
7/6/2012	2:11:03 PM	SiCl4 pre valve closed
7/6/2012	2:11:03 PM	SiCl4 post valve closed
7/6/2012	2:11:03 PM	Bypass valve closed
7/6/2012	2:11:03 PM	Bubbler valve closed
7/6/2012	2:11:03 PM	Main Vac valve opened
7/6/2012	2:11:03 PM	Helium MFC set to  0.000000
7/6/2012	2:11:03 PM	H2 MFC set to  0.000000
7/6/2012	2:11:03 PM	BCl3 MFC set to  0.000000
7/6/2012	2:11:03 PM	PH3 MFC set to  0.000000
7/6/2012	2:11:03 PM	SiCl4 MFC set to  0.000000
7/6/2012	2:11:03 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	2:11:03 PM	Tube furnace set to 0
7/6/2012	2:11:33 PM	H2 valve closed
7/6/2012	2:11:33 PM	BCl3 valve closed
7/6/2012	2:11:33 PM	PH3 valve closed
7/6/2012	2:11:33 PM	SiCl4 pre valve closed
7/6/2012	2:11:33 PM	SiCl4 post valve closed
7/6/2012	2:11:33 PM	Bypass valve closed
7/6/2012	2:11:33 PM	Bubbler valve closed
7/6/2012	2:11:33 PM	Helium valve opened
7/6/2012	2:11:33 PM	Main Vac valve opened
7/6/2012	2:11:33 PM	Helium MFC set to  20.000000
7/6/2012	2:11:33 PM	H2 MFC set to  0.000000
7/6/2012	2:11:33 PM	BCl3 MFC set to  0.000000
7/6/2012	2:11:33 PM	PH3 MFC set to  0.000000
7/6/2012	2:11:33 PM	SiCl4 MFC set to  0.000000
7/6/2012	2:11:33 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	2:11:33 PM	Tube furnace set to 0
7/6/2012	2:12:03 PM	Helium valve closed
7/6/2012	2:12:03 PM	H2 valve closed
7/6/2012	2:12:03 PM	BCl3 valve closed
7/6/2012	2:12:03 PM	PH3 valve closed
7/6/2012	2:12:03 PM	SiCl4 pre valve closed
7/6/2012	2:12:03 PM	SiCl4 post valve closed
7/6/2012	2:12:03 PM	Bypass valve closed
7/6/2012	2:12:03 PM	Bubbler valve closed
7/6/2012	2:12:03 PM	Main Vac valve opened
7/6/2012	2:12:03 PM	Helium MFC set to  0.000000
7/6/2012	2:12:03 PM	H2 MFC set to  0.000000
7/6/2012	2:12:03 PM	BCl3 MFC set to  0.000000
7/6/2012	2:12:03 PM	PH3 MFC set to  0.000000
7/6/2012	2:12:03 PM	SiCl4 MFC set to  0.000000
7/6/2012	2:12:03 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	2:12:04 PM	Tube furnace set to 0
7/6/2012	2:12:34 PM	H2 valve closed
7/6/2012	2:12:34 PM	BCl3 valve closed
7/6/2012	2:12:34 PM	PH3 valve closed
7/6/2012	2:12:34 PM	SiCl4 pre valve closed
7/6/2012	2:12:34 PM	SiCl4 post valve closed
7/6/2012	2:12:34 PM	Bypass valve closed
7/6/2012	2:12:34 PM	Bubbler valve closed
7/6/2012	2:12:34 PM	Helium valve opened
7/6/2012	2:12:34 PM	Main Vac valve opened
7/6/2012	2:12:34 PM	Helium MFC set to  20.000000
7/6/2012	2:12:34 PM	H2 MFC set to  0.000000
7/6/2012	2:12:34 PM	BCl3 MFC set to  0.000000
7/6/2012	2:12:34 PM	PH3 MFC set to  0.000000
7/6/2012	2:12:34 PM	SiCl4 MFC set to  0.000000
7/6/2012	2:12:34 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	2:12:34 PM	Tube furnace set to 0
7/6/2012	2:13:04 PM	Helium valve closed
7/6/2012	2:13:04 PM	H2 valve closed
7/6/2012	2:13:04 PM	BCl3 valve closed
7/6/2012	2:13:04 PM	PH3 valve closed
7/6/2012	2:13:04 PM	SiCl4 pre valve closed
7/6/2012	2:13:04 PM	SiCl4 post valve closed
7/6/2012	2:13:04 PM	Bypass valve closed
7/6/2012	2:13:04 PM	Bubbler valve closed
7/6/2012	2:13:04 PM	Main Vac valve opened
7/6/2012	2:13:04 PM	Helium MFC set to  0.000000
7/6/2012	2:13:04 PM	H2 MFC set to  0.000000
7/6/2012	2:13:04 PM	BCl3 MFC set to  0.000000
7/6/2012	2:13:04 PM	PH3 MFC set to  0.000000
7/6/2012	2:13:04 PM	SiCl4 MFC set to  0.000000
7/6/2012	2:13:04 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	2:13:04 PM	Tube furnace set to 0
7/6/2012	2:13:34 PM	H2 valve closed
7/6/2012	2:13:34 PM	BCl3 valve closed
7/6/2012	2:13:34 PM	PH3 valve closed
7/6/2012	2:13:34 PM	SiCl4 pre valve closed
7/6/2012	2:13:34 PM	SiCl4 post valve closed
7/6/2012	2:13:34 PM	Bypass valve closed
7/6/2012	2:13:34 PM	Bubbler valve closed
7/6/2012	2:13:34 PM	Helium valve opened
7/6/2012	2:13:34 PM	Main Vac valve opened
7/6/2012	2:13:34 PM	Helium MFC set to  20.000000
7/6/2012	2:13:34 PM	H2 MFC set to  0.000000
7/6/2012	2:13:34 PM	BCl3 MFC set to  0.000000
7/6/2012	2:13:34 PM	PH3 MFC set to  0.000000
7/6/2012	2:13:34 PM	SiCl4 MFC set to  0.000000
7/6/2012	2:13:34 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	2:13:34 PM	Tube furnace set to 0
7/6/2012	2:14:04 PM	Helium valve closed
7/6/2012	2:14:04 PM	H2 valve closed
7/6/2012	2:14:04 PM	BCl3 valve closed
7/6/2012	2:14:04 PM	PH3 valve closed
7/6/2012	2:14:04 PM	SiCl4 pre valve closed
7/6/2012	2:14:04 PM	SiCl4 post valve closed
7/6/2012	2:14:04 PM	Bypass valve closed
7/6/2012	2:14:04 PM	Bubbler valve closed
7/6/2012	2:14:04 PM	Main Vac valve opened
7/6/2012	2:14:04 PM	Helium MFC set to  0.000000
7/6/2012	2:14:04 PM	H2 MFC set to  0.000000
7/6/2012	2:14:04 PM	BCl3 MFC set to  0.000000
7/6/2012	2:14:04 PM	PH3 MFC set to  0.000000
7/6/2012	2:14:04 PM	SiCl4 MFC set to  0.000000
7/6/2012	2:14:04 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	2:14:04 PM	Tube furnace set to 0
7/6/2012	2:14:34 PM	H2 valve closed
7/6/2012	2:14:34 PM	BCl3 valve closed
7/6/2012	2:14:34 PM	PH3 valve closed
7/6/2012	2:14:34 PM	SiCl4 pre valve closed
7/6/2012	2:14:34 PM	SiCl4 post valve closed
7/6/2012	2:14:34 PM	Bypass valve closed
7/6/2012	2:14:34 PM	Bubbler valve closed
7/6/2012	2:14:34 PM	Helium valve opened
7/6/2012	2:14:34 PM	Main Vac valve opened
7/6/2012	2:14:35 PM	Helium MFC set to  20.000000
7/6/2012	2:14:35 PM	H2 MFC set to  0.000000
7/6/2012	2:14:35 PM	BCl3 MFC set to  0.000000
7/6/2012	2:14:35 PM	PH3 MFC set to  0.000000
7/6/2012	2:14:35 PM	SiCl4 MFC set to  0.000000
7/6/2012	2:14:35 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	2:14:35 PM	Tube furnace set to 0
7/6/2012	2:15:05 PM	Helium valve closed
7/6/2012	2:15:05 PM	H2 valve closed
7/6/2012	2:15:05 PM	BCl3 valve closed
7/6/2012	2:15:05 PM	PH3 valve closed
7/6/2012	2:15:05 PM	SiCl4 pre valve closed
7/6/2012	2:15:05 PM	SiCl4 post valve closed
7/6/2012	2:15:05 PM	Bypass valve closed
7/6/2012	2:15:05 PM	Bubbler valve closed
7/6/2012	2:15:05 PM	Main Vac valve opened
7/6/2012	2:15:05 PM	Helium MFC set to  0.000000
7/6/2012	2:15:05 PM	H2 MFC set to  0.000000
7/6/2012	2:15:05 PM	BCl3 MFC set to  0.000000
7/6/2012	2:15:05 PM	PH3 MFC set to  0.000000
7/6/2012	2:15:05 PM	SiCl4 MFC set to  0.000000
7/6/2012	2:15:05 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	2:15:05 PM	Tube furnace set to 0
7/6/2012	2:15:35 PM	H2 valve closed
7/6/2012	2:15:35 PM	BCl3 valve closed
7/6/2012	2:15:35 PM	PH3 valve closed
7/6/2012	2:15:35 PM	SiCl4 pre valve closed
7/6/2012	2:15:35 PM	SiCl4 post valve closed
7/6/2012	2:15:35 PM	Bypass valve closed
7/6/2012	2:15:35 PM	Bubbler valve closed
7/6/2012	2:15:35 PM	Helium valve opened
7/6/2012	2:15:35 PM	Main Vac valve opened
7/6/2012	2:15:35 PM	Helium MFC set to  20.000000
7/6/2012	2:15:35 PM	H2 MFC set to  0.000000
7/6/2012	2:15:35 PM	BCl3 MFC set to  0.000000
7/6/2012	2:15:35 PM	PH3 MFC set to  0.000000
7/6/2012	2:15:35 PM	SiCl4 MFC set to  0.000000
7/6/2012	2:15:35 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	2:15:35 PM	Tube furnace set to 0
7/6/2012	2:16:05 PM	Helium valve closed
7/6/2012	2:16:05 PM	H2 valve closed
7/6/2012	2:16:05 PM	BCl3 valve closed
7/6/2012	2:16:05 PM	PH3 valve closed
7/6/2012	2:16:05 PM	SiCl4 pre valve closed
7/6/2012	2:16:05 PM	SiCl4 post valve closed
7/6/2012	2:16:05 PM	Bypass valve closed
7/6/2012	2:16:05 PM	Bubbler valve closed
7/6/2012	2:16:05 PM	Main Vac valve opened
7/6/2012	2:16:05 PM	Helium MFC set to  0.000000
7/6/2012	2:16:05 PM	H2 MFC set to  0.000000
7/6/2012	2:16:05 PM	BCl3 MFC set to  0.000000
7/6/2012	2:16:05 PM	PH3 MFC set to  0.000000
7/6/2012	2:16:05 PM	SiCl4 MFC set to  0.000000
7/6/2012	2:16:05 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	2:16:05 PM	Tube furnace set to 0
7/6/2012	2:16:06 PM	Run finished at 2:16 PM
7/6/2012	2:16:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
7/6/2012	2:17:21 PM	Main Vac valve closed
7/6/2012	2:17:34 PM	Main Vac valve opened
7/6/2012	2:18:20 PM	Recipe started at 2:18 PM
7/6/2012	2:18:20 PM	Helium valve closed
7/6/2012	2:18:20 PM	H2 valve closed
7/6/2012	2:18:20 PM	BCl3 valve closed
7/6/2012	2:18:20 PM	PH3 valve closed
7/6/2012	2:18:20 PM	SiCl4 pre valve closed
7/6/2012	2:18:20 PM	SiCl4 post valve closed
7/6/2012	2:18:20 PM	Main Vac valve closed
7/6/2012	2:18:20 PM	Bypass valve closed
7/6/2012	2:18:20 PM	Bubbler valve closed
7/6/2012	2:18:20 PM	Helium MFC set to  0.000000
7/6/2012	2:18:20 PM	H2 MFC set to  0.000000
7/6/2012	2:18:20 PM	BCl3 MFC set to  0.000000
7/6/2012	2:18:20 PM	PH3 MFC set to  0.000000
7/6/2012	2:18:20 PM	SiCl4 MFC set to  0.000000
7/6/2012	2:18:20 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	2:18:20 PM	Tube furnace set to 0
7/6/2012	2:18:23 PM	Helium valve closed
7/6/2012	2:18:23 PM	BCl3 valve closed
7/6/2012	2:18:23 PM	PH3 valve closed
7/6/2012	2:18:23 PM	SiCl4 pre valve closed
7/6/2012	2:18:23 PM	SiCl4 post valve closed
7/6/2012	2:18:23 PM	Main Vac valve closed
7/6/2012	2:18:23 PM	Bypass valve closed
7/6/2012	2:18:23 PM	Bubbler valve closed
7/6/2012	2:18:23 PM	H2 valve opened
7/6/2012	2:18:23 PM	Helium MFC set to  0.000000
7/6/2012	2:18:23 PM	H2 MFC set to  500.000000
7/6/2012	2:18:23 PM	BCl3 MFC set to  0.000000
7/6/2012	2:18:23 PM	PH3 MFC set to  0.000000
7/6/2012	2:18:23 PM	SiCl4 MFC set to  0.000000
7/6/2012	2:18:23 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	2:18:23 PM	Tube furnace set to 0
7/6/2012	2:19:36 PM	Helium valve closed
7/6/2012	2:19:36 PM	BCl3 valve closed
7/6/2012	2:19:36 PM	PH3 valve closed
7/6/2012	2:19:36 PM	SiCl4 pre valve closed
7/6/2012	2:19:36 PM	SiCl4 post valve closed
7/6/2012	2:19:36 PM	Main Vac valve closed
7/6/2012	2:19:36 PM	Bypass valve closed
7/6/2012	2:19:36 PM	H2 valve opened
7/6/2012	2:19:36 PM	Bubbler valve opened
7/6/2012	2:19:36 PM	Helium MFC set to  0.000000
7/6/2012	2:19:36 PM	H2 MFC set to  500.000000
7/6/2012	2:19:36 PM	BCl3 MFC set to  0.000000
7/6/2012	2:19:36 PM	PH3 MFC set to  0.000000
7/6/2012	2:19:36 PM	SiCl4 MFC set to  0.000000
7/6/2012	2:19:36 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	2:19:36 PM	Tube furnace set to 0
7/6/2012	2:19:37 PM	Helium valve closed
7/6/2012	2:19:37 PM	BCl3 valve closed
7/6/2012	2:19:37 PM	PH3 valve closed
7/6/2012	2:19:37 PM	SiCl4 pre valve closed
7/6/2012	2:19:37 PM	SiCl4 post valve closed
7/6/2012	2:19:37 PM	Main Vac valve closed
7/6/2012	2:19:37 PM	Bypass valve closed
7/6/2012	2:19:37 PM	H2 valve opened
7/6/2012	2:19:37 PM	Bubbler valve opened
7/6/2012	2:19:37 PM	Helium MFC set to  0.000000
7/6/2012	2:19:37 PM	H2 MFC set to  500.000000
7/6/2012	2:19:37 PM	BCl3 MFC set to  0.000000
7/6/2012	2:19:37 PM	PH3 MFC set to  0.000000
7/6/2012	2:19:37 PM	SiCl4 MFC set to  0.000000
7/6/2012	2:19:37 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	2:19:37 PM	Tube furnace set to 1000
7/6/2012	2:49:37 PM	Helium valve closed
7/6/2012	2:49:37 PM	PH3 valve closed
7/6/2012	2:49:37 PM	Main Vac valve closed
7/6/2012	2:49:37 PM	Bypass valve closed
7/6/2012	2:49:37 PM	H2 valve opened
7/6/2012	2:49:37 PM	BCl3 valve opened
7/6/2012	2:49:37 PM	SiCl4 pre valve opened
7/6/2012	2:49:37 PM	SiCl4 post valve opened
7/6/2012	2:49:37 PM	Bubbler valve opened
7/6/2012	2:49:37 PM	Helium MFC set to  0.000000
7/6/2012	2:49:37 PM	H2 MFC set to  500.000000
7/6/2012	2:49:37 PM	BCl3 MFC set to  1.000000
7/6/2012	2:49:37 PM	PH3 MFC set to  0.000000
7/6/2012	2:49:37 PM	SiCl4 MFC set to  50.000000
7/6/2012	2:49:37 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	2:49:37 PM	Tube furnace set to 1000
7/6/2012	2:56:37 PM	Helium valve closed
7/6/2012	2:56:37 PM	BCl3 valve closed
7/6/2012	2:56:37 PM	PH3 valve closed
7/6/2012	2:56:37 PM	SiCl4 pre valve closed
7/6/2012	2:56:37 PM	SiCl4 post valve closed
7/6/2012	2:56:37 PM	Main Vac valve closed
7/6/2012	2:56:37 PM	Bypass valve closed
7/6/2012	2:56:37 PM	H2 valve opened
7/6/2012	2:56:37 PM	Bubbler valve opened
7/6/2012	2:56:37 PM	Helium MFC set to  0.000000
7/6/2012	2:56:37 PM	H2 MFC set to  500.000000
7/6/2012	2:56:37 PM	BCl3 MFC set to  0.000000
7/6/2012	2:56:37 PM	PH3 MFC set to  0.000000
7/6/2012	2:56:37 PM	SiCl4 MFC set to  0.000000
7/6/2012	2:56:37 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	2:56:37 PM	Tube furnace set to 750
7/6/2012	3:01:37 PM	H2 valve closed
7/6/2012	3:01:37 PM	BCl3 valve closed
7/6/2012	3:01:37 PM	PH3 valve closed
7/6/2012	3:01:37 PM	SiCl4 pre valve closed
7/6/2012	3:01:37 PM	SiCl4 post valve closed
7/6/2012	3:01:37 PM	Main Vac valve closed
7/6/2012	3:01:37 PM	Bypass valve closed
7/6/2012	3:01:37 PM	Helium valve opened
7/6/2012	3:01:37 PM	Bubbler valve opened
7/6/2012	3:01:37 PM	Helium MFC set to  500.000000
7/6/2012	3:01:37 PM	H2 MFC set to  0.000000
7/6/2012	3:01:37 PM	BCl3 MFC set to  0.000000
7/6/2012	3:01:37 PM	PH3 MFC set to  0.000000
7/6/2012	3:01:37 PM	SiCl4 MFC set to  0.000000
7/6/2012	3:01:37 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	3:01:38 PM	Tube furnace set to 0
7/6/2012	3:16:00 PM	Helium valve closed
7/6/2012	3:16:00 PM	H2 valve closed
7/6/2012	3:16:00 PM	BCl3 valve closed
7/6/2012	3:16:00 PM	PH3 valve closed
7/6/2012	3:16:00 PM	SiCl4 pre valve closed
7/6/2012	3:16:00 PM	SiCl4 post valve closed
7/6/2012	3:16:00 PM	Main Vac valve closed
7/6/2012	3:16:00 PM	Bypass valve closed
7/6/2012	3:16:00 PM	Bubbler valve closed
7/6/2012	3:16:00 PM	Helium MFC set to  0.000000
7/6/2012	3:16:00 PM	H2 MFC set to  0.000000
7/6/2012	3:16:00 PM	BCl3 MFC set to  0.000000
7/6/2012	3:16:00 PM	PH3 MFC set to  0.000000
7/6/2012	3:16:00 PM	SiCl4 MFC set to  0.000000
7/6/2012	3:16:00 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	3:16:00 PM	Tube furnace set to 0
7/6/2012	3:16:01 PM	Run finished at 3:16 PM
7/6/2012	3:19:25 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/6/2012	3:19:26 PM	Recipe started at 3:19 PM
7/6/2012	3:19:26 PM	Helium valve closed
7/6/2012	3:19:26 PM	H2 valve closed
7/6/2012	3:19:26 PM	BCl3 valve closed
7/6/2012	3:19:26 PM	PH3 valve closed
7/6/2012	3:19:26 PM	SiCl4 pre valve closed
7/6/2012	3:19:26 PM	SiCl4 post valve closed
7/6/2012	3:19:26 PM	Main Vac valve closed
7/6/2012	3:19:26 PM	Bubbler valve closed
7/6/2012	3:19:26 PM	Bypass valve opened
7/6/2012	3:19:26 PM	Helium MFC set to  0.000000
7/6/2012	3:19:26 PM	H2 MFC set to  0.000000
7/6/2012	3:19:26 PM	BCl3 MFC set to  0.000000
7/6/2012	3:19:26 PM	PH3 MFC set to  0.000000
7/6/2012	3:19:26 PM	SiCl4 MFC set to  0.000000
7/6/2012	3:19:26 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	3:19:26 PM	Tube furnace set to 0
7/6/2012	3:20:30 PM	Helium valve closed
7/6/2012	3:20:30 PM	H2 valve closed
7/6/2012	3:20:30 PM	BCl3 valve closed
7/6/2012	3:20:30 PM	PH3 valve closed
7/6/2012	3:20:30 PM	SiCl4 pre valve closed
7/6/2012	3:20:30 PM	SiCl4 post valve closed
7/6/2012	3:20:30 PM	Main Vac valve closed
7/6/2012	3:20:30 PM	Bubbler valve closed
7/6/2012	3:20:30 PM	Bypass valve opened
7/6/2012	3:20:30 PM	Helium MFC set to  0.000000
7/6/2012	3:20:30 PM	H2 MFC set to  0.000000
7/6/2012	3:20:30 PM	BCl3 MFC set to  0.000000
7/6/2012	3:20:30 PM	PH3 MFC set to  0.000000
7/6/2012	3:20:30 PM	SiCl4 MFC set to  0.000000
7/6/2012	3:20:30 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	3:20:30 PM	Tube furnace set to 0
7/6/2012	3:20:53 PM	Helium valve closed
7/6/2012	3:20:53 PM	H2 valve closed
7/6/2012	3:20:53 PM	BCl3 valve closed
7/6/2012	3:20:53 PM	PH3 valve closed
7/6/2012	3:20:53 PM	SiCl4 pre valve closed
7/6/2012	3:20:53 PM	SiCl4 post valve closed
7/6/2012	3:20:53 PM	Bypass valve closed
7/6/2012	3:20:53 PM	Bubbler valve closed
7/6/2012	3:20:53 PM	Main Vac valve opened
7/6/2012	3:20:53 PM	Helium MFC set to  0.000000
7/6/2012	3:20:53 PM	H2 MFC set to  0.000000
7/6/2012	3:20:53 PM	BCl3 MFC set to  0.000000
7/6/2012	3:20:53 PM	PH3 MFC set to  0.000000
7/6/2012	3:20:53 PM	SiCl4 MFC set to  0.000000
7/6/2012	3:20:53 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	3:20:53 PM	Tube furnace set to 0
7/6/2012	3:20:54 PM	Run finished at 3:20 PM
7/6/2012	3:20:54 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/6/2012	3:21:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
7/6/2012	3:21:26 PM	Recipe started at 3:21 PM
7/6/2012	3:21:26 PM	Helium valve closed
7/6/2012	3:21:26 PM	H2 valve closed
7/6/2012	3:21:26 PM	BCl3 valve closed
7/6/2012	3:21:26 PM	PH3 valve closed
7/6/2012	3:21:26 PM	SiCl4 pre valve closed
7/6/2012	3:21:26 PM	SiCl4 post valve closed
7/6/2012	3:21:26 PM	Main Vac valve closed
7/6/2012	3:21:26 PM	Bubbler valve closed
7/6/2012	3:21:26 PM	Bypass valve opened
7/6/2012	3:21:26 PM	Helium MFC set to  0.000000
7/6/2012	3:21:26 PM	H2 MFC set to  0.000000
7/6/2012	3:21:26 PM	BCl3 MFC set to  0.000000
7/6/2012	3:21:26 PM	PH3 MFC set to  0.000000
7/6/2012	3:21:26 PM	SiCl4 MFC set to  0.000000
7/6/2012	3:21:26 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	3:21:26 PM	Tube furnace set to 0
7/6/2012	3:21:27 PM	Helium valve closed
7/6/2012	3:21:27 PM	H2 valve closed
7/6/2012	3:21:27 PM	BCl3 valve closed
7/6/2012	3:21:27 PM	PH3 valve closed
7/6/2012	3:21:27 PM	SiCl4 pre valve closed
7/6/2012	3:21:27 PM	SiCl4 post valve closed
7/6/2012	3:21:27 PM	Main Vac valve closed
7/6/2012	3:21:27 PM	Bubbler valve closed
7/6/2012	3:21:27 PM	Bypass valve opened
7/6/2012	3:21:27 PM	Helium MFC set to  0.000000
7/6/2012	3:21:27 PM	H2 MFC set to  0.000000
7/6/2012	3:21:27 PM	BCl3 MFC set to  0.000000
7/6/2012	3:21:27 PM	PH3 MFC set to  0.000000
7/6/2012	3:21:27 PM	SiCl4 MFC set to  0.000000
7/6/2012	3:21:27 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	3:21:27 PM	Tube furnace set to 0
7/6/2012	3:21:27 PM	Helium valve closed
7/6/2012	3:21:27 PM	H2 valve closed
7/6/2012	3:21:27 PM	BCl3 valve closed
7/6/2012	3:21:27 PM	PH3 valve closed
7/6/2012	3:21:27 PM	SiCl4 pre valve closed
7/6/2012	3:21:27 PM	SiCl4 post valve closed
7/6/2012	3:21:27 PM	Bypass valve closed
7/6/2012	3:21:27 PM	Bubbler valve closed
7/6/2012	3:21:27 PM	Main Vac valve opened
7/6/2012	3:21:27 PM	Helium MFC set to  0.000000
7/6/2012	3:21:27 PM	H2 MFC set to  0.000000
7/6/2012	3:21:27 PM	BCl3 MFC set to  0.000000
7/6/2012	3:21:27 PM	PH3 MFC set to  0.000000
7/6/2012	3:21:27 PM	SiCl4 MFC set to  0.000000
7/6/2012	3:21:27 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	3:21:27 PM	Tube furnace set to 0
7/6/2012	3:21:57 PM	H2 valve closed
7/6/2012	3:21:57 PM	BCl3 valve closed
7/6/2012	3:21:57 PM	PH3 valve closed
7/6/2012	3:21:57 PM	SiCl4 pre valve closed
7/6/2012	3:21:57 PM	SiCl4 post valve closed
7/6/2012	3:21:57 PM	Bypass valve closed
7/6/2012	3:21:58 PM	Bubbler valve closed
7/6/2012	3:21:58 PM	Helium valve opened
7/6/2012	3:21:58 PM	Main Vac valve opened
7/6/2012	3:21:58 PM	Helium MFC set to  20.000000
7/6/2012	3:21:58 PM	H2 MFC set to  0.000000
7/6/2012	3:21:58 PM	BCl3 MFC set to  0.000000
7/6/2012	3:21:58 PM	PH3 MFC set to  0.000000
7/6/2012	3:21:58 PM	SiCl4 MFC set to  0.000000
7/6/2012	3:21:58 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	3:21:58 PM	Tube furnace set to 0
7/6/2012	3:22:28 PM	Helium valve closed
7/6/2012	3:22:28 PM	H2 valve closed
7/6/2012	3:22:28 PM	BCl3 valve closed
7/6/2012	3:22:28 PM	PH3 valve closed
7/6/2012	3:22:28 PM	SiCl4 pre valve closed
7/6/2012	3:22:28 PM	SiCl4 post valve closed
7/6/2012	3:22:28 PM	Bypass valve closed
7/6/2012	3:22:28 PM	Bubbler valve closed
7/6/2012	3:22:28 PM	Main Vac valve opened
7/6/2012	3:22:28 PM	Helium MFC set to  0.000000
7/6/2012	3:22:28 PM	H2 MFC set to  0.000000
7/6/2012	3:22:28 PM	BCl3 MFC set to  0.000000
7/6/2012	3:22:28 PM	PH3 MFC set to  0.000000
7/6/2012	3:22:28 PM	SiCl4 MFC set to  0.000000
7/6/2012	3:22:28 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	3:22:28 PM	Tube furnace set to 0
7/6/2012	3:22:58 PM	H2 valve closed
7/6/2012	3:22:58 PM	BCl3 valve closed
7/6/2012	3:22:58 PM	PH3 valve closed
7/6/2012	3:22:58 PM	SiCl4 pre valve closed
7/6/2012	3:22:58 PM	SiCl4 post valve closed
7/6/2012	3:22:58 PM	Bypass valve closed
7/6/2012	3:22:58 PM	Bubbler valve closed
7/6/2012	3:22:58 PM	Helium valve opened
7/6/2012	3:22:58 PM	Main Vac valve opened
7/6/2012	3:22:58 PM	Helium MFC set to  20.000000
7/6/2012	3:22:58 PM	H2 MFC set to  0.000000
7/6/2012	3:22:58 PM	BCl3 MFC set to  0.000000
7/6/2012	3:22:58 PM	PH3 MFC set to  0.000000
7/6/2012	3:22:58 PM	SiCl4 MFC set to  0.000000
7/6/2012	3:22:58 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	3:22:58 PM	Tube furnace set to 0
7/6/2012	3:23:28 PM	Helium valve closed
7/6/2012	3:23:28 PM	H2 valve closed
7/6/2012	3:23:28 PM	BCl3 valve closed
7/6/2012	3:23:28 PM	PH3 valve closed
7/6/2012	3:23:28 PM	SiCl4 pre valve closed
7/6/2012	3:23:28 PM	SiCl4 post valve closed
7/6/2012	3:23:28 PM	Bypass valve closed
7/6/2012	3:23:28 PM	Bubbler valve closed
7/6/2012	3:23:28 PM	Main Vac valve opened
7/6/2012	3:23:28 PM	Helium MFC set to  0.000000
7/6/2012	3:23:28 PM	H2 MFC set to  0.000000
7/6/2012	3:23:28 PM	BCl3 MFC set to  0.000000
7/6/2012	3:23:28 PM	PH3 MFC set to  0.000000
7/6/2012	3:23:28 PM	SiCl4 MFC set to  0.000000
7/6/2012	3:23:28 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	3:23:28 PM	Tube furnace set to 0
7/6/2012	3:23:58 PM	H2 valve closed
7/6/2012	3:23:58 PM	BCl3 valve closed
7/6/2012	3:23:58 PM	PH3 valve closed
7/6/2012	3:23:58 PM	SiCl4 pre valve closed
7/6/2012	3:23:58 PM	SiCl4 post valve closed
7/6/2012	3:23:58 PM	Bypass valve closed
7/6/2012	3:23:58 PM	Bubbler valve closed
7/6/2012	3:23:58 PM	Helium valve opened
7/6/2012	3:23:58 PM	Main Vac valve opened
7/6/2012	3:23:58 PM	Helium MFC set to  20.000000
7/6/2012	3:23:58 PM	H2 MFC set to  0.000000
7/6/2012	3:23:58 PM	BCl3 MFC set to  0.000000
7/6/2012	3:23:58 PM	PH3 MFC set to  0.000000
7/6/2012	3:23:58 PM	SiCl4 MFC set to  0.000000
7/6/2012	3:23:59 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	3:23:59 PM	Tube furnace set to 0
7/6/2012	3:24:29 PM	Helium valve closed
7/6/2012	3:24:29 PM	H2 valve closed
7/6/2012	3:24:29 PM	BCl3 valve closed
7/6/2012	3:24:29 PM	PH3 valve closed
7/6/2012	3:24:29 PM	SiCl4 pre valve closed
7/6/2012	3:24:29 PM	SiCl4 post valve closed
7/6/2012	3:24:29 PM	Bypass valve closed
7/6/2012	3:24:29 PM	Bubbler valve closed
7/6/2012	3:24:29 PM	Main Vac valve opened
7/6/2012	3:24:29 PM	Helium MFC set to  0.000000
7/6/2012	3:24:29 PM	H2 MFC set to  0.000000
7/6/2012	3:24:29 PM	BCl3 MFC set to  0.000000
7/6/2012	3:24:29 PM	PH3 MFC set to  0.000000
7/6/2012	3:24:29 PM	SiCl4 MFC set to  0.000000
7/6/2012	3:24:29 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	3:24:29 PM	Tube furnace set to 0
7/6/2012	3:24:59 PM	H2 valve closed
7/6/2012	3:24:59 PM	BCl3 valve closed
7/6/2012	3:24:59 PM	PH3 valve closed
7/6/2012	3:24:59 PM	SiCl4 pre valve closed
7/6/2012	3:24:59 PM	SiCl4 post valve closed
7/6/2012	3:24:59 PM	Bypass valve closed
7/6/2012	3:24:59 PM	Bubbler valve closed
7/6/2012	3:24:59 PM	Helium valve opened
7/6/2012	3:24:59 PM	Main Vac valve opened
7/6/2012	3:24:59 PM	Helium MFC set to  20.000000
7/6/2012	3:24:59 PM	H2 MFC set to  0.000000
7/6/2012	3:24:59 PM	BCl3 MFC set to  0.000000
7/6/2012	3:24:59 PM	PH3 MFC set to  0.000000
7/6/2012	3:24:59 PM	SiCl4 MFC set to  0.000000
7/6/2012	3:24:59 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	3:24:59 PM	Tube furnace set to 0
7/6/2012	3:25:29 PM	Helium valve closed
7/6/2012	3:25:29 PM	H2 valve closed
7/6/2012	3:25:29 PM	BCl3 valve closed
7/6/2012	3:25:29 PM	PH3 valve closed
7/6/2012	3:25:29 PM	SiCl4 pre valve closed
7/6/2012	3:25:29 PM	SiCl4 post valve closed
7/6/2012	3:25:29 PM	Bypass valve closed
7/6/2012	3:25:29 PM	Bubbler valve closed
7/6/2012	3:25:29 PM	Main Vac valve opened
7/6/2012	3:25:29 PM	Helium MFC set to  0.000000
7/6/2012	3:25:29 PM	H2 MFC set to  0.000000
7/6/2012	3:25:29 PM	BCl3 MFC set to  0.000000
7/6/2012	3:25:29 PM	PH3 MFC set to  0.000000
7/6/2012	3:25:29 PM	SiCl4 MFC set to  0.000000
7/6/2012	3:25:29 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	3:25:29 PM	Tube furnace set to 0
7/6/2012	3:25:59 PM	H2 valve closed
7/6/2012	3:25:59 PM	BCl3 valve closed
7/6/2012	3:25:59 PM	PH3 valve closed
7/6/2012	3:25:59 PM	SiCl4 pre valve closed
7/6/2012	3:25:59 PM	SiCl4 post valve closed
7/6/2012	3:25:59 PM	Bypass valve closed
7/6/2012	3:25:59 PM	Bubbler valve closed
7/6/2012	3:25:59 PM	Helium valve opened
7/6/2012	3:25:59 PM	Main Vac valve opened
7/6/2012	3:25:59 PM	Helium MFC set to  20.000000
7/6/2012	3:25:59 PM	H2 MFC set to  0.000000
7/6/2012	3:25:59 PM	BCl3 MFC set to  0.000000
7/6/2012	3:25:59 PM	PH3 MFC set to  0.000000
7/6/2012	3:25:59 PM	SiCl4 MFC set to  0.000000
7/6/2012	3:25:59 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	3:26:00 PM	Tube furnace set to 0
7/6/2012	3:26:30 PM	Helium valve closed
7/6/2012	3:26:30 PM	H2 valve closed
7/6/2012	3:26:30 PM	BCl3 valve closed
7/6/2012	3:26:30 PM	PH3 valve closed
7/6/2012	3:26:30 PM	SiCl4 pre valve closed
7/6/2012	3:26:30 PM	SiCl4 post valve closed
7/6/2012	3:26:30 PM	Bypass valve closed
7/6/2012	3:26:30 PM	Bubbler valve closed
7/6/2012	3:26:30 PM	Main Vac valve opened
7/6/2012	3:26:30 PM	Helium MFC set to  0.000000
7/6/2012	3:26:30 PM	H2 MFC set to  0.000000
7/6/2012	3:26:30 PM	BCl3 MFC set to  0.000000
7/6/2012	3:26:30 PM	PH3 MFC set to  0.000000
7/6/2012	3:26:30 PM	SiCl4 MFC set to  0.000000
7/6/2012	3:26:30 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	3:26:30 PM	Tube furnace set to 0
7/6/2012	3:27:00 PM	H2 valve closed
7/6/2012	3:27:00 PM	BCl3 valve closed
7/6/2012	3:27:00 PM	PH3 valve closed
7/6/2012	3:27:00 PM	SiCl4 pre valve closed
7/6/2012	3:27:00 PM	SiCl4 post valve closed
7/6/2012	3:27:00 PM	Bypass valve closed
7/6/2012	3:27:00 PM	Bubbler valve closed
7/6/2012	3:27:00 PM	Helium valve opened
7/6/2012	3:27:00 PM	Main Vac valve opened
7/6/2012	3:27:00 PM	Helium MFC set to  20.000000
7/6/2012	3:27:00 PM	H2 MFC set to  0.000000
7/6/2012	3:27:00 PM	BCl3 MFC set to  0.000000
7/6/2012	3:27:00 PM	PH3 MFC set to  0.000000
7/6/2012	3:27:00 PM	SiCl4 MFC set to  0.000000
7/6/2012	3:27:00 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	3:27:00 PM	Tube furnace set to 0
7/6/2012	3:27:30 PM	Helium valve closed
7/6/2012	3:27:30 PM	H2 valve closed
7/6/2012	3:27:30 PM	BCl3 valve closed
7/6/2012	3:27:30 PM	PH3 valve closed
7/6/2012	3:27:30 PM	SiCl4 pre valve closed
7/6/2012	3:27:30 PM	SiCl4 post valve closed
7/6/2012	3:27:30 PM	Bypass valve closed
7/6/2012	3:27:30 PM	Bubbler valve closed
7/6/2012	3:27:30 PM	Main Vac valve opened
7/6/2012	3:27:30 PM	Helium MFC set to  0.000000
7/6/2012	3:27:30 PM	H2 MFC set to  0.000000
7/6/2012	3:27:30 PM	BCl3 MFC set to  0.000000
7/6/2012	3:27:30 PM	PH3 MFC set to  0.000000
7/6/2012	3:27:30 PM	SiCl4 MFC set to  0.000000
7/6/2012	3:27:30 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	3:27:30 PM	Tube furnace set to 0
7/6/2012	3:28:00 PM	H2 valve closed
7/6/2012	3:28:00 PM	BCl3 valve closed
7/6/2012	3:28:00 PM	PH3 valve closed
7/6/2012	3:28:00 PM	SiCl4 pre valve closed
7/6/2012	3:28:00 PM	SiCl4 post valve closed
7/6/2012	3:28:00 PM	Bypass valve closed
7/6/2012	3:28:00 PM	Bubbler valve closed
7/6/2012	3:28:00 PM	Helium valve opened
7/6/2012	3:28:00 PM	Main Vac valve opened
7/6/2012	3:28:00 PM	Helium MFC set to  20.000000
7/6/2012	3:28:00 PM	H2 MFC set to  0.000000
7/6/2012	3:28:00 PM	BCl3 MFC set to  0.000000
7/6/2012	3:28:00 PM	PH3 MFC set to  0.000000
7/6/2012	3:28:00 PM	SiCl4 MFC set to  0.000000
7/6/2012	3:28:00 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	3:28:01 PM	Tube furnace set to 0
7/6/2012	3:28:31 PM	Helium valve closed
7/6/2012	3:28:31 PM	H2 valve closed
7/6/2012	3:28:31 PM	BCl3 valve closed
7/6/2012	3:28:31 PM	PH3 valve closed
7/6/2012	3:28:31 PM	SiCl4 pre valve closed
7/6/2012	3:28:31 PM	SiCl4 post valve closed
7/6/2012	3:28:31 PM	Bypass valve closed
7/6/2012	3:28:31 PM	Bubbler valve closed
7/6/2012	3:28:31 PM	Main Vac valve opened
7/6/2012	3:28:31 PM	Helium MFC set to  0.000000
7/6/2012	3:28:31 PM	H2 MFC set to  0.000000
7/6/2012	3:28:31 PM	BCl3 MFC set to  0.000000
7/6/2012	3:28:31 PM	PH3 MFC set to  0.000000
7/6/2012	3:28:31 PM	SiCl4 MFC set to  0.000000
7/6/2012	3:28:31 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	3:28:31 PM	Tube furnace set to 0
7/6/2012	3:29:01 PM	H2 valve closed
7/6/2012	3:29:01 PM	BCl3 valve closed
7/6/2012	3:29:01 PM	PH3 valve closed
7/6/2012	3:29:01 PM	SiCl4 pre valve closed
7/6/2012	3:29:01 PM	SiCl4 post valve closed
7/6/2012	3:29:01 PM	Bypass valve closed
7/6/2012	3:29:01 PM	Bubbler valve closed
7/6/2012	3:29:01 PM	Helium valve opened
7/6/2012	3:29:01 PM	Main Vac valve opened
7/6/2012	3:29:01 PM	Helium MFC set to  20.000000
7/6/2012	3:29:01 PM	H2 MFC set to  0.000000
7/6/2012	3:29:01 PM	BCl3 MFC set to  0.000000
7/6/2012	3:29:01 PM	PH3 MFC set to  0.000000
7/6/2012	3:29:01 PM	SiCl4 MFC set to  0.000000
7/6/2012	3:29:01 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	3:29:01 PM	Tube furnace set to 0
7/6/2012	3:29:31 PM	Helium valve closed
7/6/2012	3:29:31 PM	H2 valve closed
7/6/2012	3:29:31 PM	BCl3 valve closed
7/6/2012	3:29:31 PM	PH3 valve closed
7/6/2012	3:29:31 PM	SiCl4 pre valve closed
7/6/2012	3:29:31 PM	SiCl4 post valve closed
7/6/2012	3:29:31 PM	Bypass valve closed
7/6/2012	3:29:31 PM	Bubbler valve closed
7/6/2012	3:29:31 PM	Main Vac valve opened
7/6/2012	3:29:31 PM	Helium MFC set to  0.000000
7/6/2012	3:29:31 PM	H2 MFC set to  0.000000
7/6/2012	3:29:31 PM	BCl3 MFC set to  0.000000
7/6/2012	3:29:31 PM	PH3 MFC set to  0.000000
7/6/2012	3:29:31 PM	SiCl4 MFC set to  0.000000
7/6/2012	3:29:31 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	3:29:31 PM	Tube furnace set to 0
7/6/2012	3:30:01 PM	H2 valve closed
7/6/2012	3:30:01 PM	BCl3 valve closed
7/6/2012	3:30:01 PM	PH3 valve closed
7/6/2012	3:30:01 PM	SiCl4 pre valve closed
7/6/2012	3:30:01 PM	SiCl4 post valve closed
7/6/2012	3:30:01 PM	Bypass valve closed
7/6/2012	3:30:01 PM	Bubbler valve closed
7/6/2012	3:30:01 PM	Helium valve opened
7/6/2012	3:30:01 PM	Main Vac valve opened
7/6/2012	3:30:01 PM	Helium MFC set to  20.000000
7/6/2012	3:30:01 PM	H2 MFC set to  0.000000
7/6/2012	3:30:01 PM	BCl3 MFC set to  0.000000
7/6/2012	3:30:01 PM	PH3 MFC set to  0.000000
7/6/2012	3:30:01 PM	SiCl4 MFC set to  0.000000
7/6/2012	3:30:01 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	3:30:02 PM	Tube furnace set to 0
7/6/2012	3:30:32 PM	Helium valve closed
7/6/2012	3:30:32 PM	H2 valve closed
7/6/2012	3:30:32 PM	BCl3 valve closed
7/6/2012	3:30:32 PM	PH3 valve closed
7/6/2012	3:30:32 PM	SiCl4 pre valve closed
7/6/2012	3:30:32 PM	SiCl4 post valve closed
7/6/2012	3:30:32 PM	Bypass valve closed
7/6/2012	3:30:32 PM	Bubbler valve closed
7/6/2012	3:30:32 PM	Main Vac valve opened
7/6/2012	3:30:32 PM	Helium MFC set to  0.000000
7/6/2012	3:30:32 PM	H2 MFC set to  0.000000
7/6/2012	3:30:32 PM	BCl3 MFC set to  0.000000
7/6/2012	3:30:32 PM	PH3 MFC set to  0.000000
7/6/2012	3:30:32 PM	SiCl4 MFC set to  0.000000
7/6/2012	3:30:32 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	3:30:32 PM	Tube furnace set to 0
7/6/2012	3:31:02 PM	H2 valve closed
7/6/2012	3:31:02 PM	BCl3 valve closed
7/6/2012	3:31:02 PM	PH3 valve closed
7/6/2012	3:31:02 PM	SiCl4 pre valve closed
7/6/2012	3:31:02 PM	SiCl4 post valve closed
7/6/2012	3:31:02 PM	Bypass valve closed
7/6/2012	3:31:02 PM	Bubbler valve closed
7/6/2012	3:31:02 PM	Helium valve opened
7/6/2012	3:31:02 PM	Main Vac valve opened
7/6/2012	3:31:02 PM	Helium MFC set to  20.000000
7/6/2012	3:31:02 PM	H2 MFC set to  0.000000
7/6/2012	3:31:02 PM	BCl3 MFC set to  0.000000
7/6/2012	3:31:02 PM	PH3 MFC set to  0.000000
7/6/2012	3:31:02 PM	SiCl4 MFC set to  0.000000
7/6/2012	3:31:02 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	3:31:02 PM	Tube furnace set to 0
7/6/2012	3:31:32 PM	Helium valve closed
7/6/2012	3:31:32 PM	H2 valve closed
7/6/2012	3:31:32 PM	BCl3 valve closed
7/6/2012	3:31:32 PM	PH3 valve closed
7/6/2012	3:31:32 PM	SiCl4 pre valve closed
7/6/2012	3:31:32 PM	SiCl4 post valve closed
7/6/2012	3:31:32 PM	Bypass valve closed
7/6/2012	3:31:32 PM	Bubbler valve closed
7/6/2012	3:31:32 PM	Main Vac valve opened
7/6/2012	3:31:32 PM	Helium MFC set to  0.000000
7/6/2012	3:31:32 PM	H2 MFC set to  0.000000
7/6/2012	3:31:32 PM	BCl3 MFC set to  0.000000
7/6/2012	3:31:32 PM	PH3 MFC set to  0.000000
7/6/2012	3:31:32 PM	SiCl4 MFC set to  0.000000
7/6/2012	3:31:32 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	3:31:32 PM	Tube furnace set to 0
7/6/2012	3:31:33 PM	Run finished at 3:31 PM
7/6/2012	3:31:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
7/6/2012	3:43:36 PM	Main Vac valve closed
7/6/2012	3:43:48 PM	Main Vac valve opened
7/6/2012	3:44:01 PM	Recipe started at 3:44 PM
7/6/2012	3:44:01 PM	Helium valve closed
7/6/2012	3:44:01 PM	H2 valve closed
7/6/2012	3:44:01 PM	BCl3 valve closed
7/6/2012	3:44:01 PM	PH3 valve closed
7/6/2012	3:44:01 PM	SiCl4 pre valve closed
7/6/2012	3:44:01 PM	SiCl4 post valve closed
7/6/2012	3:44:01 PM	Main Vac valve closed
7/6/2012	3:44:01 PM	Bypass valve closed
7/6/2012	3:44:01 PM	Bubbler valve closed
7/6/2012	3:44:01 PM	Helium MFC set to  0.000000
7/6/2012	3:44:01 PM	H2 MFC set to  0.000000
7/6/2012	3:44:01 PM	BCl3 MFC set to  0.000000
7/6/2012	3:44:01 PM	PH3 MFC set to  0.000000
7/6/2012	3:44:01 PM	SiCl4 MFC set to  0.000000
7/6/2012	3:44:01 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	3:44:01 PM	Tube furnace set to 0
7/6/2012	3:44:04 PM	Helium valve closed
7/6/2012	3:44:04 PM	BCl3 valve closed
7/6/2012	3:44:04 PM	PH3 valve closed
7/6/2012	3:44:04 PM	SiCl4 pre valve closed
7/6/2012	3:44:04 PM	SiCl4 post valve closed
7/6/2012	3:44:04 PM	Main Vac valve closed
7/6/2012	3:44:04 PM	Bypass valve closed
7/6/2012	3:44:04 PM	Bubbler valve closed
7/6/2012	3:44:04 PM	H2 valve opened
7/6/2012	3:44:04 PM	Helium MFC set to  0.000000
7/6/2012	3:44:04 PM	H2 MFC set to  500.000000
7/6/2012	3:44:04 PM	BCl3 MFC set to  0.000000
7/6/2012	3:44:04 PM	PH3 MFC set to  0.000000
7/6/2012	3:44:04 PM	SiCl4 MFC set to  0.000000
7/6/2012	3:44:04 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	3:44:05 PM	Tube furnace set to 0
7/6/2012	3:45:15 PM	Helium valve closed
7/6/2012	3:45:15 PM	BCl3 valve closed
7/6/2012	3:45:15 PM	PH3 valve closed
7/6/2012	3:45:15 PM	SiCl4 pre valve closed
7/6/2012	3:45:15 PM	SiCl4 post valve closed
7/6/2012	3:45:15 PM	Main Vac valve closed
7/6/2012	3:45:15 PM	Bypass valve closed
7/6/2012	3:45:15 PM	H2 valve opened
7/6/2012	3:45:15 PM	Bubbler valve opened
7/6/2012	3:45:15 PM	Helium MFC set to  0.000000
7/6/2012	3:45:15 PM	H2 MFC set to  500.000000
7/6/2012	3:45:15 PM	BCl3 MFC set to  0.000000
7/6/2012	3:45:15 PM	PH3 MFC set to  0.000000
7/6/2012	3:45:15 PM	SiCl4 MFC set to  0.000000
7/6/2012	3:45:15 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	3:45:15 PM	Tube furnace set to 0
7/6/2012	3:45:16 PM	Helium valve closed
7/6/2012	3:45:16 PM	BCl3 valve closed
7/6/2012	3:45:16 PM	PH3 valve closed
7/6/2012	3:45:16 PM	SiCl4 pre valve closed
7/6/2012	3:45:16 PM	SiCl4 post valve closed
7/6/2012	3:45:16 PM	Main Vac valve closed
7/6/2012	3:45:16 PM	Bypass valve closed
7/6/2012	3:45:16 PM	H2 valve opened
7/6/2012	3:45:16 PM	Bubbler valve opened
7/6/2012	3:45:16 PM	Helium MFC set to  0.000000
7/6/2012	3:45:16 PM	H2 MFC set to  500.000000
7/6/2012	3:45:16 PM	BCl3 MFC set to  0.000000
7/6/2012	3:45:16 PM	PH3 MFC set to  0.000000
7/6/2012	3:45:16 PM	SiCl4 MFC set to  0.000000
7/6/2012	3:45:16 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	3:45:17 PM	Tube furnace set to 1000
7/6/2012	4:15:16 PM	Helium valve closed
7/6/2012	4:15:16 PM	PH3 valve closed
7/6/2012	4:15:16 PM	Main Vac valve closed
7/6/2012	4:15:16 PM	Bypass valve closed
7/6/2012	4:15:16 PM	H2 valve opened
7/6/2012	4:15:17 PM	BCl3 valve opened
7/6/2012	4:15:17 PM	SiCl4 pre valve opened
7/6/2012	4:15:17 PM	SiCl4 post valve opened
7/6/2012	4:15:17 PM	Bubbler valve opened
7/6/2012	4:15:17 PM	Helium MFC set to  0.000000
7/6/2012	4:15:17 PM	H2 MFC set to  500.000000
7/6/2012	4:15:17 PM	BCl3 MFC set to  1.000000
7/6/2012	4:15:17 PM	PH3 MFC set to  0.000000
7/6/2012	4:15:17 PM	SiCl4 MFC set to  50.000000
7/6/2012	4:15:17 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	4:15:17 PM	Tube furnace set to 1000
7/6/2012	4:22:17 PM	Helium valve closed
7/6/2012	4:22:17 PM	BCl3 valve closed
7/6/2012	4:22:17 PM	PH3 valve closed
7/6/2012	4:22:17 PM	SiCl4 pre valve closed
7/6/2012	4:22:17 PM	SiCl4 post valve closed
7/6/2012	4:22:17 PM	Main Vac valve closed
7/6/2012	4:22:17 PM	Bypass valve closed
7/6/2012	4:22:17 PM	H2 valve opened
7/6/2012	4:22:17 PM	Bubbler valve opened
7/6/2012	4:22:17 PM	Helium MFC set to  0.000000
7/6/2012	4:22:17 PM	H2 MFC set to  500.000000
7/6/2012	4:22:17 PM	BCl3 MFC set to  0.000000
7/6/2012	4:22:17 PM	PH3 MFC set to  0.000000
7/6/2012	4:22:17 PM	SiCl4 MFC set to  0.000000
7/6/2012	4:22:17 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	4:22:17 PM	Tube furnace set to 750
7/6/2012	4:27:17 PM	H2 valve closed
7/6/2012	4:27:17 PM	BCl3 valve closed
7/6/2012	4:27:17 PM	PH3 valve closed
7/6/2012	4:27:17 PM	SiCl4 pre valve closed
7/6/2012	4:27:17 PM	SiCl4 post valve closed
7/6/2012	4:27:17 PM	Main Vac valve closed
7/6/2012	4:27:17 PM	Bypass valve closed
7/6/2012	4:27:17 PM	Helium valve opened
7/6/2012	4:27:17 PM	Bubbler valve opened
7/6/2012	4:27:17 PM	Helium MFC set to  500.000000
7/6/2012	4:27:17 PM	H2 MFC set to  0.000000
7/6/2012	4:27:17 PM	BCl3 MFC set to  0.000000
7/6/2012	4:27:17 PM	PH3 MFC set to  0.000000
7/6/2012	4:27:17 PM	SiCl4 MFC set to  0.000000
7/6/2012	4:27:17 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	4:27:17 PM	Tube furnace set to 0
7/6/2012	4:42:14 PM	Helium valve closed
7/6/2012	4:42:14 PM	H2 valve closed
7/6/2012	4:42:14 PM	BCl3 valve closed
7/6/2012	4:42:14 PM	PH3 valve closed
7/6/2012	4:42:14 PM	SiCl4 pre valve closed
7/6/2012	4:42:14 PM	SiCl4 post valve closed
7/6/2012	4:42:14 PM	Main Vac valve closed
7/6/2012	4:42:14 PM	Bypass valve closed
7/6/2012	4:42:14 PM	Bubbler valve closed
7/6/2012	4:42:14 PM	Helium MFC set to  0.000000
7/6/2012	4:42:14 PM	H2 MFC set to  0.000000
7/6/2012	4:42:14 PM	BCl3 MFC set to  0.000000
7/6/2012	4:42:14 PM	PH3 MFC set to  0.000000
7/6/2012	4:42:14 PM	SiCl4 MFC set to  0.000000
7/6/2012	4:42:14 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	4:42:14 PM	Tube furnace set to 0
7/6/2012	4:42:15 PM	Run finished at 4:42 PM
7/6/2012	4:48:30 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/6/2012	4:48:31 PM	Recipe started at 4:48 PM
7/6/2012	4:48:31 PM	Helium valve closed
7/6/2012	4:48:31 PM	H2 valve closed
7/6/2012	4:48:31 PM	BCl3 valve closed
7/6/2012	4:48:31 PM	PH3 valve closed
7/6/2012	4:48:31 PM	SiCl4 pre valve closed
7/6/2012	4:48:31 PM	SiCl4 post valve closed
7/6/2012	4:48:31 PM	Main Vac valve closed
7/6/2012	4:48:31 PM	Bubbler valve closed
7/6/2012	4:48:31 PM	Bypass valve opened
7/6/2012	4:48:31 PM	Helium MFC set to  0.000000
7/6/2012	4:48:31 PM	H2 MFC set to  0.000000
7/6/2012	4:48:31 PM	BCl3 MFC set to  0.000000
7/6/2012	4:48:31 PM	PH3 MFC set to  0.000000
7/6/2012	4:48:31 PM	SiCl4 MFC set to  0.000000
7/6/2012	4:48:31 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	4:48:31 PM	Tube furnace set to 0
7/6/2012	4:49:43 PM	Helium valve closed
7/6/2012	4:49:43 PM	H2 valve closed
7/6/2012	4:49:43 PM	BCl3 valve closed
7/6/2012	4:49:43 PM	PH3 valve closed
7/6/2012	4:49:43 PM	SiCl4 pre valve closed
7/6/2012	4:49:43 PM	SiCl4 post valve closed
7/6/2012	4:49:43 PM	Main Vac valve closed
7/6/2012	4:49:43 PM	Bubbler valve closed
7/6/2012	4:49:43 PM	Bypass valve opened
7/6/2012	4:49:43 PM	Helium MFC set to  0.000000
7/6/2012	4:49:43 PM	H2 MFC set to  0.000000
7/6/2012	4:49:43 PM	BCl3 MFC set to  0.000000
7/6/2012	4:49:43 PM	PH3 MFC set to  0.000000
7/6/2012	4:49:43 PM	SiCl4 MFC set to  0.000000
7/6/2012	4:49:43 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	4:49:44 PM	Tube furnace set to 0
7/6/2012	4:49:55 PM	Helium valve closed
7/6/2012	4:49:55 PM	H2 valve closed
7/6/2012	4:49:55 PM	BCl3 valve closed
7/6/2012	4:49:55 PM	PH3 valve closed
7/6/2012	4:49:55 PM	SiCl4 pre valve closed
7/6/2012	4:49:55 PM	SiCl4 post valve closed
7/6/2012	4:49:55 PM	Bypass valve closed
7/6/2012	4:49:55 PM	Bubbler valve closed
7/6/2012	4:49:55 PM	Main Vac valve opened
7/6/2012	4:49:55 PM	Helium MFC set to  0.000000
7/6/2012	4:49:55 PM	H2 MFC set to  0.000000
7/6/2012	4:49:55 PM	BCl3 MFC set to  0.000000
7/6/2012	4:49:55 PM	PH3 MFC set to  0.000000
7/6/2012	4:49:55 PM	SiCl4 MFC set to  0.000000
7/6/2012	4:49:55 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	4:49:55 PM	Tube furnace set to 0
7/6/2012	4:49:57 PM	Run finished at 4:49 PM
7/6/2012	4:49:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/6/2012	4:50:24 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
7/6/2012	4:50:37 PM	Recipe started at 4:50 PM
7/6/2012	4:50:37 PM	Helium valve closed
7/6/2012	4:50:37 PM	H2 valve closed
7/6/2012	4:50:37 PM	BCl3 valve closed
7/6/2012	4:50:37 PM	PH3 valve closed
7/6/2012	4:50:37 PM	SiCl4 pre valve closed
7/6/2012	4:50:37 PM	SiCl4 post valve closed
7/6/2012	4:50:37 PM	Main Vac valve closed
7/6/2012	4:50:37 PM	Bubbler valve closed
7/6/2012	4:50:37 PM	Bypass valve opened
7/6/2012	4:50:37 PM	Helium MFC set to  0.000000
7/6/2012	4:50:37 PM	H2 MFC set to  0.000000
7/6/2012	4:50:37 PM	BCl3 MFC set to  0.000000
7/6/2012	4:50:37 PM	PH3 MFC set to  0.000000
7/6/2012	4:50:37 PM	SiCl4 MFC set to  0.000000
7/6/2012	4:50:37 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	4:50:37 PM	Tube furnace set to 0
7/6/2012	4:50:38 PM	Helium valve closed
7/6/2012	4:50:38 PM	H2 valve closed
7/6/2012	4:50:38 PM	BCl3 valve closed
7/6/2012	4:50:38 PM	PH3 valve closed
7/6/2012	4:50:38 PM	SiCl4 pre valve closed
7/6/2012	4:50:38 PM	SiCl4 post valve closed
7/6/2012	4:50:38 PM	Main Vac valve closed
7/6/2012	4:50:38 PM	Bubbler valve closed
7/6/2012	4:50:38 PM	Bypass valve opened
7/6/2012	4:50:38 PM	Helium MFC set to  0.000000
7/6/2012	4:50:38 PM	H2 MFC set to  0.000000
7/6/2012	4:50:38 PM	BCl3 MFC set to  0.000000
7/6/2012	4:50:38 PM	PH3 MFC set to  0.000000
7/6/2012	4:50:38 PM	SiCl4 MFC set to  0.000000
7/6/2012	4:50:38 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	4:50:38 PM	Tube furnace set to 0
7/6/2012	4:50:38 PM	Helium valve closed
7/6/2012	4:50:38 PM	H2 valve closed
7/6/2012	4:50:38 PM	BCl3 valve closed
7/6/2012	4:50:38 PM	PH3 valve closed
7/6/2012	4:50:38 PM	SiCl4 pre valve closed
7/6/2012	4:50:38 PM	SiCl4 post valve closed
7/6/2012	4:50:38 PM	Bypass valve closed
7/6/2012	4:50:38 PM	Bubbler valve closed
7/6/2012	4:50:38 PM	Main Vac valve opened
7/6/2012	4:50:38 PM	Helium MFC set to  0.000000
7/6/2012	4:50:38 PM	H2 MFC set to  0.000000
7/6/2012	4:50:38 PM	BCl3 MFC set to  0.000000
7/6/2012	4:50:38 PM	PH3 MFC set to  0.000000
7/6/2012	4:50:38 PM	SiCl4 MFC set to  0.000000
7/6/2012	4:50:38 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	4:50:38 PM	Tube furnace set to 0
7/6/2012	4:51:08 PM	H2 valve closed
7/6/2012	4:51:08 PM	BCl3 valve closed
7/6/2012	4:51:08 PM	PH3 valve closed
7/6/2012	4:51:08 PM	SiCl4 pre valve closed
7/6/2012	4:51:08 PM	SiCl4 post valve closed
7/6/2012	4:51:08 PM	Bypass valve closed
7/6/2012	4:51:08 PM	Bubbler valve closed
7/6/2012	4:51:08 PM	Helium valve opened
7/6/2012	4:51:08 PM	Main Vac valve opened
7/6/2012	4:51:08 PM	Helium MFC set to  20.000000
7/6/2012	4:51:08 PM	H2 MFC set to  0.000000
7/6/2012	4:51:08 PM	BCl3 MFC set to  0.000000
7/6/2012	4:51:08 PM	PH3 MFC set to  0.000000
7/6/2012	4:51:08 PM	SiCl4 MFC set to  0.000000
7/6/2012	4:51:08 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	4:51:08 PM	Tube furnace set to 0
7/6/2012	4:51:38 PM	Helium valve closed
7/6/2012	4:51:38 PM	H2 valve closed
7/6/2012	4:51:38 PM	BCl3 valve closed
7/6/2012	4:51:39 PM	PH3 valve closed
7/6/2012	4:51:39 PM	SiCl4 pre valve closed
7/6/2012	4:51:39 PM	SiCl4 post valve closed
7/6/2012	4:51:39 PM	Bypass valve closed
7/6/2012	4:51:39 PM	Bubbler valve closed
7/6/2012	4:51:39 PM	Main Vac valve opened
7/6/2012	4:51:39 PM	Helium MFC set to  0.000000
7/6/2012	4:51:39 PM	H2 MFC set to  0.000000
7/6/2012	4:51:39 PM	BCl3 MFC set to  0.000000
7/6/2012	4:51:39 PM	PH3 MFC set to  0.000000
7/6/2012	4:51:39 PM	SiCl4 MFC set to  0.000000
7/6/2012	4:51:39 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	4:51:39 PM	Tube furnace set to 0
7/6/2012	4:52:09 PM	H2 valve closed
7/6/2012	4:52:09 PM	BCl3 valve closed
7/6/2012	4:52:09 PM	PH3 valve closed
7/6/2012	4:52:09 PM	SiCl4 pre valve closed
7/6/2012	4:52:09 PM	SiCl4 post valve closed
7/6/2012	4:52:09 PM	Bypass valve closed
7/6/2012	4:52:09 PM	Bubbler valve closed
7/6/2012	4:52:09 PM	Helium valve opened
7/6/2012	4:52:09 PM	Main Vac valve opened
7/6/2012	4:52:09 PM	Helium MFC set to  20.000000
7/6/2012	4:52:09 PM	H2 MFC set to  0.000000
7/6/2012	4:52:09 PM	BCl3 MFC set to  0.000000
7/6/2012	4:52:09 PM	PH3 MFC set to  0.000000
7/6/2012	4:52:09 PM	SiCl4 MFC set to  0.000000
7/6/2012	4:52:09 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	4:52:09 PM	Tube furnace set to 0
7/6/2012	4:52:39 PM	Helium valve closed
7/6/2012	4:52:39 PM	H2 valve closed
7/6/2012	4:52:39 PM	BCl3 valve closed
7/6/2012	4:52:39 PM	PH3 valve closed
7/6/2012	4:52:39 PM	SiCl4 pre valve closed
7/6/2012	4:52:39 PM	SiCl4 post valve closed
7/6/2012	4:52:39 PM	Bypass valve closed
7/6/2012	4:52:39 PM	Bubbler valve closed
7/6/2012	4:52:39 PM	Main Vac valve opened
7/6/2012	4:52:39 PM	Helium MFC set to  0.000000
7/6/2012	4:52:39 PM	H2 MFC set to  0.000000
7/6/2012	4:52:39 PM	BCl3 MFC set to  0.000000
7/6/2012	4:52:39 PM	PH3 MFC set to  0.000000
7/6/2012	4:52:39 PM	SiCl4 MFC set to  0.000000
7/6/2012	4:52:39 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	4:52:39 PM	Tube furnace set to 0
7/6/2012	4:53:09 PM	H2 valve closed
7/6/2012	4:53:09 PM	BCl3 valve closed
7/6/2012	4:53:09 PM	PH3 valve closed
7/6/2012	4:53:09 PM	SiCl4 pre valve closed
7/6/2012	4:53:09 PM	SiCl4 post valve closed
7/6/2012	4:53:09 PM	Bypass valve closed
7/6/2012	4:53:09 PM	Bubbler valve closed
7/6/2012	4:53:09 PM	Helium valve opened
7/6/2012	4:53:09 PM	Main Vac valve opened
7/6/2012	4:53:09 PM	Helium MFC set to  20.000000
7/6/2012	4:53:09 PM	H2 MFC set to  0.000000
7/6/2012	4:53:09 PM	BCl3 MFC set to  0.000000
7/6/2012	4:53:09 PM	PH3 MFC set to  0.000000
7/6/2012	4:53:09 PM	SiCl4 MFC set to  0.000000
7/6/2012	4:53:09 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	4:53:09 PM	Tube furnace set to 0
7/6/2012	4:53:39 PM	Helium valve closed
7/6/2012	4:53:39 PM	H2 valve closed
7/6/2012	4:53:39 PM	BCl3 valve closed
7/6/2012	4:53:39 PM	PH3 valve closed
7/6/2012	4:53:39 PM	SiCl4 pre valve closed
7/6/2012	4:53:39 PM	SiCl4 post valve closed
7/6/2012	4:53:39 PM	Bypass valve closed
7/6/2012	4:53:39 PM	Bubbler valve closed
7/6/2012	4:53:39 PM	Main Vac valve opened
7/6/2012	4:53:39 PM	Helium MFC set to  0.000000
7/6/2012	4:53:39 PM	H2 MFC set to  0.000000
7/6/2012	4:53:39 PM	BCl3 MFC set to  0.000000
7/6/2012	4:53:39 PM	PH3 MFC set to  0.000000
7/6/2012	4:53:39 PM	SiCl4 MFC set to  0.000000
7/6/2012	4:53:39 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	4:53:40 PM	Tube furnace set to 0
7/6/2012	4:54:10 PM	H2 valve closed
7/6/2012	4:54:10 PM	BCl3 valve closed
7/6/2012	4:54:10 PM	PH3 valve closed
7/6/2012	4:54:10 PM	SiCl4 pre valve closed
7/6/2012	4:54:10 PM	SiCl4 post valve closed
7/6/2012	4:54:10 PM	Bypass valve closed
7/6/2012	4:54:10 PM	Bubbler valve closed
7/6/2012	4:54:10 PM	Helium valve opened
7/6/2012	4:54:10 PM	Main Vac valve opened
7/6/2012	4:54:10 PM	Helium MFC set to  20.000000
7/6/2012	4:54:10 PM	H2 MFC set to  0.000000
7/6/2012	4:54:10 PM	BCl3 MFC set to  0.000000
7/6/2012	4:54:10 PM	PH3 MFC set to  0.000000
7/6/2012	4:54:10 PM	SiCl4 MFC set to  0.000000
7/6/2012	4:54:10 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	4:54:10 PM	Tube furnace set to 0
7/6/2012	4:54:40 PM	Helium valve closed
7/6/2012	4:54:40 PM	H2 valve closed
7/6/2012	4:54:40 PM	BCl3 valve closed
7/6/2012	4:54:40 PM	PH3 valve closed
7/6/2012	4:54:40 PM	SiCl4 pre valve closed
7/6/2012	4:54:40 PM	SiCl4 post valve closed
7/6/2012	4:54:40 PM	Bypass valve closed
7/6/2012	4:54:40 PM	Bubbler valve closed
7/6/2012	4:54:40 PM	Main Vac valve opened
7/6/2012	4:54:40 PM	Helium MFC set to  0.000000
7/6/2012	4:54:40 PM	H2 MFC set to  0.000000
7/6/2012	4:54:40 PM	BCl3 MFC set to  0.000000
7/6/2012	4:54:40 PM	PH3 MFC set to  0.000000
7/6/2012	4:54:40 PM	SiCl4 MFC set to  0.000000
7/6/2012	4:54:40 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	4:54:40 PM	Tube furnace set to 0
7/6/2012	4:55:10 PM	H2 valve closed
7/6/2012	4:55:10 PM	BCl3 valve closed
7/6/2012	4:55:10 PM	PH3 valve closed
7/6/2012	4:55:10 PM	SiCl4 pre valve closed
7/6/2012	4:55:10 PM	SiCl4 post valve closed
7/6/2012	4:55:10 PM	Bypass valve closed
7/6/2012	4:55:10 PM	Bubbler valve closed
7/6/2012	4:55:10 PM	Helium valve opened
7/6/2012	4:55:10 PM	Main Vac valve opened
7/6/2012	4:55:10 PM	Helium MFC set to  20.000000
7/6/2012	4:55:10 PM	H2 MFC set to  0.000000
7/6/2012	4:55:10 PM	BCl3 MFC set to  0.000000
7/6/2012	4:55:10 PM	PH3 MFC set to  0.000000
7/6/2012	4:55:10 PM	SiCl4 MFC set to  0.000000
7/6/2012	4:55:10 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	4:55:10 PM	Tube furnace set to 0
7/6/2012	4:55:40 PM	Helium valve closed
7/6/2012	4:55:40 PM	H2 valve closed
7/6/2012	4:55:40 PM	BCl3 valve closed
7/6/2012	4:55:40 PM	PH3 valve closed
7/6/2012	4:55:40 PM	SiCl4 pre valve closed
7/6/2012	4:55:40 PM	SiCl4 post valve closed
7/6/2012	4:55:40 PM	Bypass valve closed
7/6/2012	4:55:40 PM	Bubbler valve closed
7/6/2012	4:55:40 PM	Main Vac valve opened
7/6/2012	4:55:40 PM	Helium MFC set to  0.000000
7/6/2012	4:55:40 PM	H2 MFC set to  0.000000
7/6/2012	4:55:40 PM	BCl3 MFC set to  0.000000
7/6/2012	4:55:40 PM	PH3 MFC set to  0.000000
7/6/2012	4:55:40 PM	SiCl4 MFC set to  0.000000
7/6/2012	4:55:40 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	4:55:41 PM	Tube furnace set to 0
7/6/2012	4:56:11 PM	H2 valve closed
7/6/2012	4:56:11 PM	BCl3 valve closed
7/6/2012	4:56:11 PM	PH3 valve closed
7/6/2012	4:56:11 PM	SiCl4 pre valve closed
7/6/2012	4:56:11 PM	SiCl4 post valve closed
7/6/2012	4:56:11 PM	Bypass valve closed
7/6/2012	4:56:11 PM	Bubbler valve closed
7/6/2012	4:56:11 PM	Helium valve opened
7/6/2012	4:56:11 PM	Main Vac valve opened
7/6/2012	4:56:11 PM	Helium MFC set to  20.000000
7/6/2012	4:56:11 PM	H2 MFC set to  0.000000
7/6/2012	4:56:11 PM	BCl3 MFC set to  0.000000
7/6/2012	4:56:11 PM	PH3 MFC set to  0.000000
7/6/2012	4:56:11 PM	SiCl4 MFC set to  0.000000
7/6/2012	4:56:11 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	4:56:11 PM	Tube furnace set to 0
7/6/2012	4:56:41 PM	Helium valve closed
7/6/2012	4:56:41 PM	H2 valve closed
7/6/2012	4:56:41 PM	BCl3 valve closed
7/6/2012	4:56:41 PM	PH3 valve closed
7/6/2012	4:56:41 PM	SiCl4 pre valve closed
7/6/2012	4:56:41 PM	SiCl4 post valve closed
7/6/2012	4:56:41 PM	Bypass valve closed
7/6/2012	4:56:41 PM	Bubbler valve closed
7/6/2012	4:56:41 PM	Main Vac valve opened
7/6/2012	4:56:41 PM	Helium MFC set to  0.000000
7/6/2012	4:56:41 PM	H2 MFC set to  0.000000
7/6/2012	4:56:41 PM	BCl3 MFC set to  0.000000
7/6/2012	4:56:41 PM	PH3 MFC set to  0.000000
7/6/2012	4:56:41 PM	SiCl4 MFC set to  0.000000
7/6/2012	4:56:41 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	4:56:41 PM	Tube furnace set to 0
7/6/2012	4:57:11 PM	H2 valve closed
7/6/2012	4:57:11 PM	BCl3 valve closed
7/6/2012	4:57:11 PM	PH3 valve closed
7/6/2012	4:57:11 PM	SiCl4 pre valve closed
7/6/2012	4:57:11 PM	SiCl4 post valve closed
7/6/2012	4:57:11 PM	Bypass valve closed
7/6/2012	4:57:11 PM	Bubbler valve closed
7/6/2012	4:57:11 PM	Helium valve opened
7/6/2012	4:57:11 PM	Main Vac valve opened
7/6/2012	4:57:11 PM	Helium MFC set to  20.000000
7/6/2012	4:57:11 PM	H2 MFC set to  0.000000
7/6/2012	4:57:11 PM	BCl3 MFC set to  0.000000
7/6/2012	4:57:11 PM	PH3 MFC set to  0.000000
7/6/2012	4:57:11 PM	SiCl4 MFC set to  0.000000
7/6/2012	4:57:11 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	4:57:11 PM	Tube furnace set to 0
7/6/2012	4:57:41 PM	Helium valve closed
7/6/2012	4:57:41 PM	H2 valve closed
7/6/2012	4:57:41 PM	BCl3 valve closed
7/6/2012	4:57:41 PM	PH3 valve closed
7/6/2012	4:57:41 PM	SiCl4 pre valve closed
7/6/2012	4:57:41 PM	SiCl4 post valve closed
7/6/2012	4:57:41 PM	Bypass valve closed
7/6/2012	4:57:41 PM	Bubbler valve closed
7/6/2012	4:57:41 PM	Main Vac valve opened
7/6/2012	4:57:41 PM	Helium MFC set to  0.000000
7/6/2012	4:57:41 PM	H2 MFC set to  0.000000
7/6/2012	4:57:41 PM	BCl3 MFC set to  0.000000
7/6/2012	4:57:41 PM	PH3 MFC set to  0.000000
7/6/2012	4:57:41 PM	SiCl4 MFC set to  0.000000
7/6/2012	4:57:41 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	4:57:42 PM	Tube furnace set to 0
7/6/2012	4:58:12 PM	H2 valve closed
7/6/2012	4:58:12 PM	BCl3 valve closed
7/6/2012	4:58:12 PM	PH3 valve closed
7/6/2012	4:58:12 PM	SiCl4 pre valve closed
7/6/2012	4:58:12 PM	SiCl4 post valve closed
7/6/2012	4:58:12 PM	Bypass valve closed
7/6/2012	4:58:12 PM	Bubbler valve closed
7/6/2012	4:58:12 PM	Helium valve opened
7/6/2012	4:58:12 PM	Main Vac valve opened
7/6/2012	4:58:12 PM	Helium MFC set to  20.000000
7/6/2012	4:58:12 PM	H2 MFC set to  0.000000
7/6/2012	4:58:12 PM	BCl3 MFC set to  0.000000
7/6/2012	4:58:12 PM	PH3 MFC set to  0.000000
7/6/2012	4:58:12 PM	SiCl4 MFC set to  0.000000
7/6/2012	4:58:12 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	4:58:12 PM	Tube furnace set to 0
7/6/2012	4:58:42 PM	Helium valve closed
7/6/2012	4:58:42 PM	H2 valve closed
7/6/2012	4:58:42 PM	BCl3 valve closed
7/6/2012	4:58:42 PM	PH3 valve closed
7/6/2012	4:58:42 PM	SiCl4 pre valve closed
7/6/2012	4:58:42 PM	SiCl4 post valve closed
7/6/2012	4:58:42 PM	Bypass valve closed
7/6/2012	4:58:42 PM	Bubbler valve closed
7/6/2012	4:58:42 PM	Main Vac valve opened
7/6/2012	4:58:42 PM	Helium MFC set to  0.000000
7/6/2012	4:58:42 PM	H2 MFC set to  0.000000
7/6/2012	4:58:42 PM	BCl3 MFC set to  0.000000
7/6/2012	4:58:42 PM	PH3 MFC set to  0.000000
7/6/2012	4:58:42 PM	SiCl4 MFC set to  0.000000
7/6/2012	4:58:42 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	4:58:42 PM	Tube furnace set to 0
7/6/2012	4:59:12 PM	H2 valve closed
7/6/2012	4:59:12 PM	BCl3 valve closed
7/6/2012	4:59:12 PM	PH3 valve closed
7/6/2012	4:59:12 PM	SiCl4 pre valve closed
7/6/2012	4:59:12 PM	SiCl4 post valve closed
7/6/2012	4:59:12 PM	Bypass valve closed
7/6/2012	4:59:12 PM	Bubbler valve closed
7/6/2012	4:59:12 PM	Helium valve opened
7/6/2012	4:59:12 PM	Main Vac valve opened
7/6/2012	4:59:12 PM	Helium MFC set to  20.000000
7/6/2012	4:59:12 PM	H2 MFC set to  0.000000
7/6/2012	4:59:12 PM	BCl3 MFC set to  0.000000
7/6/2012	4:59:12 PM	PH3 MFC set to  0.000000
7/6/2012	4:59:12 PM	SiCl4 MFC set to  0.000000
7/6/2012	4:59:12 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	4:59:12 PM	Tube furnace set to 0
7/6/2012	4:59:42 PM	Helium valve closed
7/6/2012	4:59:42 PM	H2 valve closed
7/6/2012	4:59:42 PM	BCl3 valve closed
7/6/2012	4:59:42 PM	PH3 valve closed
7/6/2012	4:59:42 PM	SiCl4 pre valve closed
7/6/2012	4:59:42 PM	SiCl4 post valve closed
7/6/2012	4:59:42 PM	Bypass valve closed
7/6/2012	4:59:42 PM	Bubbler valve closed
7/6/2012	4:59:42 PM	Main Vac valve opened
7/6/2012	4:59:42 PM	Helium MFC set to  0.000000
7/6/2012	4:59:42 PM	H2 MFC set to  0.000000
7/6/2012	4:59:42 PM	BCl3 MFC set to  0.000000
7/6/2012	4:59:42 PM	PH3 MFC set to  0.000000
7/6/2012	4:59:42 PM	SiCl4 MFC set to  0.000000
7/6/2012	4:59:42 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	4:59:42 PM	Tube furnace set to 0
7/6/2012	5:00:12 PM	H2 valve closed
7/6/2012	5:00:12 PM	BCl3 valve closed
7/6/2012	5:00:13 PM	PH3 valve closed
7/6/2012	5:00:13 PM	SiCl4 pre valve closed
7/6/2012	5:00:13 PM	SiCl4 post valve closed
7/6/2012	5:00:13 PM	Bypass valve closed
7/6/2012	5:00:13 PM	Bubbler valve closed
7/6/2012	5:00:13 PM	Helium valve opened
7/6/2012	5:00:13 PM	Main Vac valve opened
7/6/2012	5:00:13 PM	Helium MFC set to  20.000000
7/6/2012	5:00:13 PM	H2 MFC set to  0.000000
7/6/2012	5:00:13 PM	BCl3 MFC set to  0.000000
7/6/2012	5:00:13 PM	PH3 MFC set to  0.000000
7/6/2012	5:00:13 PM	SiCl4 MFC set to  0.000000
7/6/2012	5:00:13 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	5:00:13 PM	Tube furnace set to 0
7/6/2012	5:00:43 PM	Helium valve closed
7/6/2012	5:00:43 PM	H2 valve closed
7/6/2012	5:00:43 PM	BCl3 valve closed
7/6/2012	5:00:43 PM	PH3 valve closed
7/6/2012	5:00:43 PM	SiCl4 pre valve closed
7/6/2012	5:00:43 PM	SiCl4 post valve closed
7/6/2012	5:00:43 PM	Bypass valve closed
7/6/2012	5:00:43 PM	Bubbler valve closed
7/6/2012	5:00:43 PM	Main Vac valve opened
7/6/2012	5:00:43 PM	Helium MFC set to  0.000000
7/6/2012	5:00:43 PM	H2 MFC set to  0.000000
7/6/2012	5:00:43 PM	BCl3 MFC set to  0.000000
7/6/2012	5:00:43 PM	PH3 MFC set to  0.000000
7/6/2012	5:00:43 PM	SiCl4 MFC set to  0.000000
7/6/2012	5:00:43 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	5:00:43 PM	Tube furnace set to 0
7/6/2012	5:00:44 PM	Run finished at 5:00 PM
7/6/2012	5:00:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
7/6/2012	5:15:21 PM	Main Vac valve closed
7/6/2012	5:15:33 PM	Main Vac valve opened
7/6/2012	5:16:15 PM	Recipe started at 5:16 PM
7/6/2012	5:16:15 PM	Helium valve closed
7/6/2012	5:16:15 PM	H2 valve closed
7/6/2012	5:16:15 PM	BCl3 valve closed
7/6/2012	5:16:15 PM	PH3 valve closed
7/6/2012	5:16:15 PM	SiCl4 pre valve closed
7/6/2012	5:16:15 PM	SiCl4 post valve closed
7/6/2012	5:16:15 PM	Main Vac valve closed
7/6/2012	5:16:15 PM	Bypass valve closed
7/6/2012	5:16:15 PM	Bubbler valve closed
7/6/2012	5:16:15 PM	Helium MFC set to  0.000000
7/6/2012	5:16:15 PM	H2 MFC set to  0.000000
7/6/2012	5:16:15 PM	BCl3 MFC set to  0.000000
7/6/2012	5:16:15 PM	PH3 MFC set to  0.000000
7/6/2012	5:16:15 PM	SiCl4 MFC set to  0.000000
7/6/2012	5:16:15 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	5:16:15 PM	Tube furnace set to 0
7/6/2012	5:16:18 PM	Helium valve closed
7/6/2012	5:16:18 PM	BCl3 valve closed
7/6/2012	5:16:18 PM	PH3 valve closed
7/6/2012	5:16:18 PM	SiCl4 pre valve closed
7/6/2012	5:16:18 PM	SiCl4 post valve closed
7/6/2012	5:16:18 PM	Main Vac valve closed
7/6/2012	5:16:18 PM	Bypass valve closed
7/6/2012	5:16:18 PM	Bubbler valve closed
7/6/2012	5:16:18 PM	H2 valve opened
7/6/2012	5:16:18 PM	Helium MFC set to  0.000000
7/6/2012	5:16:18 PM	H2 MFC set to  500.000000
7/6/2012	5:16:18 PM	BCl3 MFC set to  0.000000
7/6/2012	5:16:18 PM	PH3 MFC set to  0.000000
7/6/2012	5:16:18 PM	SiCl4 MFC set to  0.000000
7/6/2012	5:16:18 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	5:16:18 PM	Tube furnace set to 0
7/6/2012	5:17:30 PM	Helium valve closed
7/6/2012	5:17:30 PM	BCl3 valve closed
7/6/2012	5:17:30 PM	PH3 valve closed
7/6/2012	5:17:30 PM	SiCl4 pre valve closed
7/6/2012	5:17:30 PM	SiCl4 post valve closed
7/6/2012	5:17:30 PM	Main Vac valve closed
7/6/2012	5:17:30 PM	Bypass valve closed
7/6/2012	5:17:30 PM	H2 valve opened
7/6/2012	5:17:30 PM	Bubbler valve opened
7/6/2012	5:17:30 PM	Helium MFC set to  0.000000
7/6/2012	5:17:30 PM	H2 MFC set to  500.000000
7/6/2012	5:17:30 PM	BCl3 MFC set to  0.000000
7/6/2012	5:17:30 PM	PH3 MFC set to  0.000000
7/6/2012	5:17:30 PM	SiCl4 MFC set to  0.000000
7/6/2012	5:17:30 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	5:17:30 PM	Tube furnace set to 0
7/6/2012	5:17:31 PM	Helium valve closed
7/6/2012	5:17:31 PM	BCl3 valve closed
7/6/2012	5:17:31 PM	PH3 valve closed
7/6/2012	5:17:31 PM	SiCl4 pre valve closed
7/6/2012	5:17:31 PM	SiCl4 post valve closed
7/6/2012	5:17:31 PM	Main Vac valve closed
7/6/2012	5:17:31 PM	Bypass valve closed
7/6/2012	5:17:31 PM	H2 valve opened
7/6/2012	5:17:31 PM	Bubbler valve opened
7/6/2012	5:17:31 PM	Helium MFC set to  0.000000
7/6/2012	5:17:31 PM	H2 MFC set to  500.000000
7/6/2012	5:17:31 PM	BCl3 MFC set to  0.000000
7/6/2012	5:17:31 PM	PH3 MFC set to  0.000000
7/6/2012	5:17:31 PM	SiCl4 MFC set to  0.000000
7/6/2012	5:17:31 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	5:17:31 PM	Tube furnace set to 1000
7/6/2012	5:47:31 PM	Helium valve closed
7/6/2012	5:47:31 PM	PH3 valve closed
7/6/2012	5:47:31 PM	Main Vac valve closed
7/6/2012	5:47:31 PM	Bypass valve closed
7/6/2012	5:47:31 PM	H2 valve opened
7/6/2012	5:47:31 PM	BCl3 valve opened
7/6/2012	5:47:31 PM	SiCl4 pre valve opened
7/6/2012	5:47:31 PM	SiCl4 post valve opened
7/6/2012	5:47:31 PM	Bubbler valve opened
7/6/2012	5:47:31 PM	Helium MFC set to  0.000000
7/6/2012	5:47:31 PM	H2 MFC set to  500.000000
7/6/2012	5:47:31 PM	BCl3 MFC set to  1.000000
7/6/2012	5:47:31 PM	PH3 MFC set to  0.000000
7/6/2012	5:47:31 PM	SiCl4 MFC set to  50.000000
7/6/2012	5:47:31 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	5:47:32 PM	Tube furnace set to 1000
7/6/2012	5:54:32 PM	Helium valve closed
7/6/2012	5:54:32 PM	BCl3 valve closed
7/6/2012	5:54:32 PM	PH3 valve closed
7/6/2012	5:54:32 PM	SiCl4 pre valve closed
7/6/2012	5:54:32 PM	SiCl4 post valve closed
7/6/2012	5:54:32 PM	Main Vac valve closed
7/6/2012	5:54:32 PM	Bypass valve closed
7/6/2012	5:54:32 PM	H2 valve opened
7/6/2012	5:54:32 PM	Bubbler valve opened
7/6/2012	5:54:32 PM	Helium MFC set to  0.000000
7/6/2012	5:54:32 PM	H2 MFC set to  500.000000
7/6/2012	5:54:32 PM	BCl3 MFC set to  0.000000
7/6/2012	5:54:32 PM	PH3 MFC set to  0.000000
7/6/2012	5:54:32 PM	SiCl4 MFC set to  0.000000
7/6/2012	5:54:32 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	5:54:32 PM	Tube furnace set to 750
7/6/2012	5:59:32 PM	H2 valve closed
7/6/2012	5:59:32 PM	BCl3 valve closed
7/6/2012	5:59:32 PM	PH3 valve closed
7/6/2012	5:59:32 PM	SiCl4 pre valve closed
7/6/2012	5:59:32 PM	SiCl4 post valve closed
7/6/2012	5:59:32 PM	Main Vac valve closed
7/6/2012	5:59:32 PM	Bypass valve closed
7/6/2012	5:59:32 PM	Helium valve opened
7/6/2012	5:59:32 PM	Bubbler valve opened
7/6/2012	5:59:32 PM	Helium MFC set to  500.000000
7/6/2012	5:59:32 PM	H2 MFC set to  0.000000
7/6/2012	5:59:32 PM	BCl3 MFC set to  0.000000
7/6/2012	5:59:32 PM	PH3 MFC set to  0.000000
7/6/2012	5:59:32 PM	SiCl4 MFC set to  0.000000
7/6/2012	5:59:32 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	5:59:32 PM	Tube furnace set to 0
7/6/2012	6:19:32 PM	Helium valve closed
7/6/2012	6:19:32 PM	H2 valve closed
7/6/2012	6:19:32 PM	BCl3 valve closed
7/6/2012	6:19:32 PM	PH3 valve closed
7/6/2012	6:19:32 PM	SiCl4 pre valve closed
7/6/2012	6:19:32 PM	SiCl4 post valve closed
7/6/2012	6:19:32 PM	Main Vac valve closed
7/6/2012	6:19:32 PM	Bypass valve closed
7/6/2012	6:19:32 PM	Bubbler valve closed
7/6/2012	6:19:32 PM	Helium MFC set to  0.000000
7/6/2012	6:19:32 PM	H2 MFC set to  0.000000
7/6/2012	6:19:32 PM	BCl3 MFC set to  0.000000
7/6/2012	6:19:32 PM	PH3 MFC set to  0.000000
7/6/2012	6:19:32 PM	SiCl4 MFC set to  0.000000
7/6/2012	6:19:32 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	6:19:32 PM	Tube furnace set to 0
7/6/2012	6:19:33 PM	Run finished at 6:19 PM
7/6/2012	7:27:57 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/6/2012	7:27:58 PM	Recipe started at 7:27 PM
7/6/2012	7:27:58 PM	Helium valve closed
7/6/2012	7:27:58 PM	H2 valve closed
7/6/2012	7:27:58 PM	BCl3 valve closed
7/6/2012	7:27:58 PM	PH3 valve closed
7/6/2012	7:27:58 PM	SiCl4 pre valve closed
7/6/2012	7:27:58 PM	SiCl4 post valve closed
7/6/2012	7:27:58 PM	Main Vac valve closed
7/6/2012	7:27:58 PM	Bypass valve closed
7/6/2012	7:27:58 PM	Bubbler valve closed
7/6/2012	7:27:58 PM	Helium MFC set to  0.000000
7/6/2012	7:27:58 PM	H2 MFC set to  0.000000
7/6/2012	7:27:58 PM	BCl3 MFC set to  0.000000
7/6/2012	7:27:58 PM	PH3 MFC set to  0.000000
7/6/2012	7:27:58 PM	SiCl4 MFC set to  0.000000
7/6/2012	7:27:58 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	7:27:58 PM	Tube furnace set to 0
7/6/2012	7:28:01 PM	H2 valve closed
7/6/2012	7:28:01 PM	BCl3 valve closed
7/6/2012	7:28:01 PM	PH3 valve closed
7/6/2012	7:28:01 PM	SiCl4 pre valve closed
7/6/2012	7:28:01 PM	SiCl4 post valve closed
7/6/2012	7:28:01 PM	Main Vac valve closed
7/6/2012	7:28:01 PM	Bypass valve closed
7/6/2012	7:28:01 PM	Bubbler valve closed
7/6/2012	7:28:01 PM	Helium valve opened
7/6/2012	7:28:01 PM	Helium MFC set to  500.000000
7/6/2012	7:28:01 PM	H2 MFC set to  0.000000
7/6/2012	7:28:01 PM	BCl3 MFC set to  0.000000
7/6/2012	7:28:01 PM	PH3 MFC set to  0.000000
7/6/2012	7:28:01 PM	SiCl4 MFC set to  0.000000
7/6/2012	7:28:01 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	7:28:01 PM	Tube furnace set to 0
7/6/2012	7:28:05 PM	Helium valve closed
7/6/2012	7:28:05 PM	H2 valve closed
7/6/2012	7:28:05 PM	BCl3 valve closed
7/6/2012	7:28:05 PM	PH3 valve closed
7/6/2012	7:28:05 PM	SiCl4 pre valve closed
7/6/2012	7:28:05 PM	SiCl4 post valve closed
7/6/2012	7:28:05 PM	Main Vac valve closed
7/6/2012	7:28:05 PM	Bypass valve closed
7/6/2012	7:28:05 PM	Bubbler valve closed
7/6/2012	7:28:05 PM	Helium MFC set to  0.000000
7/6/2012	7:28:05 PM	H2 MFC set to  0.000000
7/6/2012	7:28:05 PM	BCl3 MFC set to  0.000000
7/6/2012	7:28:05 PM	PH3 MFC set to  0.000000
7/6/2012	7:28:05 PM	SiCl4 MFC set to  0.000000
7/6/2012	7:28:05 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	7:28:05 PM	Tube furnace set to 0
7/6/2012	7:28:06 PM	Run finished at 7:28 PM
7/6/2012	7:28:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/6/2012	7:32:37 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/6/2012	7:32:38 PM	Recipe started at 7:32 PM
7/6/2012	7:32:38 PM	Helium valve closed
7/6/2012	7:32:38 PM	H2 valve closed
7/6/2012	7:32:38 PM	BCl3 valve closed
7/6/2012	7:32:38 PM	PH3 valve closed
7/6/2012	7:32:38 PM	SiCl4 pre valve closed
7/6/2012	7:32:38 PM	SiCl4 post valve closed
7/6/2012	7:32:38 PM	Main Vac valve closed
7/6/2012	7:32:38 PM	Bubbler valve closed
7/6/2012	7:32:38 PM	Bypass valve opened
7/6/2012	7:32:38 PM	Helium MFC set to  0.000000
7/6/2012	7:32:38 PM	H2 MFC set to  0.000000
7/6/2012	7:32:38 PM	BCl3 MFC set to  0.000000
7/6/2012	7:32:38 PM	PH3 MFC set to  0.000000
7/6/2012	7:32:38 PM	SiCl4 MFC set to  0.000000
7/6/2012	7:32:38 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	7:32:38 PM	Tube furnace set to 0
7/6/2012	7:33:42 PM	Helium valve closed
7/6/2012	7:33:42 PM	H2 valve closed
7/6/2012	7:33:42 PM	BCl3 valve closed
7/6/2012	7:33:42 PM	PH3 valve closed
7/6/2012	7:33:42 PM	SiCl4 pre valve closed
7/6/2012	7:33:42 PM	SiCl4 post valve closed
7/6/2012	7:33:42 PM	Main Vac valve closed
7/6/2012	7:33:42 PM	Bubbler valve closed
7/6/2012	7:33:42 PM	Bypass valve opened
7/6/2012	7:33:42 PM	Helium MFC set to  0.000000
7/6/2012	7:33:42 PM	H2 MFC set to  0.000000
7/6/2012	7:33:42 PM	BCl3 MFC set to  0.000000
7/6/2012	7:33:42 PM	PH3 MFC set to  0.000000
7/6/2012	7:33:42 PM	SiCl4 MFC set to  0.000000
7/6/2012	7:33:42 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	7:33:42 PM	Tube furnace set to 0
7/6/2012	7:34:22 PM	Helium valve closed
7/6/2012	7:34:22 PM	H2 valve closed
7/6/2012	7:34:22 PM	BCl3 valve closed
7/6/2012	7:34:22 PM	PH3 valve closed
7/6/2012	7:34:22 PM	SiCl4 pre valve closed
7/6/2012	7:34:22 PM	SiCl4 post valve closed
7/6/2012	7:34:22 PM	Bypass valve closed
7/6/2012	7:34:22 PM	Bubbler valve closed
7/6/2012	7:34:22 PM	Main Vac valve opened
7/6/2012	7:34:22 PM	Helium MFC set to  0.000000
7/6/2012	7:34:22 PM	H2 MFC set to  0.000000
7/6/2012	7:34:22 PM	BCl3 MFC set to  0.000000
7/6/2012	7:34:22 PM	PH3 MFC set to  0.000000
7/6/2012	7:34:22 PM	SiCl4 MFC set to  0.000000
7/6/2012	7:34:22 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	7:34:22 PM	Tube furnace set to 0
7/6/2012	7:34:23 PM	Run finished at 7:34 PM
7/6/2012	7:34:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/6/2012	7:34:33 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
7/6/2012	7:34:45 PM	Recipe started at 7:34 PM
7/6/2012	7:34:45 PM	Helium valve closed
7/6/2012	7:34:45 PM	H2 valve closed
7/6/2012	7:34:45 PM	BCl3 valve closed
7/6/2012	7:34:45 PM	PH3 valve closed
7/6/2012	7:34:45 PM	SiCl4 pre valve closed
7/6/2012	7:34:45 PM	SiCl4 post valve closed
7/6/2012	7:34:45 PM	Main Vac valve closed
7/6/2012	7:34:45 PM	Bubbler valve closed
7/6/2012	7:34:45 PM	Bypass valve opened
7/6/2012	7:34:45 PM	Helium MFC set to  0.000000
7/6/2012	7:34:45 PM	H2 MFC set to  0.000000
7/6/2012	7:34:45 PM	BCl3 MFC set to  0.000000
7/6/2012	7:34:45 PM	PH3 MFC set to  0.000000
7/6/2012	7:34:45 PM	SiCl4 MFC set to  0.000000
7/6/2012	7:34:45 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	7:34:46 PM	Tube furnace set to 0
7/6/2012	7:34:46 PM	Helium valve closed
7/6/2012	7:34:46 PM	H2 valve closed
7/6/2012	7:34:46 PM	BCl3 valve closed
7/6/2012	7:34:46 PM	PH3 valve closed
7/6/2012	7:34:46 PM	SiCl4 pre valve closed
7/6/2012	7:34:46 PM	SiCl4 post valve closed
7/6/2012	7:34:46 PM	Main Vac valve closed
7/6/2012	7:34:46 PM	Bubbler valve closed
7/6/2012	7:34:46 PM	Bypass valve opened
7/6/2012	7:34:46 PM	Helium MFC set to  0.000000
7/6/2012	7:34:46 PM	H2 MFC set to  0.000000
7/6/2012	7:34:46 PM	BCl3 MFC set to  0.000000
7/6/2012	7:34:46 PM	PH3 MFC set to  0.000000
7/6/2012	7:34:46 PM	SiCl4 MFC set to  0.000000
7/6/2012	7:34:46 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	7:34:46 PM	Tube furnace set to 0
7/6/2012	7:34:46 PM	Helium valve closed
7/6/2012	7:34:46 PM	H2 valve closed
7/6/2012	7:34:46 PM	BCl3 valve closed
7/6/2012	7:34:46 PM	PH3 valve closed
7/6/2012	7:34:46 PM	SiCl4 pre valve closed
7/6/2012	7:34:46 PM	SiCl4 post valve closed
7/6/2012	7:34:46 PM	Bypass valve closed
7/6/2012	7:34:46 PM	Bubbler valve closed
7/6/2012	7:34:46 PM	Main Vac valve opened
7/6/2012	7:34:46 PM	Helium MFC set to  0.000000
7/6/2012	7:34:46 PM	H2 MFC set to  0.000000
7/6/2012	7:34:46 PM	BCl3 MFC set to  0.000000
7/6/2012	7:34:46 PM	PH3 MFC set to  0.000000
7/6/2012	7:34:46 PM	SiCl4 MFC set to  0.000000
7/6/2012	7:34:46 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	7:34:47 PM	Tube furnace set to 0
7/6/2012	7:35:17 PM	H2 valve closed
7/6/2012	7:35:17 PM	BCl3 valve closed
7/6/2012	7:35:17 PM	PH3 valve closed
7/6/2012	7:35:17 PM	SiCl4 pre valve closed
7/6/2012	7:35:17 PM	SiCl4 post valve closed
7/6/2012	7:35:17 PM	Bypass valve closed
7/6/2012	7:35:17 PM	Bubbler valve closed
7/6/2012	7:35:17 PM	Helium valve opened
7/6/2012	7:35:17 PM	Main Vac valve opened
7/6/2012	7:35:17 PM	Helium MFC set to  20.000000
7/6/2012	7:35:17 PM	H2 MFC set to  0.000000
7/6/2012	7:35:17 PM	BCl3 MFC set to  0.000000
7/6/2012	7:35:17 PM	PH3 MFC set to  0.000000
7/6/2012	7:35:17 PM	SiCl4 MFC set to  0.000000
7/6/2012	7:35:17 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	7:35:17 PM	Tube furnace set to 0
7/6/2012	7:35:47 PM	Helium valve closed
7/6/2012	7:35:47 PM	H2 valve closed
7/6/2012	7:35:47 PM	BCl3 valve closed
7/6/2012	7:35:47 PM	PH3 valve closed
7/6/2012	7:35:47 PM	SiCl4 pre valve closed
7/6/2012	7:35:47 PM	SiCl4 post valve closed
7/6/2012	7:35:47 PM	Bypass valve closed
7/6/2012	7:35:47 PM	Bubbler valve closed
7/6/2012	7:35:47 PM	Main Vac valve opened
7/6/2012	7:35:47 PM	Helium MFC set to  0.000000
7/6/2012	7:35:47 PM	H2 MFC set to  0.000000
7/6/2012	7:35:47 PM	BCl3 MFC set to  0.000000
7/6/2012	7:35:47 PM	PH3 MFC set to  0.000000
7/6/2012	7:35:47 PM	SiCl4 MFC set to  0.000000
7/6/2012	7:35:47 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	7:35:47 PM	Tube furnace set to 0
7/6/2012	7:36:17 PM	H2 valve closed
7/6/2012	7:36:17 PM	BCl3 valve closed
7/6/2012	7:36:17 PM	PH3 valve closed
7/6/2012	7:36:17 PM	SiCl4 pre valve closed
7/6/2012	7:36:17 PM	SiCl4 post valve closed
7/6/2012	7:36:17 PM	Bypass valve closed
7/6/2012	7:36:17 PM	Bubbler valve closed
7/6/2012	7:36:17 PM	Helium valve opened
7/6/2012	7:36:17 PM	Main Vac valve opened
7/6/2012	7:36:17 PM	Helium MFC set to  20.000000
7/6/2012	7:36:17 PM	H2 MFC set to  0.000000
7/6/2012	7:36:17 PM	BCl3 MFC set to  0.000000
7/6/2012	7:36:17 PM	PH3 MFC set to  0.000000
7/6/2012	7:36:17 PM	SiCl4 MFC set to  0.000000
7/6/2012	7:36:17 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	7:36:17 PM	Tube furnace set to 0
7/6/2012	7:36:47 PM	Helium valve closed
7/6/2012	7:36:47 PM	H2 valve closed
7/6/2012	7:36:47 PM	BCl3 valve closed
7/6/2012	7:36:47 PM	PH3 valve closed
7/6/2012	7:36:47 PM	SiCl4 pre valve closed
7/6/2012	7:36:47 PM	SiCl4 post valve closed
7/6/2012	7:36:47 PM	Bypass valve closed
7/6/2012	7:36:47 PM	Bubbler valve closed
7/6/2012	7:36:47 PM	Main Vac valve opened
7/6/2012	7:36:47 PM	Helium MFC set to  0.000000
7/6/2012	7:36:47 PM	H2 MFC set to  0.000000
7/6/2012	7:36:47 PM	BCl3 MFC set to  0.000000
7/6/2012	7:36:47 PM	PH3 MFC set to  0.000000
7/6/2012	7:36:47 PM	SiCl4 MFC set to  0.000000
7/6/2012	7:36:47 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	7:36:48 PM	Tube furnace set to 0
7/6/2012	7:37:18 PM	H2 valve closed
7/6/2012	7:37:18 PM	BCl3 valve closed
7/6/2012	7:37:18 PM	PH3 valve closed
7/6/2012	7:37:18 PM	SiCl4 pre valve closed
7/6/2012	7:37:18 PM	SiCl4 post valve closed
7/6/2012	7:37:18 PM	Bypass valve closed
7/6/2012	7:37:18 PM	Bubbler valve closed
7/6/2012	7:37:18 PM	Helium valve opened
7/6/2012	7:37:18 PM	Main Vac valve opened
7/6/2012	7:37:18 PM	Helium MFC set to  20.000000
7/6/2012	7:37:18 PM	H2 MFC set to  0.000000
7/6/2012	7:37:18 PM	BCl3 MFC set to  0.000000
7/6/2012	7:37:18 PM	PH3 MFC set to  0.000000
7/6/2012	7:37:18 PM	SiCl4 MFC set to  0.000000
7/6/2012	7:37:18 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	7:37:18 PM	Tube furnace set to 0
7/6/2012	7:37:48 PM	Helium valve closed
7/6/2012	7:37:48 PM	H2 valve closed
7/6/2012	7:37:48 PM	BCl3 valve closed
7/6/2012	7:37:48 PM	PH3 valve closed
7/6/2012	7:37:48 PM	SiCl4 pre valve closed
7/6/2012	7:37:48 PM	SiCl4 post valve closed
7/6/2012	7:37:48 PM	Bypass valve closed
7/6/2012	7:37:48 PM	Bubbler valve closed
7/6/2012	7:37:48 PM	Main Vac valve opened
7/6/2012	7:37:48 PM	Helium MFC set to  0.000000
7/6/2012	7:37:48 PM	H2 MFC set to  0.000000
7/6/2012	7:37:48 PM	BCl3 MFC set to  0.000000
7/6/2012	7:37:48 PM	PH3 MFC set to  0.000000
7/6/2012	7:37:48 PM	SiCl4 MFC set to  0.000000
7/6/2012	7:37:48 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	7:37:48 PM	Tube furnace set to 0
7/6/2012	7:38:18 PM	H2 valve closed
7/6/2012	7:38:18 PM	BCl3 valve closed
7/6/2012	7:38:18 PM	PH3 valve closed
7/6/2012	7:38:18 PM	SiCl4 pre valve closed
7/6/2012	7:38:18 PM	SiCl4 post valve closed
7/6/2012	7:38:18 PM	Bypass valve closed
7/6/2012	7:38:18 PM	Bubbler valve closed
7/6/2012	7:38:18 PM	Helium valve opened
7/6/2012	7:38:18 PM	Main Vac valve opened
7/6/2012	7:38:18 PM	Helium MFC set to  20.000000
7/6/2012	7:38:18 PM	H2 MFC set to  0.000000
7/6/2012	7:38:18 PM	BCl3 MFC set to  0.000000
7/6/2012	7:38:18 PM	PH3 MFC set to  0.000000
7/6/2012	7:38:18 PM	SiCl4 MFC set to  0.000000
7/6/2012	7:38:18 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	7:38:18 PM	Tube furnace set to 0
7/6/2012	7:38:48 PM	Helium valve closed
7/6/2012	7:38:48 PM	H2 valve closed
7/6/2012	7:38:48 PM	BCl3 valve closed
7/6/2012	7:38:48 PM	PH3 valve closed
7/6/2012	7:38:48 PM	SiCl4 pre valve closed
7/6/2012	7:38:48 PM	SiCl4 post valve closed
7/6/2012	7:38:48 PM	Bypass valve closed
7/6/2012	7:38:48 PM	Bubbler valve closed
7/6/2012	7:38:48 PM	Main Vac valve opened
7/6/2012	7:38:48 PM	Helium MFC set to  0.000000
7/6/2012	7:38:48 PM	H2 MFC set to  0.000000
7/6/2012	7:38:48 PM	BCl3 MFC set to  0.000000
7/6/2012	7:38:48 PM	PH3 MFC set to  0.000000
7/6/2012	7:38:48 PM	SiCl4 MFC set to  0.000000
7/6/2012	7:38:48 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	7:38:48 PM	Tube furnace set to 0
7/6/2012	7:39:18 PM	H2 valve closed
7/6/2012	7:39:18 PM	BCl3 valve closed
7/6/2012	7:39:18 PM	PH3 valve closed
7/6/2012	7:39:18 PM	SiCl4 pre valve closed
7/6/2012	7:39:18 PM	SiCl4 post valve closed
7/6/2012	7:39:18 PM	Bypass valve closed
7/6/2012	7:39:18 PM	Bubbler valve closed
7/6/2012	7:39:19 PM	Helium valve opened
7/6/2012	7:39:19 PM	Main Vac valve opened
7/6/2012	7:39:19 PM	Helium MFC set to  20.000000
7/6/2012	7:39:19 PM	H2 MFC set to  0.000000
7/6/2012	7:39:19 PM	BCl3 MFC set to  0.000000
7/6/2012	7:39:19 PM	PH3 MFC set to  0.000000
7/6/2012	7:39:19 PM	SiCl4 MFC set to  0.000000
7/6/2012	7:39:19 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	7:39:19 PM	Tube furnace set to 0
7/6/2012	7:39:49 PM	Helium valve closed
7/6/2012	7:39:49 PM	H2 valve closed
7/6/2012	7:39:49 PM	BCl3 valve closed
7/6/2012	7:39:49 PM	PH3 valve closed
7/6/2012	7:39:49 PM	SiCl4 pre valve closed
7/6/2012	7:39:49 PM	SiCl4 post valve closed
7/6/2012	7:39:49 PM	Bypass valve closed
7/6/2012	7:39:49 PM	Bubbler valve closed
7/6/2012	7:39:49 PM	Main Vac valve opened
7/6/2012	7:39:49 PM	Helium MFC set to  0.000000
7/6/2012	7:39:49 PM	H2 MFC set to  0.000000
7/6/2012	7:39:49 PM	BCl3 MFC set to  0.000000
7/6/2012	7:39:49 PM	PH3 MFC set to  0.000000
7/6/2012	7:39:49 PM	SiCl4 MFC set to  0.000000
7/6/2012	7:39:49 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	7:39:49 PM	Tube furnace set to 0
7/6/2012	7:40:19 PM	H2 valve closed
7/6/2012	7:40:19 PM	BCl3 valve closed
7/6/2012	7:40:19 PM	PH3 valve closed
7/6/2012	7:40:19 PM	SiCl4 pre valve closed
7/6/2012	7:40:19 PM	SiCl4 post valve closed
7/6/2012	7:40:19 PM	Bypass valve closed
7/6/2012	7:40:19 PM	Bubbler valve closed
7/6/2012	7:40:19 PM	Helium valve opened
7/6/2012	7:40:19 PM	Main Vac valve opened
7/6/2012	7:40:19 PM	Helium MFC set to  20.000000
7/6/2012	7:40:19 PM	H2 MFC set to  0.000000
7/6/2012	7:40:19 PM	BCl3 MFC set to  0.000000
7/6/2012	7:40:19 PM	PH3 MFC set to  0.000000
7/6/2012	7:40:19 PM	SiCl4 MFC set to  0.000000
7/6/2012	7:40:19 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	7:40:19 PM	Tube furnace set to 0
7/6/2012	7:40:49 PM	Helium valve closed
7/6/2012	7:40:49 PM	H2 valve closed
7/6/2012	7:40:49 PM	BCl3 valve closed
7/6/2012	7:40:49 PM	PH3 valve closed
7/6/2012	7:40:49 PM	SiCl4 pre valve closed
7/6/2012	7:40:49 PM	SiCl4 post valve closed
7/6/2012	7:40:49 PM	Bypass valve closed
7/6/2012	7:40:49 PM	Bubbler valve closed
7/6/2012	7:40:49 PM	Main Vac valve opened
7/6/2012	7:40:49 PM	Helium MFC set to  0.000000
7/6/2012	7:40:49 PM	H2 MFC set to  0.000000
7/6/2012	7:40:49 PM	BCl3 MFC set to  0.000000
7/6/2012	7:40:49 PM	PH3 MFC set to  0.000000
7/6/2012	7:40:49 PM	SiCl4 MFC set to  0.000000
7/6/2012	7:40:49 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	7:40:49 PM	Tube furnace set to 0
7/6/2012	7:41:19 PM	H2 valve closed
7/6/2012	7:41:19 PM	BCl3 valve closed
7/6/2012	7:41:19 PM	PH3 valve closed
7/6/2012	7:41:19 PM	SiCl4 pre valve closed
7/6/2012	7:41:19 PM	SiCl4 post valve closed
7/6/2012	7:41:19 PM	Bypass valve closed
7/6/2012	7:41:19 PM	Bubbler valve closed
7/6/2012	7:41:19 PM	Helium valve opened
7/6/2012	7:41:19 PM	Main Vac valve opened
7/6/2012	7:41:19 PM	Helium MFC set to  20.000000
7/6/2012	7:41:19 PM	H2 MFC set to  0.000000
7/6/2012	7:41:19 PM	BCl3 MFC set to  0.000000
7/6/2012	7:41:19 PM	PH3 MFC set to  0.000000
7/6/2012	7:41:19 PM	SiCl4 MFC set to  0.000000
7/6/2012	7:41:19 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	7:41:20 PM	Tube furnace set to 0
7/6/2012	7:41:50 PM	Helium valve closed
7/6/2012	7:41:50 PM	H2 valve closed
7/6/2012	7:41:50 PM	BCl3 valve closed
7/6/2012	7:41:50 PM	PH3 valve closed
7/6/2012	7:41:50 PM	SiCl4 pre valve closed
7/6/2012	7:41:50 PM	SiCl4 post valve closed
7/6/2012	7:41:50 PM	Bypass valve closed
7/6/2012	7:41:50 PM	Bubbler valve closed
7/6/2012	7:41:50 PM	Main Vac valve opened
7/6/2012	7:41:50 PM	Helium MFC set to  0.000000
7/6/2012	7:41:50 PM	H2 MFC set to  0.000000
7/6/2012	7:41:50 PM	BCl3 MFC set to  0.000000
7/6/2012	7:41:50 PM	PH3 MFC set to  0.000000
7/6/2012	7:41:50 PM	SiCl4 MFC set to  0.000000
7/6/2012	7:41:50 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	7:41:50 PM	Tube furnace set to 0
7/6/2012	7:42:20 PM	H2 valve closed
7/6/2012	7:42:20 PM	BCl3 valve closed
7/6/2012	7:42:20 PM	PH3 valve closed
7/6/2012	7:42:20 PM	SiCl4 pre valve closed
7/6/2012	7:42:20 PM	SiCl4 post valve closed
7/6/2012	7:42:20 PM	Bypass valve closed
7/6/2012	7:42:20 PM	Bubbler valve closed
7/6/2012	7:42:20 PM	Helium valve opened
7/6/2012	7:42:20 PM	Main Vac valve opened
7/6/2012	7:42:20 PM	Helium MFC set to  20.000000
7/6/2012	7:42:20 PM	H2 MFC set to  0.000000
7/6/2012	7:42:20 PM	BCl3 MFC set to  0.000000
7/6/2012	7:42:20 PM	PH3 MFC set to  0.000000
7/6/2012	7:42:20 PM	SiCl4 MFC set to  0.000000
7/6/2012	7:42:20 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	7:42:20 PM	Tube furnace set to 0
7/6/2012	7:42:50 PM	Helium valve closed
7/6/2012	7:42:50 PM	H2 valve closed
7/6/2012	7:42:50 PM	BCl3 valve closed
7/6/2012	7:42:50 PM	PH3 valve closed
7/6/2012	7:42:50 PM	SiCl4 pre valve closed
7/6/2012	7:42:50 PM	SiCl4 post valve closed
7/6/2012	7:42:50 PM	Bypass valve closed
7/6/2012	7:42:50 PM	Bubbler valve closed
7/6/2012	7:42:50 PM	Main Vac valve opened
7/6/2012	7:42:50 PM	Helium MFC set to  0.000000
7/6/2012	7:42:50 PM	H2 MFC set to  0.000000
7/6/2012	7:42:50 PM	BCl3 MFC set to  0.000000
7/6/2012	7:42:50 PM	PH3 MFC set to  0.000000
7/6/2012	7:42:50 PM	SiCl4 MFC set to  0.000000
7/6/2012	7:42:50 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	7:42:50 PM	Tube furnace set to 0
7/6/2012	7:43:20 PM	H2 valve closed
7/6/2012	7:43:20 PM	BCl3 valve closed
7/6/2012	7:43:20 PM	PH3 valve closed
7/6/2012	7:43:20 PM	SiCl4 pre valve closed
7/6/2012	7:43:20 PM	SiCl4 post valve closed
7/6/2012	7:43:20 PM	Bypass valve closed
7/6/2012	7:43:20 PM	Bubbler valve closed
7/6/2012	7:43:20 PM	Helium valve opened
7/6/2012	7:43:20 PM	Main Vac valve opened
7/6/2012	7:43:20 PM	Helium MFC set to  20.000000
7/6/2012	7:43:20 PM	H2 MFC set to  0.000000
7/6/2012	7:43:20 PM	BCl3 MFC set to  0.000000
7/6/2012	7:43:20 PM	PH3 MFC set to  0.000000
7/6/2012	7:43:20 PM	SiCl4 MFC set to  0.000000
7/6/2012	7:43:20 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	7:43:21 PM	Tube furnace set to 0
7/6/2012	7:43:51 PM	Helium valve closed
7/6/2012	7:43:51 PM	H2 valve closed
7/6/2012	7:43:51 PM	BCl3 valve closed
7/6/2012	7:43:51 PM	PH3 valve closed
7/6/2012	7:43:51 PM	SiCl4 pre valve closed
7/6/2012	7:43:51 PM	SiCl4 post valve closed
7/6/2012	7:43:51 PM	Bypass valve closed
7/6/2012	7:43:51 PM	Bubbler valve closed
7/6/2012	7:43:51 PM	Main Vac valve opened
7/6/2012	7:43:51 PM	Helium MFC set to  0.000000
7/6/2012	7:43:51 PM	H2 MFC set to  0.000000
7/6/2012	7:43:51 PM	BCl3 MFC set to  0.000000
7/6/2012	7:43:51 PM	PH3 MFC set to  0.000000
7/6/2012	7:43:51 PM	SiCl4 MFC set to  0.000000
7/6/2012	7:43:51 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	7:43:51 PM	Tube furnace set to 0
7/6/2012	7:44:21 PM	H2 valve closed
7/6/2012	7:44:21 PM	BCl3 valve closed
7/6/2012	7:44:21 PM	PH3 valve closed
7/6/2012	7:44:21 PM	SiCl4 pre valve closed
7/6/2012	7:44:21 PM	SiCl4 post valve closed
7/6/2012	7:44:21 PM	Bypass valve closed
7/6/2012	7:44:21 PM	Bubbler valve closed
7/6/2012	7:44:21 PM	Helium valve opened
7/6/2012	7:44:21 PM	Main Vac valve opened
7/6/2012	7:44:21 PM	Helium MFC set to  20.000000
7/6/2012	7:44:21 PM	H2 MFC set to  0.000000
7/6/2012	7:44:21 PM	BCl3 MFC set to  0.000000
7/6/2012	7:44:21 PM	PH3 MFC set to  0.000000
7/6/2012	7:44:21 PM	SiCl4 MFC set to  0.000000
7/6/2012	7:44:21 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	7:44:21 PM	Tube furnace set to 0
7/6/2012	7:44:51 PM	Helium valve closed
7/6/2012	7:44:51 PM	H2 valve closed
7/6/2012	7:44:51 PM	BCl3 valve closed
7/6/2012	7:44:51 PM	PH3 valve closed
7/6/2012	7:44:51 PM	SiCl4 pre valve closed
7/6/2012	7:44:51 PM	SiCl4 post valve closed
7/6/2012	7:44:51 PM	Bypass valve closed
7/6/2012	7:44:51 PM	Bubbler valve closed
7/6/2012	7:44:51 PM	Main Vac valve opened
7/6/2012	7:44:51 PM	Helium MFC set to  0.000000
7/6/2012	7:44:51 PM	H2 MFC set to  0.000000
7/6/2012	7:44:51 PM	BCl3 MFC set to  0.000000
7/6/2012	7:44:51 PM	PH3 MFC set to  0.000000
7/6/2012	7:44:51 PM	SiCl4 MFC set to  0.000000
7/6/2012	7:44:51 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	7:44:51 PM	Tube furnace set to 0
7/6/2012	7:44:52 PM	Run finished at 7:44 PM
7/6/2012	7:44:52 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
7/6/2012	8:03:40 PM	Main Vac valve closed
7/6/2012	8:03:52 PM	Main Vac valve opened
7/6/2012	8:04:34 PM	Recipe started at 8:04 PM
7/6/2012	8:04:34 PM	Helium valve closed
7/6/2012	8:04:34 PM	H2 valve closed
7/6/2012	8:04:34 PM	BCl3 valve closed
7/6/2012	8:04:34 PM	PH3 valve closed
7/6/2012	8:04:34 PM	SiCl4 pre valve closed
7/6/2012	8:04:34 PM	SiCl4 post valve closed
7/6/2012	8:04:34 PM	Main Vac valve closed
7/6/2012	8:04:34 PM	Bypass valve closed
7/6/2012	8:04:34 PM	Bubbler valve closed
7/6/2012	8:04:34 PM	Helium MFC set to  0.000000
7/6/2012	8:04:34 PM	H2 MFC set to  0.000000
7/6/2012	8:04:34 PM	BCl3 MFC set to  0.000000
7/6/2012	8:04:34 PM	PH3 MFC set to  0.000000
7/6/2012	8:04:34 PM	SiCl4 MFC set to  0.000000
7/6/2012	8:04:34 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	8:04:34 PM	Tube furnace set to 0
7/6/2012	8:04:37 PM	Helium valve closed
7/6/2012	8:04:37 PM	BCl3 valve closed
7/6/2012	8:04:37 PM	PH3 valve closed
7/6/2012	8:04:37 PM	SiCl4 pre valve closed
7/6/2012	8:04:37 PM	SiCl4 post valve closed
7/6/2012	8:04:37 PM	Main Vac valve closed
7/6/2012	8:04:37 PM	Bypass valve closed
7/6/2012	8:04:37 PM	Bubbler valve closed
7/6/2012	8:04:37 PM	H2 valve opened
7/6/2012	8:04:37 PM	Helium MFC set to  0.000000
7/6/2012	8:04:37 PM	H2 MFC set to  500.000000
7/6/2012	8:04:37 PM	BCl3 MFC set to  0.000000
7/6/2012	8:04:37 PM	PH3 MFC set to  0.000000
7/6/2012	8:04:37 PM	SiCl4 MFC set to  0.000000
7/6/2012	8:04:37 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	8:04:38 PM	Tube furnace set to 0
7/6/2012	8:05:51 PM	Helium valve closed
7/6/2012	8:05:51 PM	BCl3 valve closed
7/6/2012	8:05:51 PM	PH3 valve closed
7/6/2012	8:05:51 PM	SiCl4 pre valve closed
7/6/2012	8:05:51 PM	SiCl4 post valve closed
7/6/2012	8:05:51 PM	Main Vac valve closed
7/6/2012	8:05:51 PM	Bypass valve closed
7/6/2012	8:05:51 PM	H2 valve opened
7/6/2012	8:05:51 PM	Bubbler valve opened
7/6/2012	8:05:51 PM	Helium MFC set to  0.000000
7/6/2012	8:05:51 PM	H2 MFC set to  500.000000
7/6/2012	8:05:51 PM	BCl3 MFC set to  0.000000
7/6/2012	8:05:51 PM	PH3 MFC set to  0.000000
7/6/2012	8:05:51 PM	SiCl4 MFC set to  0.000000
7/6/2012	8:05:51 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	8:05:51 PM	Tube furnace set to 0
7/6/2012	8:05:52 PM	Helium valve closed
7/6/2012	8:05:52 PM	BCl3 valve closed
7/6/2012	8:05:52 PM	PH3 valve closed
7/6/2012	8:05:52 PM	SiCl4 pre valve closed
7/6/2012	8:05:52 PM	SiCl4 post valve closed
7/6/2012	8:05:52 PM	Main Vac valve closed
7/6/2012	8:05:52 PM	Bypass valve closed
7/6/2012	8:05:52 PM	H2 valve opened
7/6/2012	8:05:52 PM	Bubbler valve opened
7/6/2012	8:05:52 PM	Helium MFC set to  0.000000
7/6/2012	8:05:52 PM	H2 MFC set to  500.000000
7/6/2012	8:05:52 PM	BCl3 MFC set to  0.000000
7/6/2012	8:05:52 PM	PH3 MFC set to  0.000000
7/6/2012	8:05:52 PM	SiCl4 MFC set to  0.000000
7/6/2012	8:05:52 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	8:05:52 PM	Tube furnace set to 1000
7/6/2012	8:35:52 PM	Helium valve closed
7/6/2012	8:35:52 PM	PH3 valve closed
7/6/2012	8:35:52 PM	Main Vac valve closed
7/6/2012	8:35:52 PM	Bypass valve closed
7/6/2012	8:35:52 PM	H2 valve opened
7/6/2012	8:35:52 PM	BCl3 valve opened
7/6/2012	8:35:52 PM	SiCl4 pre valve opened
7/6/2012	8:35:52 PM	SiCl4 post valve opened
7/6/2012	8:35:52 PM	Bubbler valve opened
7/6/2012	8:35:52 PM	Helium MFC set to  0.000000
7/6/2012	8:35:52 PM	H2 MFC set to  500.000000
7/6/2012	8:35:52 PM	BCl3 MFC set to  1.000000
7/6/2012	8:35:52 PM	PH3 MFC set to  0.000000
7/6/2012	8:35:52 PM	SiCl4 MFC set to  50.000000
7/6/2012	8:35:52 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	8:35:52 PM	Tube furnace set to 1000
7/6/2012	8:42:52 PM	Helium valve closed
7/6/2012	8:42:52 PM	BCl3 valve closed
7/6/2012	8:42:52 PM	PH3 valve closed
7/6/2012	8:42:52 PM	SiCl4 pre valve closed
7/6/2012	8:42:52 PM	SiCl4 post valve closed
7/6/2012	8:42:52 PM	Main Vac valve closed
7/6/2012	8:42:52 PM	Bypass valve closed
7/6/2012	8:42:52 PM	H2 valve opened
7/6/2012	8:42:52 PM	Bubbler valve opened
7/6/2012	8:42:52 PM	Helium MFC set to  0.000000
7/6/2012	8:42:52 PM	H2 MFC set to  500.000000
7/6/2012	8:42:52 PM	BCl3 MFC set to  0.000000
7/6/2012	8:42:52 PM	PH3 MFC set to  0.000000
7/6/2012	8:42:52 PM	SiCl4 MFC set to  0.000000
7/6/2012	8:42:52 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	8:42:52 PM	Tube furnace set to 750
7/6/2012	8:47:52 PM	H2 valve closed
7/6/2012	8:47:52 PM	BCl3 valve closed
7/6/2012	8:47:52 PM	PH3 valve closed
7/6/2012	8:47:52 PM	SiCl4 pre valve closed
7/6/2012	8:47:52 PM	SiCl4 post valve closed
7/6/2012	8:47:52 PM	Main Vac valve closed
7/6/2012	8:47:52 PM	Bypass valve closed
7/6/2012	8:47:52 PM	Helium valve opened
7/6/2012	8:47:52 PM	Bubbler valve opened
7/6/2012	8:47:52 PM	Helium MFC set to  500.000000
7/6/2012	8:47:52 PM	H2 MFC set to  0.000000
7/6/2012	8:47:52 PM	BCl3 MFC set to  0.000000
7/6/2012	8:47:52 PM	PH3 MFC set to  0.000000
7/6/2012	8:47:52 PM	SiCl4 MFC set to  0.000000
7/6/2012	8:47:52 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	8:47:53 PM	Tube furnace set to 0
7/6/2012	9:07:53 PM	Helium valve closed
7/6/2012	9:07:53 PM	H2 valve closed
7/6/2012	9:07:53 PM	BCl3 valve closed
7/6/2012	9:07:53 PM	PH3 valve closed
7/6/2012	9:07:53 PM	SiCl4 pre valve closed
7/6/2012	9:07:53 PM	SiCl4 post valve closed
7/6/2012	9:07:53 PM	Main Vac valve closed
7/6/2012	9:07:53 PM	Bypass valve closed
7/6/2012	9:07:53 PM	Bubbler valve closed
7/6/2012	9:07:53 PM	Helium MFC set to  0.000000
7/6/2012	9:07:53 PM	H2 MFC set to  0.000000
7/6/2012	9:07:53 PM	BCl3 MFC set to  0.000000
7/6/2012	9:07:53 PM	PH3 MFC set to  0.000000
7/6/2012	9:07:53 PM	SiCl4 MFC set to  0.000000
7/6/2012	9:07:53 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	9:07:53 PM	Tube furnace set to 0
7/6/2012	9:07:54 PM	Run finished at 9:07 PM
7/6/2012	9:15:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/6/2012	9:15:29 PM	Recipe started at 9:15 PM
7/6/2012	9:15:29 PM	Helium valve closed
7/6/2012	9:15:29 PM	H2 valve closed
7/6/2012	9:15:29 PM	BCl3 valve closed
7/6/2012	9:15:29 PM	PH3 valve closed
7/6/2012	9:15:29 PM	SiCl4 pre valve closed
7/6/2012	9:15:29 PM	SiCl4 post valve closed
7/6/2012	9:15:29 PM	Main Vac valve closed
7/6/2012	9:15:29 PM	Bubbler valve closed
7/6/2012	9:15:29 PM	Bypass valve opened
7/6/2012	9:15:29 PM	Helium MFC set to  0.000000
7/6/2012	9:15:29 PM	H2 MFC set to  0.000000
7/6/2012	9:15:29 PM	BCl3 MFC set to  0.000000
7/6/2012	9:15:29 PM	PH3 MFC set to  0.000000
7/6/2012	9:15:29 PM	SiCl4 MFC set to  0.000000
7/6/2012	9:15:29 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	9:15:29 PM	Tube furnace set to 0
7/6/2012	9:16:37 PM	Helium valve closed
7/6/2012	9:16:37 PM	H2 valve closed
7/6/2012	9:16:37 PM	BCl3 valve closed
7/6/2012	9:16:37 PM	PH3 valve closed
7/6/2012	9:16:37 PM	SiCl4 pre valve closed
7/6/2012	9:16:37 PM	SiCl4 post valve closed
7/6/2012	9:16:37 PM	Main Vac valve closed
7/6/2012	9:16:37 PM	Bubbler valve closed
7/6/2012	9:16:37 PM	Bypass valve opened
7/6/2012	9:16:37 PM	Helium MFC set to  0.000000
7/6/2012	9:16:37 PM	H2 MFC set to  0.000000
7/6/2012	9:16:37 PM	BCl3 MFC set to  0.000000
7/6/2012	9:16:37 PM	PH3 MFC set to  0.000000
7/6/2012	9:16:37 PM	SiCl4 MFC set to  0.000000
7/6/2012	9:16:37 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	9:16:37 PM	Tube furnace set to 0
7/6/2012	9:17:37 PM	Helium valve closed
7/6/2012	9:17:37 PM	H2 valve closed
7/6/2012	9:17:37 PM	BCl3 valve closed
7/6/2012	9:17:37 PM	PH3 valve closed
7/6/2012	9:17:37 PM	SiCl4 pre valve closed
7/6/2012	9:17:37 PM	SiCl4 post valve closed
7/6/2012	9:17:37 PM	Bypass valve closed
7/6/2012	9:17:37 PM	Bubbler valve closed
7/6/2012	9:17:37 PM	Main Vac valve opened
7/6/2012	9:17:37 PM	Helium MFC set to  0.000000
7/6/2012	9:17:37 PM	H2 MFC set to  0.000000
7/6/2012	9:17:37 PM	BCl3 MFC set to  0.000000
7/6/2012	9:17:37 PM	PH3 MFC set to  0.000000
7/6/2012	9:17:37 PM	SiCl4 MFC set to  0.000000
7/6/2012	9:17:37 PM	Bypass solenoid MFC set to  0.000000
7/6/2012	9:17:37 PM	Tube furnace set to 0
7/6/2012	9:17:38 PM	Run finished at 9:17 PM
7/6/2012	9:17:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
